Articles | Volume 4, issue 1
Regular research article
05 Feb 2015
Regular research article |  | 05 Feb 2015

Investigations into packaging technology for membrane-based thermal flow sensors

G. Dumstorff, E. Brauns, and W. Lang

Related authors

3-D-printed smart screw: functionalization during additive fabrication
Daniel Gräbner, Simon Dödtmann, Gerrit Dumstorff, and Frieder Lucklum
J. Sens. Sens. Syst., 7, 143–151,,, 2018
Short summary
Measuring strain during a cylindrical grinding process using embedded sensors in a workpiece
Mridusmita Sarma, Florian Borchers, Gerrit Dumstorff, Carsten Heinzel, and Walter Lang
J. Sens. Sens. Syst., 6, 331–340,,, 2017
Short summary

Related subject area

Sensor technologies: Packaging
Assembly and interconnection technology for high-temperature bulk acoustic wave resonators
Fabian Kohler, Monika Farina, Michal Schulz, Holger Fritze, and Jürgen Wilde
J. Sens. Sens. Syst., 11, 83–97,,, 2022
Short summary
Implantable biomedical sensor array with biocompatible hermetic encapsulation
Carola Jorsch, Ulrike Schmidt, David Ulkoski, Carmen Scholz, Margarita Guenther, and Gerald Gerlach
J. Sens. Sens. Syst., 5, 229–235,,, 2016
Investigation of low-temperature cofired ceramics packages for high-temperature SAW sensors
Jochen Bardong, Alfred Binder, Sasa Toskov, Goran Miskovic, and Goran Radosavljevic
J. Sens. Sens. Syst., 5, 85–93,,, 2016
Short summary
Joining technologies for a temperature-stable integration of a LTCC-based pressure sensor
J. Schilm, A. Goldberg, U. Partsch, W. Dürfeld, D. Arndt, A. Pönicke, and A. Michaelis
J. Sens. Sens. Syst., 5, 73–83,,, 2016

Cited articles

Abu-Mulaweh, H.: A review of research on laminar mixed convection flow over backward-and forward-facing steps, Int. J. Therm. Sci., 42, 897–909, 2003.
Adamec, R. J. and Thiel, D. V.: Self heated thermo-resistive element hot wire anemometer, IEEE Sens. J., 10, 847–848, 2010.
Ashauer, M., Glosch, H., Hedrich, F., Hey, N., Sandmaier, H., and Lang, W.: Thermal flow sensor for liquids and gases based on combinations of two principles, Sensor. Actuat. A-Phys., 73, 7–13, 1999.
Billat, S., Kliche, K., Gronmaier, R., Nommensen, P., Auber, J., Hedrich, F., and Zengerle, R.: Monolithic integration of micro-channel on disposable flow sensors for medical applications, Sensor. Actuat. A-Phys., 145, 66–74, 2008.
Bruschi, P., Diligenti, A., Navarrini, D., and Piotto, M.: A double heater integrated gas flow sensor with thermal feedback, Sensor. Actuat. A-Phys., 123, 210–215, 2005.
Short summary
A new packaging method to mount a membrane-based thermal flow sensor, flush with the surface, is presented. Therefore, a specific design for the housing is shown that is also adaptable to other conditions. It has been experimentally shown that it is important to mount the sensor flush with the surface. If not, vortices can occur (depending on velocity and the fluid properties) or the reduction of the channel cross section plus a decrease in sensitivity have to be taken into account.