Journal of Sensors and Sensor Systems
Journal of Sensors and Sensor Systems
JSSS
Articles | Volume 13, issue 2
Articles | Volume 13, issue 2
https://doi.org/10.5194/jsss-13-227-2024
© Author(s) 2024. This work is distributed under
the Creative Commons Attribution 4.0 License.
Special issue:
https://doi.org/10.5194/jsss-13-227-2024
© Author(s) 2024. This work is distributed under
the Creative Commons Attribution 4.0 License.
Articles | Volume 13, issue 2
Regular research article
 | 
30 Aug 2024
Regular research article |  | 30 Aug 2024

Thin quartz resonators as a detector element for thermal infrared sensors

Agnes Eydam, Christian Hoyer, Volkmar Norkus, Frank Ellinger, and Gerald Gerlach

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Short summary
The temperature dependence of the resonance frequency of quartz resonators can be used for thermal infrared sensors. The quartz chips must be very thin to obtain a good sensor signal. This work describes how to manufacture and package sensors with 5 µm thin chips. Different sensor layouts are ion beam etched; they influence the vibration of the resonators, which is shown by impedance measurements. The temperature coefficient of the resonance frequency is determined to be around 90 ppm K-1.
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Sensors and Measurement Science International SMSI 2023