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Journal of Sensors and Sensor Systems An open-access peer-reviewed journal
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Volume 5, issue 1
J. Sens. Sens. Syst., 5, 197–203, 2016
https://doi.org/10.5194/jsss-5-197-2016
© Author(s) 2016. This work is distributed under
the Creative Commons Attribution 3.0 License.

Special issue: Dresden Sensor Symposium 2015

J. Sens. Sens. Syst., 5, 197–203, 2016
https://doi.org/10.5194/jsss-5-197-2016
© Author(s) 2016. This work is distributed under
the Creative Commons Attribution 3.0 License.

Regular research article 08 Jun 2016

Regular research article | 08 Jun 2016

Offset stable piezoresistive high-temperature pressure sensors based on silicon

Robert Täschner, Erik Hiller, and Michael Blech Robert Täschner et al.
  • CiS Forschungsinstitut für Mikrosensorik GmbH, 99099 Erfurt, Germany

Abstract. The exploitation of new application fields and the drive to size reduction even in highly stable pressure sensing systems makes the extension of the operating temperature range of the microelectromechanical sensors (MEMS) essential. For this reason a silicon-based pressure sensor with an application temperature ranging up to 300 °C and the associated manufacturing technology was developed. With special design and manufacturing approaches mounting stress-insensitive sensors with high linearity, excellent offset stability, low hysteresis and low sensitivity changes over the entire temperature range were developed. At the moment, the sensors are tested till 300 °C at wafer level and between 135 and 210 °C as a first-level package.

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Short summary
The exploitation of new application fields and the drive to size reduction even in highly stable pressure sensing systems makes the extension of the operating temperature range of the microelectromechanical sensors (MEMS) essential. For this reason, a silicon-based pressure sensor with an application temperature ranging up to 300 °C and the associated manufacturing technology was developed. The evolved sensor has an excellent stability and is uncomplicated to mount due to its stress insensitivity.
The exploitation of new application fields and the drive to size reduction even in highly stable...
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