Articles | Volume 15, issue 2
https://doi.org/10.5194/jsss-15-167-2026
© Author(s) 2026. This work is distributed under the Creative Commons Attribution 4.0 License.
Regular research article
| 
02 Sep 2026
Regular research article |
| 02 Sep 2026
| 02 Sep 2026
Modeling and extraction of residual stresses in some MEMS multilayer systems
Cited articles
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