Articles | Volume 13, issue 2
https://doi.org/10.5194/jsss-13-219-2024
© Author(s) 2024. This work is distributed under
the Creative Commons Attribution 4.0 License.
the Creative Commons Attribution 4.0 License.
Special issue:
https://doi.org/10.5194/jsss-13-219-2024
© Author(s) 2024. This work is distributed under
the Creative Commons Attribution 4.0 License.
the Creative Commons Attribution 4.0 License.
Miniaturized two-chamber photoacoustic CO2 sensor with a wafer-bonded MEMS (micro-electro-mechanical systems) detector
Simon Gaßner
Department of Microsystems Engineering, University of Freiburg, Freiburg, Germany
Infineon Technologies AG, Neubiberg, Germany
Simon Essing
TUM School of Computation, Information and Technology, Technical University of Munich, Munich, Germany
David Tumpold
Infineon Technologies AG, Neubiberg, Germany
Katrin Schmitt
Department of Microsystems Engineering, University of Freiburg, Freiburg, Germany
Gas and Process Technology, Fraunhofer IPM, Freiburg, Germany
Jürgen Wöllenstein
CORRESPONDING AUTHOR
Department of Microsystems Engineering, University of Freiburg, Freiburg, Germany
Gas and Process Technology, Fraunhofer IPM, Freiburg, Germany
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J. Sens. Sens. Syst., 12, 123–131, https://doi.org/10.5194/jsss-12-123-2023, https://doi.org/10.5194/jsss-12-123-2023, 2023
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Infrared spectroscopy is great for determining the composition of liquids. Combined with attenuated total reflection (ATR), one can just put the sample on the sensitive surface. We made a compact device with a diamond-coated silicon ATR crystal to protect the surface against aggressive fluids. Silicon crystal, light source and detector are hermetically sealed in a housing. Our tests show that the diamond coating enhanced the sensitivity compared to uncoated ATR elements as predicted by theory.
Max Bergau, Thomas Strahl, Benjamin Scherer, and Jürgen Wöllenstein
J. Sens. Sens. Syst., 12, 61–68, https://doi.org/10.5194/jsss-12-61-2023, https://doi.org/10.5194/jsss-12-61-2023, 2023
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Imaging of greenhouse gases is of great interest due to global warming. A spectroscopic method, using an active illumination of the scene, is presented. It allows for imaging and concentration measurements of much smaller gas plumes and leaks than current state-of-the-art gas cameras (optical gas imaging cameras). A real-time camera is realized and validated using known methane concentrations.
Katrin Schmitt, Mara Sendelbach, Christian Weber, Jürgen Wöllenstein, and Thomas Strahl
J. Sens. Sens. Syst., 12, 37–44, https://doi.org/10.5194/jsss-12-37-2023, https://doi.org/10.5194/jsss-12-37-2023, 2023
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We present a photoacoustic sensor enabling fast, inexpensive, and highly sensitive methane detection in environmental monitoring applications. Six different T-cell designs were both theoretically and experimentally investigated. The aim was to understand the photoacoustic signal generation and resonances in relation to the different cell geometries, and determine the long-term stability and the detection limits for methane. These were below the methane background concentration in air of 1.8 ppm.
Benedikt Bierer, Dario Grgić, Olena Yurchenko, Laura Engel, Hans-Fridtjof Pernau, Martin Jägle, Leonhard Reindl, and Jürgen Wöllenstein
J. Sens. Sens. Syst., 10, 185–191, https://doi.org/10.5194/jsss-10-185-2021, https://doi.org/10.5194/jsss-10-185-2021, 2021
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Detection of flammable gases is necessary to avoid explosive atmospheres. Commercial pellistors require an operation temperature above 450 °C for the detection of methane. We present a novel wireless low-power catalytic gas sensor system based on non-precious metal catalyst for the detection of methane and propane operated at 350 °C. The combination of a MEMS-based sensor with a low-power radio system provides the opportunity to monitor complex infrastructures without using a power grid.
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Short summary
This article describes a small prototype sensor designed to sense carbon dioxide (CO2) levels for indoor air quality monitoring. The device uses a photoacoustic detector fabricated using a wafer-bonding process. This allows for high-volume production of the sensors. The prototype presented is small in size and can detect CO2 levels as low as 81 ppm with a response time of 53 s. Our results show suitability for application in indoor air quality control systems.
This article describes a small prototype sensor designed to sense carbon dioxide (CO2) levels...
Special issue