13 citations as recorded by crossref.

1. Low Noise Interface ASIC of Micro Gyroscope with Ball-disc Rotor M. Ren et al.
2. An Analog Interface Circuit for Capacitive Angle Encoder Based on a Capacitance Elimination Array and Synchronous Switch Demodulation Method B. Hou et al.
3. Python-Based Open-Source Electro-Mechanical Co-Optimization System for MEMS Inertial Sensors R. Amendoeira Esteves et al.
4. A High-Precision and High-Bandwidth MEMS-Based Capacitive Accelerometer A. Utz et al.
5. A 0.57% Non-Linearity, 0.08 aF/√Hz Input Capacitance Noise C/V Converter With an On-Chip Test Capacitance Signal for MEMS Accelerometer Z. Jin et al.
6. Capacitance to Voltage Converter for Capacitance MEMS Accelerometer: A Review Q. Duan et al.
7. Capacitance-to-Voltage Electronic Front Ends for MEMS Capacitive Accelerometer: A Review Y. Wang et al.
8. Charge-Based Capacitive Self-Sensing With Continuous State Observation for Resonant Electrostatic MEMS Mirrors R. Schroedter et al.
9. Sensing Voltage at Electrically Floating Nodes: A Path Toward Enhancing Performance and Robustness in Capacitive MEMS Resonators D. Chugh et al.
10. A Current-Mode Analog Front-End for Capacitive Length Transducers in Pneumatic Muscle Actuators G. Di Patrizio Stanchieri et al.
11. A capacitance sensing method with trans-impedance based readout circuit and adaptive filtering for micro-gyro Y. Liu et al.
12. On-Chip Implementable Autocalibration of Sensor Offset for Differential Capacitive Sensor Interfaces R. Tirupathi & S. Kar
13. Design of analog front-end readout circuit for capacitive silicon micro gyroscope X. Zhou & Q. Duan