Articles | Volume 5, issue 1
J. Sens. Sens. Syst., 5, 197–203, 2016
https://doi.org/10.5194/jsss-5-197-2016

Special issue: Dresden Sensor Symposium 2015

J. Sens. Sens. Syst., 5, 197–203, 2016
https://doi.org/10.5194/jsss-5-197-2016
Regular research article
08 Jun 2016
Regular research article | 08 Jun 2016

Offset stable piezoresistive high-temperature pressure sensors based on silicon

Robert Täschner et al.

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Short summary
The exploitation of new application fields and the drive to size reduction even in highly stable pressure sensing systems makes the extension of the operating temperature range of the microelectromechanical sensors (MEMS) essential. For this reason, a silicon-based pressure sensor with an application temperature ranging up to 300 °C and the associated manufacturing technology was developed. The evolved sensor has an excellent stability and is uncomplicated to mount due to its stress insensitivity.