Articles | Volume 4, issue 2
https://doi.org/10.5194/jsss-4-331-2015
© Author(s) 2015. This work is distributed under
the Creative Commons Attribution 3.0 License.
the Creative Commons Attribution 3.0 License.
Special issue:
https://doi.org/10.5194/jsss-4-331-2015
© Author(s) 2015. This work is distributed under
the Creative Commons Attribution 3.0 License.
the Creative Commons Attribution 3.0 License.
Regular research article
| 
17 Dec 2015
Regular research article |
| 17 Dec 2015
Correlation of BAW and SAW properties of langasite at elevated temperatures
M. Schulz
CORRESPONDING AUTHOR
Institute of Energy Research and Physical Technologies, Clausthal University of Technology, Goslar, Germany
E. Mayer
Department of Microsystems Engineering, Albert-Ludwigs-Universität Freiburg, Freiburg, Germany
I. Shrena
Department of Microsystems Engineering, Albert-Ludwigs-Universität Freiburg, Freiburg, Germany
D. Eisele
Department of Microsystems Engineering, Albert-Ludwigs-Universität Freiburg, Freiburg, Germany
M. Schmitt
Department of Microsystems Engineering, Albert-Ludwigs-Universität Freiburg, Freiburg, Germany
L. M. Reindl
Department of Microsystems Engineering, Albert-Ludwigs-Universität Freiburg, Freiburg, Germany
H. Fritze
Institute of Energy Research and Physical Technologies, Clausthal University of Technology, Goslar, Germany
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Fabian Kohler, Monika Farina, Michal Schulz, Holger Fritze, and Jürgen Wilde
J. Sens. Sens. Syst., 11, 83–97, https://doi.org/10.5194/jsss-11-83-2022, https://doi.org/10.5194/jsss-11-83-2022, 2022
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This work shows a possibility of assembly and connection technology for use under high temperatures up to 1000 °C. A packaging concept was developed, and all the necessary material and joining technologies have been verified to be suitable for use at 1000 °C. A working sensor was built and measured in comparison to the resonator alone. All packaging materials and structures were measured electrically and dielectrically. Equivalent circuits for the packages up to 2 MHz and 1000 °C are available.
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Temperature sensors based on piezoelectric devices enable precise measurement of temperature changes in harsh environments such as high temperatures or aggressive atmospheres. In the case of this device, the change in the temperature is detected by means of the changing resonance frequency of the sensor. Here a sensor device based on catangasite (an isomorph of quartz) is presented. We discuss its behavior at elevated temperatures and confirm that it can successfully operate up to 1030 °C.
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Dhyan Kohlmann, Marvin Schewe, Hendrik Wulfmeier, Christian Rembe, and Holger Fritze
J. Sens. Sens. Syst., 13, 167–177, https://doi.org/10.5194/jsss-13-167-2024, https://doi.org/10.5194/jsss-13-167-2024, 2024
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A very small, anharmonic but periodic signal is separated from a noise background that is orders of magnitude larger than the pure signal. The approach consists of a sequence of filters and transformations and is demonstrated on an interferometric measurement of the high-temperature chemical expansion of a thin film, containing heat haze, thermal length drift, and parasitic vibrations. The displacement is 38 % larger and the uncertainty 35 % lower than when evaluated with previous approaches.
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J. Sens. Sens. Syst., 11, 299–313, https://doi.org/10.5194/jsss-11-299-2022, https://doi.org/10.5194/jsss-11-299-2022, 2022
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High-temperature stable piezoelectric resonators are coated with oxide electrodes. The impact of the oxide electrode conductivity on the mass sensitivity and on the resonance frequency of the device is described by electrical and mechanical models, which are used to analyse the experimental data. Furthermore, the impact of an increasing oxide electrode conductivity is discussed with respect to the application of oxide electrodes and for gas sensing.
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Temperature sensors based on piezoelectric devices enable precise measurement of temperature changes in harsh environments such as high temperatures or aggressive atmospheres. In the case of this device, the change in the temperature is detected by means of the changing resonance frequency of the sensor. Here a sensor device based on catangasite (an isomorph of quartz) is presented. We discuss its behavior at elevated temperatures and confirm that it can successfully operate up to 1030 °C.
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J. Sens. Sens. Syst., 10, 185–191, https://doi.org/10.5194/jsss-10-185-2021, https://doi.org/10.5194/jsss-10-185-2021, 2021
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Detection of flammable gases is necessary to avoid explosive atmospheres. Commercial pellistors require an operation temperature above 450 °C for the detection of methane. We present a novel wireless low-power catalytic gas sensor system based on non-precious metal catalyst for the detection of methane and propane operated at 350 °C. The combination of a MEMS-based sensor with a low-power radio system provides the opportunity to monitor complex infrastructures without using a power grid.
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J. Sens. Sens. Syst., 10, 121–126, https://doi.org/10.5194/jsss-10-121-2021, https://doi.org/10.5194/jsss-10-121-2021, 2021
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The actuators of precise positioning based on LiNbO3 or LiTaO3 bimorph structures are considered. They consist of two joined plates: one of them lengthens and the other one shortens under the influence of an electric field and, as a result, the actuator bends. Such a device ensures small movements of probes in scanning probe microscopes, micro-electromechanical systems, micro-motors, etc. We determine the optimal orientations of the plates, ensuring the highest possible actuator displacements.
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Hendrik Wulfmeier, René Feder, Li Zhao, and Holger Fritze
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Kamalika Tiwari, Bipan Tudu, Rajib Bandyopadhyay, Anutosh Chatterjee, and Panchanan Pramanik
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Alexander Dijkshoorn, Patrick Werkman, Marcel Welleweerd, Gerjan Wolterink, Bram Eijking, John Delamare, Remco Sanders, and Gijs J. M. Krijnen
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Günter Schultes, Hanna Schmid-Engel, Silvan Schwebke, and Ulf Werner
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This research is about future sensor devices for force, pressure, and weight. The core of such sensors for mechanical quantities is a thin film that reacts to deformation. We are developing new sensor films with higher output. Different compositions of metal containing carbon films are examined. Most preferable and stable films contain nickel and carbon. The microscopic film morphology is uncovered. Electron tunneling between nanoparticles is responsible for the very sensitive reaction.
Sabrina Amrehn, Xia Wu, and Thorsten Wagner
J. Sens. Sens. Syst., 5, 179–185, https://doi.org/10.5194/jsss-5-179-2016, https://doi.org/10.5194/jsss-5-179-2016, 2016
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Indium oxide inverse opal is a promising new material for optical gas sensors. The photonic properties caused by the inverse opal structure can be utilized to read out the sensors’ electronical state by optical methods. The maintenance of good thermal stability of transducer material during operation is a minimum requirement. We present results on the synthesis and investigation of the structural stability of the In2O3 inverse opal structure up to a temperature of 550 °C (limit of substrate).
Kyle M. Sinding, Alison Orr, Luke Breon, and Bernhard R. Tittmann
J. Sens. Sens. Syst., 5, 113–123, https://doi.org/10.5194/jsss-5-113-2016, https://doi.org/10.5194/jsss-5-113-2016, 2016
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This paper investigates the effect of high-temperature and low-temperature (< 150 °C) processing conditions on the surface composition of the substrate. Furthermore, the resultant transducers from high- and low-temperature fabrication processes are compared to determine if a low-temperature processing method is feasible. For these studies a sol-gel spray-on process is employed to deposit piezoelectric ceramics onto a stainless-steel 316L substrate.
A. A. Haidry, N. Kind, and B. Saruhan
J. Sens. Sens. Syst., 4, 271–280, https://doi.org/10.5194/jsss-4-271-2015, https://doi.org/10.5194/jsss-4-271-2015, 2015
M. Dietrich, D. Rauch, U. Simon, A. Porch, and R. Moos
J. Sens. Sens. Syst., 4, 263–269, https://doi.org/10.5194/jsss-4-263-2015, https://doi.org/10.5194/jsss-4-263-2015, 2015
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The effect of stored ammonia on the complex dielectric permittivity of H-ZSM-5 zeolites with varying storage site density was observed between 200 and 300 °C under reaction conditions by microwave cavity perturbation. Polarization and dielectric losses were differently affected. The sensitivity of the polarization to stored ammonia is almost independent, the sensitivity of the dielectric losses strongly dependent on the storage site density. The results can be explained by proton hopping.
V. G. Harutyunyan, K. M. Gambaryan, V. M. Aroutiounian, and I. G. Harutyunyan
J. Sens. Sens. Syst., 4, 249–253, https://doi.org/10.5194/jsss-4-249-2015, https://doi.org/10.5194/jsss-4-249-2015, 2015
K. Kulshreshtha, B. Jurgelucks, F. Bause, J. Rautenberg, and C. Unverzagt
J. Sens. Sens. Syst., 4, 217–227, https://doi.org/10.5194/jsss-4-217-2015, https://doi.org/10.5194/jsss-4-217-2015, 2015
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In this paper we show that for radially symmetric piezoceramic disks non-zero sensitivity of the electrical impedance to the whole material parameter set can be computed using a system of 3-ring electrodes and non-uniform electrical excitation. We formulate an optimisation problem for increasing this sensitivity. However, the system displays multiple optimal configurations for the radii of said ring electrodes and we have shown some results from optimising such configurations using simulations.
F. Roth, C. Schmerbauch, E. Ionescu, N. Nicoloso, O. Guillon, and R. Riedel
J. Sens. Sens. Syst., 4, 133–136, https://doi.org/10.5194/jsss-4-133-2015, https://doi.org/10.5194/jsss-4-133-2015, 2015
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We report on the high-temperature piezoresistivity of carbon-containing silicon oxycarbide nanocomposites (C/SiOC). The piezoresistive behavior of the C/SiOC nanocomposites relies on the presence of dispersed nanocrystalline graphite and non-crystalline carbon domains. In comparison to highly ordered carbon, C/SiOC exhibits strongly enhanced sensitivities, even at high temperatures. Thus, k values of ca. 80 at the highest temperature reading, 1200°C, reveal that C/SiOC is a primary candidate.
P. Gembaczka, M. Görtz, Y. Celik, A. Jupe, M. Stühlmeyer, A. Goehlich, H. Vogt, W. Mokwa, and M. Kraft
J. Sens. Sens. Syst., 3, 335–347, https://doi.org/10.5194/jsss-3-335-2014, https://doi.org/10.5194/jsss-3-335-2014, 2014
F. Di Maggio, M. Ling, A. Tsang, J. Covington, J. Saffell, and C. Blackman
J. Sens. Sens. Syst., 3, 325–330, https://doi.org/10.5194/jsss-3-325-2014, https://doi.org/10.5194/jsss-3-325-2014, 2014
E. Dilonardo, M. Penza, M. Alvisi, C. Di Franco, D. Suriano, R. Rossi, F. Palmisano, L. Torsi, and N. Cioffi
J. Sens. Sens. Syst., 3, 245–252, https://doi.org/10.5194/jsss-3-245-2014, https://doi.org/10.5194/jsss-3-245-2014, 2014
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Electrochemically synthesized colloidal Au NPs with controlled dimension and composition were successfully deposited electrophoretically on CNT networked films. Au NP/CNT films were tested as active layers in resistive NO2 sensors, exhibiting a p-type response and a sensitivity depending on Au loading. The impact of the Au loading on gas sensing performance was investigated as a function of the working temperature, gas concentration and interfering gases.
A. Hosoya, S. Tamura, and N. Imanaka
J. Sens. Sens. Syst., 3, 141–144, https://doi.org/10.5194/jsss-3-141-2014, https://doi.org/10.5194/jsss-3-141-2014, 2014
A. Nocke
J. Sens. Sens. Syst., 2, 127–135, https://doi.org/10.5194/jsss-2-127-2013, https://doi.org/10.5194/jsss-2-127-2013, 2013
Cited articles
Bardong, J., Schulz, M., Schmitt, M., Shrena, I., Eisele, D., Mayer, E., Reindl, L., and Fritze, H.: Precise measurements of BAW and SAW properties of Langasite in the temperature range from 25 C to 1000 C, in: 2008 IEEE International Frequency Control Symposium, 326–331, 2008.
Bechmann, R.: Contour Modes of Square Plates excited Piezoelectrically and Determination of Elastic and Piezoelectric Coefficients, P. Phys. Soc. Lond., B64, 323–337, 1951.
Behanan, R., Moulzolf, S., Call, M., Bernhardt, G., Frankel, D., Lad, R., and da Cunha, M.: Thin films and techniques for SAW sensor operation above 1000 °C, in: 2013 Joint UFFC, EFTF and PFM Symposium, 1013–1016, 2015.
Bungo, A., Jian, C., Yamaguchi, K., Sawada, Y., Uda, S., and Pisarevsky, Y.: Analysis of Surface Acoustic Wave Properties of Rotated Y-Cut Langasite Substrate, Jpn. J. Appl. Phys., 38, 3239–3243, 1999.
da Cunha, M. P. and Fagundes, S. D. A.: Investigation on recent quartz-like materials for SAW applications, IEEE Trans. on Ultrasonics, IEEE Int. Ferro., 46, 1583–1590, 1999.
da Cunha, M. P., Moonlight, T., Lad, R., Bernhard, G., and Frankel, D. J.: Enabling very high temperature acoustic wave devices for sensor & frequency control applications, in: 2007 IEEE Ultrasonics Symposium, 2107–2110, 2007.
Engan, H.: Surface acsoustic wave multilevel transducers, IEEE T. Son. Ultrason., 6, 395–401, 1975.
Fachberger, R., Holzheu, T., Riha, E., Born, E., Pongratz, P., and Cerva, H.: Langasite and langatate nonuniform material properties correlatedto the performance of SAW devices, in: Frequency Control Symposium and PDA Exhibition, 2001, Proceedings of the 2001 IEEE International, 235–239, 2001.
Fachberger, R., Bruckner, G., Hauser, R., Ruppel, C., Biniasch, J., and Reindl, L.: Properties of radio frequency Rayleigh waves on langasite at elevated temperatures, in: Proc. 2004 IEEE Ultrasonics Symposium, 1223–1226, 2004.
Firebaugh, S. L., Jensen, K. F., and Schmidt, M. A.: Investigation of High-Temperature Degradation of Platinum Thin Films with an In Situ Resistance Measurement Apparatus, J. Microelectromech. S., 7, 128–135, 1998.
Fritze, H.: High temperature piezoelectric materials: Defect chemistry and electro-mechanical properties, J. Electroceram., 17, 625–630, 2006.
Fritze, H.: High-temperature piezoelectric crystals and devices, J. Electroceram., 26, 122–161, 2011a.
Fritze, H.: High-temperature bulk acoustic wave sensors, Meas. Sci. Technol., 22, 012002, 2011b.
Fritze, H. and Tuller, H. L.: Langasite for High Temperature Bulk Acoustic Wave Applications, Appl. Phys. Lett., 78, 976–977, 2001.
Fritze, H., Schulz, M., Seh, H., and Tuller, H.: Sensor application-related defect chemistry and electromechanical properties of langasite, Solid State Ionics, 177, 2313–2316, 2006.
Fukuda, T., Takeda, P., Shimamura, K., Kawanaka, H., Kumatoriya, M., Murakami, S., Sato, J., and Sato, M.: Growth of new langasite single crystals for piezoelectric applications, in: Applications of Ferroelectrics, 1998. ISAF 98, Proceedings of the Eleventh IEEE International Symposium on, 315–319, 1998.
Ikeda, T.: Fundamentals of piezoelectricity, Oxford University Press, Oxford, UK, 1990.
Ingebrigtsen, K. A.: Analysis of interdigital transducers, IEEE T. Son. Ultrason., 403–407, 1972.
Kosinski, J. A., Pastore Jr., R. A., Bigler, E., Pereira da Cunha, M., Malocha, D. C., and Detaint, J.: A Review of Langasite Material Constants from BAW and SAW Data: Toward and Improved Data Set, in: IEEE International Frequency Control Symposium, 278–286, 2001.
Koskela, J.: Modeling SAW devices including mass-loading effects, Helsinki University of Technology, Helsinki, Finland, 1998.
Malocha, D., da Cunha, M., Adler, E., Smythe, R. C., Frederick, S., Chou, M., Helmbold, R., and Zhou, Y. S.: Recent Measurements of Material Constants versus Temperature for Langatate, Langanite and Langasite, in: Frequency Control Symposium and Exhibition, 2000. Proceedings of the 2000 IEEE/EIA International, 200–205, 2000.
Mason, W. P.: Physical Acoustics, Principles and Methods, vol. 1A, Academic Press, New York, USA, 1964.
Meitzler, A., Tiersten, H., Warner, A., Berlincourt, D., Couqin, G., and Welsh III, F.: IEEE Standard on Piezoelectricity, ANSI/IEEE Std, IEEE, 1988.
Naumenko, N. and Solie, L.: Optimal cuts of langasite, La3Ga5Sio14 fpr SAW Devices, IEEE T. Ultrason. Ferr., 38, 530–537, 2001.
Peach, R.: A general Green function analysis for SAW devices, in: Proc. IEEE Ultrason. Symp., 221–225, 1995.
Peach, R.: On the existence of surface acoustic waves on piezoelectric substrate, IEEE T. Ultrason. Ferr., 49, 1308–1320, 2001.
Plessky, V., Koskela, J., Lehtonen, S., and Salomaa, M.: Surface transverse waves on langasite, in: 1998 IEEE Ultrasonics Symposium Proceedings, 139–142, 1998.
Richter, D., Sakharov, S., Forsén, E., Mayer, E., Reindl, L., and Fritze, H.: Thin Film Electrodes for High Temperature Surface Acoustic Wave Devices, Procedia Engineering, 25, 168–171, 2011.
Schneider, T., Richter, D., Doerner, S., Fritze, H., and Hauptmann, P.: Novel impedance interface for resonant high-temperature gas sensors, Sensor. Actuat. B-Chem., 111, 187–192, 2005.
Schulz, M. and Fritze, H.: Electromechanical properties of langasite resonators at elevated temperatures, Renew. Energ., 33, 336–341, 2008.
Sherrit, S. and Mukherjee, B. K.: The Use of Complex Material Constants to Model the Dynamic Response of Piezoelectric Materials, in: IEEE Ultrasonics Symposium, 633–640, 1998.
Shrena, I., Eisele, D., Mayer, E., Reindl, L., Bardong, J., and Schmitt, M.: SAW-relevant material properties of langasite in the temperature range from 25 to 750 °C: New experimental results, in: IEEE Ultrasonics Symposium, 209–212, 2008.
Shrena, I., Eisele, D., Bardong, J., and Reindl, L.: High precision signal processing algorithm to evaluate the SAW properties as a function of temperature, in: IEEE Ultrasonics Symposium, 863–866, 2009.
Smits, J. G.: Influence of Moving Domain Walls and Jumping Lattice Defects on Complex Material Coefficients of Piezoelectrics, IEEE T. Son. Ultrason., SU-23, 168–174, 1976.
Thiele, J. A. and Pereira da Cunha, M.: High temperature LGS SAW gas sensor, Sensor. Actuat. B-Chem., 113, 816–822, 2006.
Tuller, H. and Fritze, H.: High-temperature balance, US Patent 6.370.955, 2002.
Wall, B., Gruenwald, R., Klein, M., and Bruckner, G.: A 600 °C Wireless and Passive Temperature Sensor Based on Langasite SAW-Resonators, in: AMA Conferences 2015 – SENSOR 2015 and IRS2 2015, 19–21 May 2015, Nuremberg, Germany, 390–395, https://doi.org/10.5162/sensor2015/C3.3, 2015.
Weihnacht, M., Sotnikov, A., Schmidt, H., Wall, B., and Grünwald, R.: Langasite: High Temperature Properties and SAW Simulations, in: 2012 IEEE International Ultrasonics Symposium Proceedings, 1549–1552, https://doi.org/10.1109/ULTSYM.2012.0387, 2012.
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