Articles | Volume 4, issue 1
J. Sens. Sens. Syst., 4, 91–95, 2015
https://doi.org/10.5194/jsss-4-91-2015

Special issue: 17th ITG/GMA-Conference on Sensors and Measurement Systems...

J. Sens. Sens. Syst., 4, 91–95, 2015
https://doi.org/10.5194/jsss-4-91-2015

Regular research article 23 Feb 2015

Regular research article | 23 Feb 2015

Thin film sensors for measuring small forces

F. Schmaljohann et al.

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Cited articles

Buß, A., Illemann, J., Kumme, R., Hagedorn, D., Meeß, R., and Löffler, F.: Entwicklung und Untersuchung von Kraftaufnehmern zur hochgenauen Messung statischer und dynamischer Kräfte, in: Sensoren und Messsysteme 2008, no. 2011 in VDI-Berichte, 2008.
Hagedorn, D., Meeß, R., and Löffler, F.: Fabrication of Sputtered Resistance Strain Gauges on Curved Surfaces, in: Proceedings of the 7th euspen International Conference, May 2007, Bremen, 2007.
Karaus, A. and Paul, H.: Load cells with small nominal load based on strain gauges using thin-film techniques, Measurement, 10, 133–139, https://doi.org/10.1016/0263-2241(92)90009-s, 1992.
Schlegel, C., Slanina, O., Haucke, G., and Kumme, R.: Construction of a Standard Force Machine for the Range of 100 μN–200 mN, in: IMEKO 2010 TC3, TC5 and TC22 Conferences, 2010.
Schmaljohann, F., Hagedorn, D., Buß, A., Kumme, R., and Löffler, F.: Entwicklung von Dünnschichtsensoren mit kleiner Strukturbreite auf dünnen isolierenden Schichten, in: MikroSystemTechnik Kongress 2011: Proceedings, 764–767, VDE-Verlag, 2011.