Investigation of low-temperature cofired ceramics packages for high-temperature SAW sensors

Bardong, Jochen; Binder, Alfred; Toskov, Sasa; Miskovic, Goran; Radosavljevic, Goran

doi:https://doi.org/10.5194/jsss-5-85-2016

Articles | Volume 5, issue 1

J. Sens. Sens. Syst., 5, 85–93, 2016

https://doi.org/10.5194/jsss-5-85-2016

© Author(s) 2016. This work is distributed under
the Creative Commons Attribution 3.0 License.

Special issue: High-temperature sensors and materials

J. Sens. Sens. Syst., 5, 85–93, 2016

https://doi.org/10.5194/jsss-5-85-2016

© Author(s) 2016. This work is distributed under
the Creative Commons Attribution 3.0 License.

Articles | Volume 5, issue 1

Review paper 17 Mar 2016

Review paper | 17 Mar 2016

Investigation of low-temperature cofired ceramics packages for high-temperature SAW sensors

Jochen Bardong¹, Alfred Binder¹, Sasa Toskov², Goran Miskovic², and Goran Radosavljevic² Jochen Bardong et al.

Show author details

¹Carinthian Tech Research, Europastraße 4/1, Villach, Austria
²Institute of Sensor and Actuator Systems, Gusshausstrasse 27–29, Vienna, Austria

Received: 15 Oct 2015 – Revised: 29 Feb 2016 – Accepted: 03 Mar 2016 – Published: 17 Mar 2016

Abstract. Surface acoustic wave (SAW) temperature sensor devices have been developed for operating temperatures up to and above 1000 °C. A challenging task to make these devices available on the market is to develop an appropriate housing concept. A concept based on low-temperature cofired ceramics (LTCC) has been investigated and tested under elevated temperatures up to 600 °C. The devices showed promising results up to 450 °C. Thorough analysis of the possible failure mechanisms was done to increase the maximum temperature above this limit in further production cycles.