Articles | Volume 4, issue 1
J. Sens. Sens. Syst., 4, 199–208, 2015
https://doi.org/10.5194/jsss-4-199-2015

Special issue: 17th ITG/GMA-Conference on Sensors and Measurement Systems...

J. Sens. Sens. Syst., 4, 199–208, 2015
https://doi.org/10.5194/jsss-4-199-2015
Regular research article
02 Jun 2015
Regular research article | 02 Jun 2015

Micro- and nanocoordinate measurements of micro-parts with 3-D tunnelling current probing

A. Schuler et al.

Viewed

Total article views: 1,266 (including HTML, PDF, and XML)
HTML PDF XML Total BibTeX EndNote
686 472 108 1,266 105 108
  • HTML: 686
  • PDF: 472
  • XML: 108
  • Total: 1,266
  • BibTeX: 105
  • EndNote: 108
Views and downloads (calculated since 02 Jun 2015)
Cumulative views and downloads (calculated since 02 Jun 2015)

Cited

Latest update: 28 Sep 2022
Download
Short summary
Measurement tasks of modern micro- and nanometrology with decreasing structure sizes and rising aspect ratios require nanometre-resolving 3-D capable sensors. A 3-D probing system based on electrical interaction is presented which is operated on a nanopositioning system NMM-1. New 3-D measurement procedures for the probing system as well as for micrometrology measurement tasks in general are shown.