Articles | Volume 14, issue 1
https://doi.org/10.5194/jsss-14-89-2025
© Author(s) 2025. This work is distributed under the Creative Commons Attribution 4.0 License.
Regular research article
| 
27 May 2025
Regular research article |
| 27 May 2025
| 27 May 2025
Tailored measurement setup for the contactless characterization of MEMS resonators at the wafer level
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J. Sens. Sens. Syst., 13, 9–23, 2024
Cited articles
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Asadi, K., Yu, J., and Cho, H.: Nonlinear couplings and energy transfers in micro- and nano-mechanical resonators: intermodal coupling, internal resonance and synchronization, Philos. T. Roy. Soc. A, 376, 20170141, https://doi.org/10.1098/rsta.2017.0141, 2018. a
Bienstman, J., Tilmans, H. A. C., Peeters, E. J. E. A., Steyaert, M., and Puers, R.: An oscillator circuit for electrostatically driven silicon-based one-port resonators, Sensor. Actuat. A.-Phys., 52, 179–186, https://doi.org/10.1016/0924-4247(96)80146-4, 1996. a
Chandorkar, S. A., Candler, R. N., Duwel, A., Melamud, R., Agarwal, M., Goodson, K. E., and Kenny, T. W.: Multimode thermoelastic dissipation, J. Appl. Phys., 105, 043505, https://doi.org/10.1063/1.3072682, 2009. a
Cioffi, K. R. and Wan-Thai, H.: 32KHz MEMS-based oscillator for low-power applications, in: Proceedings of the 2005 IEEE International Frequency Control Symposium and Exposition, Vancouver, BC, 29–31 August 2005, IEEE, 551–558, https://doi.org/10.1109/FREQ.2005.1573992, 2005. a
