Journal of Sensors and Sensor Systems
Journal of Sensors and Sensor Systems
JSSS
Articles | Volume 4, issue 1
Articles | Volume 4, issue 1
https://doi.org/10.5194/jsss-4-199-2015
© Author(s) 2015. This work is distributed under
the Creative Commons Attribution 3.0 License.
Special issue:
https://doi.org/10.5194/jsss-4-199-2015
© Author(s) 2015. This work is distributed under
the Creative Commons Attribution 3.0 License.
Articles | Volume 4, issue 1
Regular research article
 | 
02 Jun 2015
Regular research article |  | 02 Jun 2015

Micro- and nanocoordinate measurements of micro-parts with 3-D tunnelling current probing

A. Schuler, T. Hausotte, and Z. Sun

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Latest update: 23 Nov 2024
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Short summary
Measurement tasks of modern micro- and nanometrology with decreasing structure sizes and rising aspect ratios require nanometre-resolving 3-D capable sensors. A 3-D probing system based on electrical interaction is presented which is operated on a nanopositioning system NMM-1. New 3-D measurement procedures for the probing system as well as for micrometrology measurement tasks in general are shown.
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