Journal of Sensors and Sensor Systems
Journal of Sensors and Sensor Systems
JSSS
Articles | Volume 13, issue 2
Articles | Volume 13, issue 2
https://doi.org/10.5194/jsss-13-219-2024
© Author(s) 2024. This work is distributed under
the Creative Commons Attribution 4.0 License.
Special issue:
https://doi.org/10.5194/jsss-13-219-2024
© Author(s) 2024. This work is distributed under
the Creative Commons Attribution 4.0 License.
Articles | Volume 13, issue 2
Regular research article
 | 
02 Aug 2024
Regular research article |  | 02 Aug 2024

Miniaturized two-chamber photoacoustic CO2 sensor with a wafer-bonded MEMS (micro-electro-mechanical systems) detector

Simon Gaßner, Simon Essing, David Tumpold, Katrin Schmitt, and Jürgen Wöllenstein

Viewed

Total article views: 368 (including HTML, PDF, and XML)
HTML PDF XML Total BibTeX EndNote
289 69 10 368 9 9
  • HTML: 289
  • PDF: 69
  • XML: 10
  • Total: 368
  • BibTeX: 9
  • EndNote: 9
Views and downloads (calculated since 02 Aug 2024)
Cumulative views and downloads (calculated since 02 Aug 2024)

Viewed (geographical distribution)

Total article views: 349 (including HTML, PDF, and XML) Thereof 349 with geography defined and 0 with unknown origin.
Country # Views %
  • 1
1
 
 
 
 
Latest update: 20 Nov 2024
Download
Short summary
This article describes a small prototype sensor designed to sense carbon dioxide (CO2) levels for indoor air quality monitoring. The device uses a photoacoustic detector fabricated using a wafer-bonding process. This allows for high-volume production of the sensors. The prototype presented is small in size and can detect CO2 levels as low as 81 ppm with a response time of 53 s. Our results show suitability for application in indoor air quality control systems.
Read more
Special issue
Sensors and Measurement Science International SMSI 2023