Thin film sensors for measuring small forces

Schmaljohann, F.; Hagedorn, D.; Löffler, F.

doi:10.5194/jsss-4-91-2015

Articles | Volume 4, issue 1

https://doi.org/10.5194/jsss-4-91-2015

© Author(s) 2015. This work is distributed under
the Creative Commons Attribution 3.0 License.

Special issue:

17th ITG/GMA-Conference on Sensors and Measurement Systems...

https://doi.org/10.5194/jsss-4-91-2015

© Author(s) 2015. This work is distributed under
the Creative Commons Attribution 3.0 License.

Articles | Volume 4, issue 1

Regular research article

|

23 Feb 2015

Regular research article |

| 23 Feb 2015

Thin film sensors for measuring small forces

F. Schmaljohann, D. Hagedorn, and F. Löffler

Viewed

Total article views: 3,455 (including HTML, PDF, and XML)

HTML	PDF	XML	Total	BibTeX	EndNote
1,583	1,694	178	3,455	225	288

HTML: 1,583
PDF: 1,694
XML: 178
Total: 3,455
BibTeX: 225
EndNote: 288

Views and downloads (calculated since 23 Feb 2015)

Month	HTML	PDF	XML	Total
Feb 2015	8	9	2	19
Mar 2015	7	20	1	28
Apr 2015	15	15	1	31
May 2015	9	11	0	20
Jun 2015	24	7	0	31
Jul 2015	21	8	0	29
Aug 2015	9	11	1	21
Sep 2015	10	8	0	18
Oct 2015	11	6	0	17
Nov 2015	10	7	0	17
Dec 2015	7	12	2	21
Jan 2016	9	7	1	17
Feb 2016	8	11	0	19
Mar 2016	4	6	0	10
Apr 2016	5	6	0	11
May 2016	6	11	1	18
Jun 2016	1	1	0	2
Jul 2016	7	4	1	12
Aug 2016	2	2	0	4
Sep 2016	6	2	0	8
Oct 2016	7	6	2	15
Nov 2016	4	4	0	8
Dec 2016	8	11	0	19
Jan 2017	14	11	0	25
Feb 2017	11	10	0	21
Mar 2017	13	22	0	35
Apr 2017	16	14	0	30
May 2017	23	20	0	43
Jun 2017	17	12	1	30
Jul 2017	8	12	0	20
Aug 2017	8	12	0	20
Sep 2017	12	28	0	40
Oct 2017	5	15	0	20
Nov 2017	17	17	2	36
Dec 2017	19	22	1	42
Jan 2018	7	17	0	24
Feb 2018	13	10	2	25
Mar 2018	21	24	0	45
Apr 2018	15	20	1	36
May 2018	23	30	2	55
Jun 2018	22	50	3	75
Jul 2018	28	44	0	72
Aug 2018	15	29	1	45
Sep 2018	27	64	2	93
Oct 2018	20	58	3	81
Nov 2018	30	93	2	125
Dec 2018	16	38	0	54
Jan 2019	16	60	4	80
Feb 2019	4	63	1	68
Mar 2019	8	21	0	29
Apr 2019	7	18	2	27
May 2019	8	20	5	33
Jun 2019	5	24	0	29
Jul 2019	5	16	0	21
Aug 2019	3	13	1	17
Sep 2019	11	22	0	33
Oct 2019	7	19	0	26
Nov 2019	11	4	0	15
Dec 2019	5	4	0	9
Jan 2020	8	16	0	24
Feb 2020	6	9	1	16
Mar 2020	4	6	1	11
Apr 2020	6	9	0	15
May 2020	3	6	0	9
Jun 2020	31	11	1	43
Jul 2020	23	22	13	58
Aug 2020	7	9	5	21
Sep 2020	8	7	0	15
Oct 2020	11	10	0	21
Nov 2020	6	6	3	15
Dec 2020	12	7	1	20
Jan 2021	17	8	0	25
Feb 2021	7	8	2	17
Mar 2021	6	3	0	9
Apr 2021	5	5	1	11
May 2021	4	6	2	12
Jun 2021	8	4	0	12
Jul 2021	9	11	0	20
Aug 2021	5	4	1	10
Sep 2021	17	5	2	24
Oct 2021	7	20	0	27
Nov 2021	10	17	1	28
Dec 2021	12	4	2	18
Jan 2022	9	5	1	15
Feb 2022	7	8	5	20
Mar 2022	13	9	2	24
Apr 2022	3	7	0	10
May 2022	12	2	2	16
Jun 2022	7	4	3	14
Jul 2022	9	5	3	17
Aug 2022	9	5	0	14
Sep 2022	6	4	1	11
Oct 2022	7	4	3	14
Nov 2022	7	6	0	13
Dec 2022	7	7	0	14
Jan 2023	6	4	0	10
Feb 2023	10	5	0	15
Mar 2023	15	5	1	21
Apr 2023	15	12	1	28
May 2023	8	9	1	18
Jun 2023	6	4	0	10
Jul 2023	4	3	0	7
Aug 2023	8	6	2	16
Sep 2023	3	4	1	8
Oct 2023	4	2	1	7
Nov 2023	6	3	3	12
Dec 2023	10	4	4	18
Jan 2024	2	1	0	3
Feb 2024	6	3	0	9
Mar 2024	4	4	1	9
Apr 2024	10	3	3	16
May 2024	10	3	1	14
Jun 2024	17	5	3	25
Jul 2024	17	5	2	24
Aug 2024	18	4	0	22
Sep 2024	14	5	2	21
Oct 2024	13	3	2	18
Nov 2024	7	1	8
Dec 2024	2	3	1	6
Jan 2025	4	4	1	9
Feb 2025	8	7	0	15
Mar 2025	21	2	1	24
Apr 2025	10	6	3	19
May 2025	25	3	2	30
Jun 2025	37	16	2	55
Jul 2025	26	15	0	41
Aug 2025	12	6	0	18
Sep 2025	38	10	2	50
Oct 2025	31	21	4	56
Nov 2025	27	26	2	55
Dec 2025	20	9	2	31
Jan 2026	27	11	5	43
Feb 2026	17	9	4	30
Mar 2026	11	10	4	25
Apr 2026	23	14	13	50
May 2026	13	4	1	18
Jun 2026	2	1	1	4

Cumulative views and downloads (calculated since 23 Feb 2015)

Month	HTML	PDF	XML	Total
Feb 2015	8	9	2	19
Mar 2015	7	20	1	28
Apr 2015	15	15	1	31
May 2015	9	11	0	20
Jun 2015	24	7	0	31
Jul 2015	21	8	0	29
Aug 2015	9	11	1	21
Sep 2015	10	8	0	18
Oct 2015	11	6	0	17
Nov 2015	10	7	0	17
Dec 2015	7	12	2	21
Jan 2016	9	7	1	17
Feb 2016	8	11	0	19
Mar 2016	4	6	0	10
Apr 2016	5	6	0	11
May 2016	6	11	1	18
Jun 2016	1	1	0	2
Jul 2016	7	4	1	12
Aug 2016	2	2	0	4
Sep 2016	6	2	0	8
Oct 2016	7	6	2	15
Nov 2016	4	4	0	8
Dec 2016	8	11	0	19
Jan 2017	14	11	0	25
Feb 2017	11	10	0	21
Mar 2017	13	22	0	35
Apr 2017	16	14	0	30
May 2017	23	20	0	43
Jun 2017	17	12	1	30
Jul 2017	8	12	0	20
Aug 2017	8	12	0	20
Sep 2017	12	28	0	40
Oct 2017	5	15	0	20
Nov 2017	17	17	2	36
Dec 2017	19	22	1	42
Jan 2018	7	17	0	24
Feb 2018	13	10	2	25
Mar 2018	21	24	0	45
Apr 2018	15	20	1	36
May 2018	23	30	2	55
Jun 2018	22	50	3	75
Jul 2018	28	44	0	72
Aug 2018	15	29	1	45
Sep 2018	27	64	2	93
Oct 2018	20	58	3	81
Nov 2018	30	93	2	125
Dec 2018	16	38	0	54
Jan 2019	16	60	4	80
Feb 2019	4	63	1	68
Mar 2019	8	21	0	29
Apr 2019	7	18	2	27
May 2019	8	20	5	33
Jun 2019	5	24	0	29
Jul 2019	5	16	0	21
Aug 2019	3	13	1	17
Sep 2019	11	22	0	33
Oct 2019	7	19	0	26
Nov 2019	11	4	0	15
Dec 2019	5	4	0	9
Jan 2020	8	16	0	24
Feb 2020	6	9	1	16
Mar 2020	4	6	1	11
Apr 2020	6	9	0	15
May 2020	3	6	0	9
Jun 2020	31	11	1	43
Jul 2020	23	22	13	58
Aug 2020	7	9	5	21
Sep 2020	8	7	0	15
Oct 2020	11	10	0	21
Nov 2020	6	6	3	15
Dec 2020	12	7	1	20
Jan 2021	17	8	0	25
Feb 2021	7	8	2	17
Mar 2021	6	3	0	9
Apr 2021	5	5	1	11
May 2021	4	6	2	12
Jun 2021	8	4	0	12
Jul 2021	9	11	0	20
Aug 2021	5	4	1	10
Sep 2021	17	5	2	24
Oct 2021	7	20	0	27
Nov 2021	10	17	1	28
Dec 2021	12	4	2	18
Jan 2022	9	5	1	15
Feb 2022	7	8	5	20
Mar 2022	13	9	2	24
Apr 2022	3	7	0	10
May 2022	12	2	2	16
Jun 2022	7	4	3	14
Jul 2022	9	5	3	17
Aug 2022	9	5	0	14
Sep 2022	6	4	1	11
Oct 2022	7	4	3	14
Nov 2022	7	6	0	13
Dec 2022	7	7	0	14
Jan 2023	6	4	0	10
Feb 2023	10	5	0	15
Mar 2023	15	5	1	21
Apr 2023	15	12	1	28
May 2023	8	9	1	18
Jun 2023	6	4	0	10
Jul 2023	4	3	0	7
Aug 2023	8	6	2	16
Sep 2023	3	4	1	8
Oct 2023	4	2	1	7
Nov 2023	6	3	3	12
Dec 2023	10	4	4	18
Jan 2024	2	1	0	3
Feb 2024	6	3	0	9
Mar 2024	4	4	1	9
Apr 2024	10	3	3	16
May 2024	10	3	1	14
Jun 2024	17	5	3	25
Jul 2024	17	5	2	24
Aug 2024	18	4	0	22
Sep 2024	14	5	2	21
Oct 2024	13	3	2	18
Nov 2024	7	1	8
Dec 2024	2	3	1	6
Jan 2025	4	4	1	9
Feb 2025	8	7	0	15
Mar 2025	21	2	1	24
Apr 2025	10	6	3	19
May 2025	25	3	2	30
Jun 2025	37	16	2	55
Jul 2025	26	15	0	41
Aug 2025	12	6	0	18
Sep 2025	38	10	2	50
Oct 2025	31	21	4	56
Nov 2025	27	26	2	55
Dec 2025	20	9	2	31
Jan 2026	27	11	5	43
Feb 2026	17	9	4	30
Mar 2026	11	10	4	25
Apr 2026	23	14	13	50
May 2026	13	4	1	18
Jun 2026	2	1	1	4

Cited

Latest update: 09 Jun 2026

Thin film sensors for measuring small forces

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