Micro- and nanocoordinate measurements of micro-parts with 3-D tunnelling current probing

Schuler, A.; Hausotte, T.; Sun, Z.

doi:10.5194/jsss-4-199-2015

Articles | Volume 4, issue 1

https://doi.org/10.5194/jsss-4-199-2015

© Author(s) 2015. This work is distributed under
the Creative Commons Attribution 3.0 License.

Special issue:

17th ITG/GMA-Conference on Sensors and Measurement Systems...

https://doi.org/10.5194/jsss-4-199-2015

© Author(s) 2015. This work is distributed under
the Creative Commons Attribution 3.0 License.

Articles | Volume 4, issue 1

Regular research article

|

02 Jun 2015

Regular research article |

| 02 Jun 2015

Micro- and nanocoordinate measurements of micro-parts with 3-D tunnelling current probing

A. Schuler, T. Hausotte, and Z. Sun

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Latest update: 10 Feb 2026

Short summary

Measurement tasks of modern micro- and nanometrology with decreasing structure sizes and rising aspect ratios require nanometre-resolving 3-D capable sensors. A 3-D probing system based on electrical interaction is presented which is operated on a nanopositioning system NMM-1. New 3-D measurement procedures for the probing system as well as for micrometrology measurement tasks in general are shown.