Articles | Volume 13, issue 2
https://doi.org/10.5194/jsss-13-227-2024
© Author(s) 2024. This work is distributed under
the Creative Commons Attribution 4.0 License.
the Creative Commons Attribution 4.0 License.
Special issue:
https://doi.org/10.5194/jsss-13-227-2024
© Author(s) 2024. This work is distributed under
the Creative Commons Attribution 4.0 License.
the Creative Commons Attribution 4.0 License.
Regular research article
| 
30 Aug 2024
Regular research article |
| 30 Aug 2024
| 30 Aug 2024
Thin quartz resonators as a detector element for thermal infrared sensors
Agnes Eydam
CORRESPONDING AUTHOR
Solid State Electronics Laboratory, Dresden University of Technology, 01062 Dresden, Germany
Christian Hoyer
Chair of Circuit Design and Network Theory, Dresden University of Technology, 01062 Dresden, Germany
Volkmar Norkus
Solid State Electronics Laboratory, Dresden University of Technology, 01062 Dresden, Germany
Frank Ellinger
Chair of Circuit Design and Network Theory, Dresden University of Technology, 01062 Dresden, Germany
Gerald Gerlach
Solid State Electronics Laboratory, Dresden University of Technology, 01062 Dresden, Germany
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Piezoelectric devices are characterized non-destructively to ensure their functionality. The material is heated by laser diodes. The resulting temperature changes lead to a pyroelectric current. Analytical and numerical finite element models describe the temperature distribution and the current in frequency and time domain. Modelling and experimental results are compared for piezoelectric plates and integrated sensors and actuators.
Stefan Schreiber, Nadja Steinke, and Gerald Gerlach
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We have managed to reduce the measuring time of previously common hydrogel-based sensors from a few minutes to a few seconds. For this, the arrangement of the hydrogel in the sensor was changed so that the volume of the hydrogel could be reduced. The biggest challenge, apart from generating a very thin pattern, was to firmly bond the hydrogel to a silicon surface. This was to ensure that the resulting forces of the bimorph effect can be absorbed.
Helmut Budzier and Gerald Gerlach
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In thermometry, the displayed temperature value of an object depends on the size of the object. This behaviour, the size-of-source effect, might be a major cause of measurement uncertainty in a thermoscene. The influence of diffraction and digitization can be described advantageously with the modulation transfer function. Especially with very small objects the displayed temperatures are too low. When imaging large objects, not only the edge areas are affected, but also the entire image.
Daniela Franke and Gerald Gerlach
J. Sens. Sens. Syst., 10, 93–100, https://doi.org/10.5194/jsss-10-93-2021, https://doi.org/10.5194/jsss-10-93-2021, 2021
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Photoelasticity is considered a useful measurement tool for non-destructive and contactless determination of mechanical stresses or strains in the production of silicon wafers. In this work, a detailed derivation for the anisotropic stress-optic law is presented, and the corresponding stress-optical parameters are measured.
Tobias Ott and Gerald Gerlach
J. Sens. Sens. Syst., 9, 79–87, https://doi.org/10.5194/jsss-9-79-2020, https://doi.org/10.5194/jsss-9-79-2020, 2020
Nikolai Gulnizkij and Gerald Gerlach
J. Sens. Sens. Syst., 9, 1–6, https://doi.org/10.5194/jsss-9-1-2020, https://doi.org/10.5194/jsss-9-1-2020, 2020
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We describe a mechanical model based on the beam theory for the development of a beam-like sensor switch with switching hysteresis for humidity sensing. The hydrogel swelling provides the mechanical energy to deflect the partly hydrogel-covered bending beam via the bimorph effect. From the model, we calculate the deflection of a beam-like sensor switch with and without a switching hysteresis. A beam-like sensor switch was manufactured, and the switching hysteresis was successfully demonstrated.
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J. Sens. Sens. Syst., 8, 215–222, https://doi.org/10.5194/jsss-8-215-2019, https://doi.org/10.5194/jsss-8-215-2019, 2019
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In this work, genetically modified cells of the yeast Saccharomyces cerevisiae BY4741 were confined in a four-chamber microfluidic cell, providing an optical monitoring of the cell behaviour and their supply with the nutrients. The measurements of the time-dependent fluorescence intensity were performed with different concentrations of the drug diclofenac, and the sensitivity of yeast cells to diclofenac was demonstrated. Cell viability was monitored by simultaneous impedance recording.
Jan Erfkamp, Margarita Guenther, and Gerald Gerlach
J. Sens. Sens. Syst., 7, 219–226, https://doi.org/10.5194/jsss-7-219-2018, https://doi.org/10.5194/jsss-7-219-2018, 2018
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We describe a low-cost sensor for the detection of ethanol in alcoholic beverages. The reversible swelling of alcohol-sensitive hydrogels depends on the ethanol concentration. The resulting swelling pressure was detected via piezoresistive sensors. We have tested the swelling properties of the hydrogel (e.g. swelling kinetics, selectivity to other alcohols). Furthermore, the first sensor set-ups were tested and the reversibility of the hydrogel-based piezoresistive sensor was demonstrated.
Christoph Kroh, Roland Wuchrer, Margarita Günther, Thomas Härtling, and Gerald Gerlach
J. Sens. Sens. Syst., 7, 51–55, https://doi.org/10.5194/jsss-7-51-2018, https://doi.org/10.5194/jsss-7-51-2018, 2018
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The inline monitoring of parameters in aqueous liquids is facing an increasing demand in many application areas. In this paper we report on an optical monitoring of the pH value in liquids by means of a sensitive hydrogel, which can be applied in the physiological range. Our results indicate a nearly linear dependency between pH value and hydrogel swelling. Furthermore, we show an improvement of the response time by a factor of 2 in comparison to other systems exploiting this kind of hydrogel.
Ulrike Schmidt, Carola Jorsch, Margarita Guenther, and Gerald Gerlach
J. Sens. Sens. Syst., 5, 409–417, https://doi.org/10.5194/jsss-5-409-2016, https://doi.org/10.5194/jsss-5-409-2016, 2016
Julia Körner, Christopher F. Reiche, Bernd Büchner, Thomas Mühl, and Gerald Gerlach
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The presented work gives insight into the behaviour of co-resonantly coupled oscillating cantilever beams by means of electro-mechanical analogies. An electric circuit model is analysed with various stages of complexity, and conclusions are drawn regarding the applicability of the co-resonant concept for sensors. Furthermore, this is validated by a comparison between the theoretical predictions and experimental data.
Marisa Rio, Sharanya Bola, Richard H. W. Funk, and Gerald Gerlach
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Endogeneous electric fields (EFs) affect a wide range of cellular functions such as migration, wound healing and regeneration. Similar results were observed when external EFs are applied. To date, the phenomenon of electrotaxis has been studied only in homogeneous EF environments. Here, we report on the construction and fabrication of a microfluidic biochip as well as first results for stimulation of cells with stationary, non-homogeneous EFs.
Carola Jorsch, Ulrike Schmidt, David Ulkoski, Carmen Scholz, Margarita Guenther, and Gerald Gerlach
J. Sens. Sens. Syst., 5, 229–235, https://doi.org/10.5194/jsss-5-229-2016, https://doi.org/10.5194/jsss-5-229-2016, 2016
Agnes Eydam, Gunnar Suchaneck, and Gerald Gerlach
J. Sens. Sens. Syst., 5, 165–170, https://doi.org/10.5194/jsss-5-165-2016, https://doi.org/10.5194/jsss-5-165-2016, 2016
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M. Windisch, K.-J. Eichhorn, J. Lienig, G. Gerlach, and L. Schulze
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Hydrogels are swellable polymers, which exhibit superior sensor properties. However, the exploitation of these properties for innovative measurement technology has been prevented by the lack of a manufacturing technique for thin hydogel films that suits industrial needs. We suggest a paradigm change from the current recipe-driven sensor manufacturing to a specification-driven one. Our contributions are optimized processes for a controllable film formation and thermal curing of the hydrogels.
A. Tempelhahn, H. Budzier, V. Krause, and G. Gerlach
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U. Marschner, G. Gerlach, E. Starke, and A. Lenk
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M. Liess
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B. Schmitt, C. Kiefer, and A. Schütze
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A novel sensor principle for determining binary fluid mixtures of known components is presented. A bluff body is placed in the fluid channel, causing the formation of a stationary pair of vortices behind the body. The length of the vortex pair depends on the mixture’s viscosity and thus its composition. It is measured by placing a microheater in the vortex area and making use of forced convection which changes with the size of the vortices.
H. Budzier and G. Gerlach
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P. Sharma, N. Murali, and T. Jayakumar
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M. Seifert, K. Anhalt, C. Baltruschat, S. Bonss, and B. Brenner
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U. Dillner, E. Kessler, and H.-G. Meyer
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Short summary
The temperature dependence of the resonance frequency of quartz resonators can be used for thermal infrared sensors. The quartz chips must be very thin to obtain a good sensor signal. This work describes how to manufacture and package sensors with 5 µm thin chips. Different sensor layouts are ion beam etched; they influence the vibration of the resonators, which is shown by impedance measurements. The temperature coefficient of the resonance frequency is determined to be around 90 ppm K-1.
The temperature dependence of the resonance frequency of quartz resonators can be used for...
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