Articles | Volume 4, issue 1
J. Sens. Sens. Syst., 4, 199–208, 2015
https://doi.org/10.5194/jsss-4-199-2015

Special issue: 17th ITG/GMA-Conference on Sensors and Measurement Systems...

J. Sens. Sens. Syst., 4, 199–208, 2015
https://doi.org/10.5194/jsss-4-199-2015

Regular research article 02 Jun 2015

Regular research article | 02 Jun 2015

Micro- and nanocoordinate measurements of micro-parts with 3-D tunnelling current probing

A. Schuler, T. Hausotte, and Z. Sun A. Schuler et al.
  • Institute of Manufacturing Metrology, Friedrich-Alexander-Universität Erlangen-Nürnberg, Naegelsbachstr. 25, 91052 Erlangen, Germany

Abstract. Measurement tasks of modern micro- and nanometrology are posing a problem for current measurement instruments with decreasing structure sizes and rising aspect ratios. There is an open requirement for nanometre-resolving 3-D capable sensors and corresponding 3-D positioning systems to operate the sensors for 3-D measurements. A 3-D probing system based on electrical interaction is presented which is operated on a nanopositioning system type SIOS NMM-1. Furthermore, we demonstrate the progress and new possibilities for 3-D measurements with the nanopositioning and nanomeasurement machine NMM-1 and also with the application of a rotary kinematic chain. In addition new 3-D measurement routines for the NMM-1, also for micro-tactile probing systems as well as current plans, are shown.

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Short summary
Measurement tasks of modern micro- and nanometrology with decreasing structure sizes and rising aspect ratios require nanometre-resolving 3-D capable sensors. A 3-D probing system based on electrical interaction is presented which is operated on a nanopositioning system NMM-1. New 3-D measurement procedures for the probing system as well as for micrometrology measurement tasks in general are shown.