Articles | Volume 13, issue 2
https://doi.org/10.5194/jsss-13-227-2024
© Author(s) 2024. This work is distributed under the Creative Commons Attribution 4.0 License.
Special issue:
Regular research article
| 
30 Aug 2024
Regular research article |
| 30 Aug 2024
| 30 Aug 2024
Thin quartz resonators as a detector element for thermal infrared sensors
Related authors
J. Sens. Sens. Syst., 12, 141–146, 2023
Cited articles
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Danel, J. and Delapierre, G.: Quartz: a material for microdevices, J. Micromech. Microeng., 1, 187–198, https://doi.org/10.1088/0960-1317/1/4/001, 1991.
Engen, G. F. and Hoer, C. A.: Thru-Reflect-Line: An improved technique for calibrating the dual six-port automatic network analyzer, IEEE T. Microw. Theory, 27, 987–993, https://doi.org/10.1109/TMTT.1979.1129778, 1979.
Gerlach, G. and Budzier, H.: Thermische Infrarotsensoren: Grundlagen für Anwender, Wiley-VCH, ISBN: 978-3-527-40960-0, 2010.
Li, C., Zhang, Y., and Hirakawa, K.: Terahertz detectors using microelectromechanical system resonators, Sensors, 23, 5938, https://doi.org/10.3390/s23135938, 2023.
