Articles | Volume 14, issue 1
https://doi.org/10.5194/jsss-14-89-2025
© Author(s) 2025. This work is distributed under the Creative Commons Attribution 4.0 License.
Regular research article
| 
27 May 2025
Regular research article |
| 27 May 2025
| 27 May 2025
Tailored measurement setup for the contactless characterization of MEMS resonators at the wafer level
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