Articles | Volume 4, issue 1
J. Sens. Sens. Syst., 4, 45–52, 2015
J. Sens. Sens. Syst., 4, 45–52, 2015

Regular research article 05 Feb 2015

Regular research article | 05 Feb 2015

Investigations into packaging technology for membrane-based thermal flow sensors

G. Dumstorff et al.

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Cited articles

Abu-Mulaweh, H.: A review of research on laminar mixed convection flow over backward-and forward-facing steps, Int. J. Therm. Sci., 42, 897–909, 2003.
Adamec, R. J. and Thiel, D. V.: Self heated thermo-resistive element hot wire anemometer, IEEE Sens. J., 10, 847–848, 2010.
Ashauer, M., Glosch, H., Hedrich, F., Hey, N., Sandmaier, H., and Lang, W.: Thermal flow sensor for liquids and gases based on combinations of two principles, Sensor. Actuat. A-Phys., 73, 7–13, 1999.
Billat, S., Kliche, K., Gronmaier, R., Nommensen, P., Auber, J., Hedrich, F., and Zengerle, R.: Monolithic integration of micro-channel on disposable flow sensors for medical applications, Sensor. Actuat. A-Phys., 145, 66–74, 2008.
Bruschi, P., Diligenti, A., Navarrini, D., and Piotto, M.: A double heater integrated gas flow sensor with thermal feedback, Sensor. Actuat. A-Phys., 123, 210–215, 2005.
Short summary
A new packaging method to mount a membrane-based thermal flow sensor, flush with the surface, is presented. Therefore, a specific design for the housing is shown that is also adaptable to other conditions. It has been experimentally shown that it is important to mount the sensor flush with the surface. If not, vortices can occur (depending on velocity and the fluid properties) or the reduction of the channel cross section plus a decrease in sensitivity have to be taken into account.