Review paper
17 Mar 2016
Review paper | 17 Mar 2016
Investigation of low-temperature cofired ceramics packages for high-temperature SAW sensors
Jochen Bardong1, Alfred Binder1, Sasa Toskov2, Goran Miskovic2, and Goran Radosavljevic2
Jochen Bardong et al.
Jochen Bardong1, Alfred Binder1, Sasa Toskov2, Goran Miskovic2, and Goran Radosavljevic2
- 1Carinthian Tech Research, Europastraße 4/1, Villach, Austria
- 2Institute of Sensor and Actuator Systems, Gusshausstrasse 27–29,
Vienna, Austria
- 1Carinthian Tech Research, Europastraße 4/1, Villach, Austria
- 2Institute of Sensor and Actuator Systems, Gusshausstrasse 27–29,
Vienna, Austria
Correspondence: Jochen Bardong (jochen.bardong@ctr.at)
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Received: 15 Oct 2015 – Revised: 29 Feb 2016 – Accepted: 03 Mar 2016 – Published: 17 Mar 2016
Abstract. Surface acoustic wave (SAW) temperature sensor devices have been developed for operating temperatures up to and above 1000 °C. A challenging task to make these devices available on the market is to develop an appropriate housing concept. A concept based on low-temperature cofired ceramics (LTCC) has been investigated and tested under elevated temperatures up to 600 °C. The devices showed promising results up to 450 °C. Thorough analysis of the possible failure mechanisms was done to increase the maximum temperature above this limit in further production cycles.
