Journal of Sensors and Sensor Systems
Journal of Sensors and Sensor Systems
JSSS
Articles | Volume 5, issue 1
Articles | Volume 5, issue 1
https://doi.org/10.5194/jsss-5-197-2016
© Author(s) 2016. This work is distributed under
the Creative Commons Attribution 3.0 License.
Special issue:
https://doi.org/10.5194/jsss-5-197-2016
© Author(s) 2016. This work is distributed under
the Creative Commons Attribution 3.0 License.
Articles | Volume 5, issue 1
Regular research article
 | 
08 Jun 2016
Regular research article |  | 08 Jun 2016

Offset stable piezoresistive high-temperature pressure sensors based on silicon

Robert Täschner, Erik Hiller, and Michael Blech

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Latest update: 25 Apr 2024
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Short summary
The exploitation of new application fields and the drive to size reduction even in highly stable pressure sensing systems makes the extension of the operating temperature range of the microelectromechanical sensors (MEMS) essential. For this reason, a silicon-based pressure sensor with an application temperature ranging up to 300 °C and the associated manufacturing technology was developed. The evolved sensor has an excellent stability and is uncomplicated to mount due to its stress insensitivity.
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Special issue
Dresden Sensor Symposium 2015