Articles | Volume 4, issue 1
J. Sens. Sens. Syst., 4, 199–208, 2015
https://doi.org/10.5194/jsss-4-199-2015

Special issue: 17th ITG/GMA-Conference on Sensors and Measurement Systems...

J. Sens. Sens. Syst., 4, 199–208, 2015
https://doi.org/10.5194/jsss-4-199-2015
Regular research article
02 Jun 2015
Regular research article | 02 Jun 2015

Micro- and nanocoordinate measurements of micro-parts with 3-D tunnelling current probing

A. Schuler et al.

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Cited articles

Balzer, F. G., Hausotte, T., Dorozhovets, N., Manske, E. and Jäger, G.: Tactile 3-D microprobe system with exchangeable styli, Meas. Sci. Technol., 22, 094018, https://doi.org/10.1088/0957-0233/22/9/094018, 2011.
Berndt, G., Hultzsch, E., and Winhold, H.: Funktionstoleranz und Meßunsicherheit, Wissenschaftliche Zeitschrift der Technischen Universität Dresden, 17, 465–471, 1968.
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Bissacco, G., Hansen, H. N., and Slunksy, J.: Modelling the cutting edge radius size effect for force prediction in micro milling, CIRP Ann.-Manuf. Techn., 57, 113–116, 2008.
Hansen, H. N., Carneiro, K., Haitjema, H., and De Chiffre, L.: Dimensional micro and nanometrology, CIRP Ann.-Manuf. Techn., 55, 721–743, 2006.
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Short summary
Measurement tasks of modern micro- and nanometrology with decreasing structure sizes and rising aspect ratios require nanometre-resolving 3-D capable sensors. A 3-D probing system based on electrical interaction is presented which is operated on a nanopositioning system NMM-1. New 3-D measurement procedures for the probing system as well as for micrometrology measurement tasks in general are shown.