Articles | Volume 4, issue 2
J. Sens. Sens. Syst., 4, 331–340, 2015
https://doi.org/10.5194/jsss-4-331-2015

Special issue: High-temperature sensors and materials

J. Sens. Sens. Syst., 4, 331–340, 2015
https://doi.org/10.5194/jsss-4-331-2015

Regular research article 17 Dec 2015

Regular research article | 17 Dec 2015

Correlation of BAW and SAW properties of langasite at elevated temperatures

M. Schulz1, E. Mayer2, I. Shrena2, D. Eisele2, M. Schmitt2, L. M. Reindl2, and H. Fritze1 M. Schulz et al.
  • 1Institute of Energy Research and Physical Technologies, Clausthal University of Technology, Goslar, Germany
  • 2Department of Microsystems Engineering, Albert-Ludwigs-Universität Freiburg, Freiburg, Germany

Abstract. The full set of electromechanical data of langasite (La3Ga5SiO14) is determined in the temperature range from 20 to 900 °C using differently oriented bulk acoustic wave resonators. For data evaluation a physical model of vibration is developed and applied. Thereby, special emphasis is taken on mechanical and electrical losses at high temperatures. The resulting data set is used to calculate the properties of surface acoustic waves. Direct comparison with experimental data such as velocity, coupling coefficients and propagation loss measured using surface acoustic wave devices with two different crystal orientations shows good agreement.