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Journal of Sensors and Sensor Systems
Journal of Sensors and Sensor Systems
JSSS
Articles | Volume 4, issue 1
Articles | Volume 4, issue 1
https://doi.org/10.5194/jsss-4-91-2015
© Author(s) 2015. This work is distributed under
the Creative Commons Attribution 3.0 License.
Special issue:
https://doi.org/10.5194/jsss-4-91-2015
© Author(s) 2015. This work is distributed under
the Creative Commons Attribution 3.0 License.
Articles | Volume 4, issue 1
Regular research article
 | 
23 Feb 2015
Regular research article |  | 23 Feb 2015

Thin film sensors for measuring small forces

F. Schmaljohann, D. Hagedorn, and F. Löffler

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