Journal of Sensors and Sensor Systems
Journal of Sensors and Sensor Systems
JSSS
Articles | Volume 13, issue 2
Articles | Volume 13, issue 2
https://doi.org/10.5194/jsss-13-219-2024
© Author(s) 2024. This work is distributed under
the Creative Commons Attribution 4.0 License.
Special issue:
https://doi.org/10.5194/jsss-13-219-2024
© Author(s) 2024. This work is distributed under
the Creative Commons Attribution 4.0 License.
Articles | Volume 13, issue 2
Regular research article
 | 
02 Aug 2024
Regular research article |  | 02 Aug 2024

Miniaturized two-chamber photoacoustic CO2 sensor with a wafer-bonded MEMS (micro-electro-mechanical systems) detector

Simon Gaßner, Simon Essing, David Tumpold, Katrin Schmitt, and Jürgen Wöllenstein

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Latest update: 31 Oct 2025
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Short summary
This article describes a small prototype sensor designed to sense carbon dioxide (CO2) levels for indoor air quality monitoring. The device uses a photoacoustic detector fabricated using a wafer-bonding process. This allows for high-volume production of the sensors. The prototype presented is small in size and can detect CO2 levels as low as 81 ppm with a response time of 53 s. Our results show suitability for application in indoor air quality control systems.
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Sensors and Measurement Science International SMSI 2023