Articles | Volume 6, issue 2
https://doi.org/10.5194/jsss-6-285-2017
© Author(s) 2017. This work is distributed under
the Creative Commons Attribution 3.0 License.
the Creative Commons Attribution 3.0 License.
https://doi.org/10.5194/jsss-6-285-2017
© Author(s) 2017. This work is distributed under
the Creative Commons Attribution 3.0 License.
the Creative Commons Attribution 3.0 License.
An ultra-low noise capacitance to voltage converter for sensor applications in 0.35 µm CMOS
Alexander Utz
CORRESPONDING AUTHOR
Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Finkenstr. 61, 47057 Duisburg, Germany
Christian Walk
Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Finkenstr. 61, 47057 Duisburg, Germany
Norbert Haas
Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Finkenstr. 61, 47057 Duisburg, Germany
Tatjana Fedtschenko
Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Finkenstr. 61, 47057 Duisburg, Germany
Alexander Stanitzki
Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Finkenstr. 61, 47057 Duisburg, Germany
Mir Mokhtari
Mir Enterprises Limited, 173c Goldhurst Terrace, Hampstead, London, NW6 3ES, UK
Michael Görtz
Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Finkenstr. 61, 47057 Duisburg, Germany
Michael Kraft
Montefiore Institute, University of Liege, Rue de la Decouverte, 4000 Liege, Belgium
Rainer Kokozinski
Fraunhofer Institute for Microelectronic Circuits and Systems (IMS), Finkenstr. 61, 47057 Duisburg, Germany
Department of Electronic Components and Circuits, University of Duisburg-Essen, Bismarckstr. 81, 47057 Duisburg, Germany
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Chun Zhao, Graham S. Wood, Suan Hui Pu, and Michael Kraft
J. Sens. Sens. Syst., 6, 1–8, https://doi.org/10.5194/jsss-6-1-2017, https://doi.org/10.5194/jsss-6-1-2017, 2017
P. Gembaczka, M. Görtz, Y. Celik, A. Jupe, M. Stühlmeyer, A. Goehlich, H. Vogt, W. Mokwa, and M. Kraft
J. Sens. Sens. Syst., 3, 335–347, https://doi.org/10.5194/jsss-3-335-2014, https://doi.org/10.5194/jsss-3-335-2014, 2014
Related subject area
Measurement systems: Sensor signal processing and electronics
Extraction of nanometer-scale displacements from noisy signals at frequencies down to 1 mHz obtained by differential laser Doppler vibrometry
Simple in-system control of microphone sensitivities in an array
Wireless surface acoustic wave resonator sensors: fast Fourier transform, empirical mode decomposition or wavelets for the frequency estimation in one shot?
Ultrasonic measurement setup for monitoring pre-thawing stages of food
Digital twin concepts for linking live sensor data with real-time models
Assisting the automated analysis of chemical–analytical measurements in spirits using validated algorithms and an intuitive user interface
Simulation-based investigation of the metrological interface structural resolution capability of X-ray computed tomography scanners
Design of a CMOS memristor emulator-based, self-adaptive spiking analog-to-digital data conversion as the lowest level of a self-x hierarchy
Smart in-cylinder pressure sensor for closed-loop combustion control
Efficient transient testing procedure using a novel experience replay particle swarm optimizer for THD-based robust design and optimization of self-X sensory electronics in industry 4.0
Intelligent fault detection of electrical assemblies using hierarchical convolutional networks for supporting automatic optical inspection systems
Measurement uncertainty analysis of field-programmable gate-array-based, real-time signal processing for ultrasound flow imaging
Compilation of training datasets for use of convolutional neural networks supporting automatic inspection processes in industry 4.0 based electronic manufacturing
Employing correlation for wireless components and device characterization in reverberation chambers
Impedance model for a high-temperature ceramic humidity sensor
Non-destructive testing of arbitrarily shaped refractive objects with millimetre-wave synthetic aperture radar imaging
Determining the dimension of subsurface defects by active infrared thermography – experimental research
Inverse calculation of strain profiles from ETDR measurements using artificial neural networks
Development of a non-contact torque transducer based on the laser speckle contrast method
Development of a chopper charge amplifier for measuring the cavity pressure inside injection moulding tools and signal optimisation with a Kalman filter
Optimized mixed-domain signal synthesis for broadband impedance spectroscopy measurements on lithium ion cells for automotive applications
High-accuracy current measurement with low-cost shunts by means of dynamic error correction
A compact readout platform for spectral-optical sensors
High-speed camera-based measurement system for aeroacoustic investigations
Shutter-less calibration of uncooled infrared cameras
A novel approach for detecting HMDSO poisoning of metal oxide gas sensors and improving their stability by temperature cycled operation
Micro- and nanocoordinate measurements of micro-parts with 3-D tunnelling current probing
An electrical characterisation system for the real-time acquisition of multiple independent sensing parameters from organic thin film transistors
Piezoelectric transceiver matching for multiple frequencies
Metal oxide semiconductor gas sensor self-test using Fourier-based impedance spectroscopy
Work area monitoring in dynamic environments using multiple auto-aligning 3-D sensors
Principal component analysis for fast and automated thermographic inspection of internal structures in sandwich parts
Near-field interrogation of SAW resonators on rotating machinery
Magnetic properties of CHAMP and their effects on in-orbit calibration
Dhyan Kohlmann, Marvin Schewe, Hendrik Wulfmeier, Christian Rembe, and Holger Fritze
J. Sens. Sens. Syst., 13, 167–177, https://doi.org/10.5194/jsss-13-167-2024, https://doi.org/10.5194/jsss-13-167-2024, 2024
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A very small, anharmonic but periodic signal is separated from a noise background that is orders of magnitude larger than the pure signal. The approach consists of a sequence of filters and transformations and is demonstrated on an interferometric measurement of the high-temperature chemical expansion of a thin film, containing heat haze, thermal length drift, and parasitic vibrations. The displacement is 38 % larger and the uncertainty 35 % lower than when evaluated with previous approaches.
Artem Ivanov
J. Sens. Sens. Syst., 13, 81–88, https://doi.org/10.5194/jsss-13-81-2024, https://doi.org/10.5194/jsss-13-81-2024, 2024
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The presented approach allows users to perform measurements of microphone responses directly in the array using the internal hardware and so to characterize the whole signal chain of microphone–preamplifier–ADC. The measurements do not need special equipment and can be carried out in ordinary reverberant locations. A loudspeaker driven by a voltage pulse is used to produce a sound wave with a short first wavefront. Processing only this wavefront suppresses reflected waves that arrive later.
Angel Scipioni, Pascal Rischette, and Agnès Santori
J. Sens. Sens. Syst., 12, 247–260, https://doi.org/10.5194/jsss-12-247-2023, https://doi.org/10.5194/jsss-12-247-2023, 2023
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Many applications which measure physical quantities rely on wireless surface acoustic wave sensors. The accuracy of this sensor depends directly on the measurement of its main frequency. This paper aims to compare three methods for this measurement in one shot: fast Fourier transform, discrete wavelet transform, and empirical mode decomposition. Results show that the choice of the method is conditioned by the disturbance level and that the wavelet method is the best way for harsh environments.
Ruchi Jha, Walter Lang, and Reiner Jedermann
J. Sens. Sens. Syst., 12, 133–139, https://doi.org/10.5194/jsss-12-133-2023, https://doi.org/10.5194/jsss-12-133-2023, 2023
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In order to save time and avoid overheating of food during unfreezing, the study of ice content can be very useful. The aim of the research is to design an ultrasound-based sensor system that is able to comment on the content of ice in the sample food product. Some sample food products are tested, and the observations and challenges concerning the same are mentioned in the research paper.
Reiner Jedermann, Kunal Singh, Walter Lang, and Pramod Mahajan
J. Sens. Sens. Syst., 12, 111–121, https://doi.org/10.5194/jsss-12-111-2023, https://doi.org/10.5194/jsss-12-111-2023, 2023
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Mathematical models are often required to process sensor data in a digital twin platform. The translation of models to an updateable format enables predicting hidden states of the physical object, which are not directly measurable. The linking of different models is demonstrated by data from field tests on fruit transportation in refrigerated containers. We programmed a streaming platform that enables easy integration of such updatable models with only a few milliseconds of processing overhead.
Andreas T. Grasskamp, Satnam Singh, Helen Haug, and Tilman Sauerwald
J. Sens. Sens. Syst., 12, 93–101, https://doi.org/10.5194/jsss-12-93-2023, https://doi.org/10.5194/jsss-12-93-2023, 2023
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In this work, we have developed and validated a semi-automatic approach that greatly reduces the amount of interaction and effort needed for analyzing samples via gas chromatography–mass spectrometry. Further, unlike many other approaches, our developed tool is accessible to the novice and does not require any programming experience. Using whisky as an example substance, we show how the analysis method compares to conventional software, and we validate our approach against that.
Matthias Busch and Tino Hausotte
J. Sens. Sens. Syst., 12, 1–8, https://doi.org/10.5194/jsss-12-1-2023, https://doi.org/10.5194/jsss-12-1-2023, 2023
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The paper presents a specimen and evaluation method for interface structural resolution testing of X-ray computed tomography systems based on CT simulations. The geometry is oriented to the norms of image quality investigation. The evaluation is based on profile lines of the cross-sectional images that pass through the boreholes. All statements on resolution refer to the entire measurement chain and, thus, in addition to the reconstruction algorithm also to the surface determination method used.
Hamam Abd and Andreas König
J. Sens. Sens. Syst., 11, 233–262, https://doi.org/10.5194/jsss-11-233-2022, https://doi.org/10.5194/jsss-11-233-2022, 2022
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We pursue a promising novel self-adaptive spiking neural analog-to-digital data conversion (SN-ADC) design that uses spike time to carry information. Thus, SN-ADC can be effectively translated to aggressive new technologies to implement reliable advanced sensory electronic systems. The SN-ADC supports self-x (self-calibration, self-optimization, and self-healing) and machine learning required for the internet of things and Industry 4.0 and is based on a self-adaptive CMOS memristor.
Dennis Vollberg, Peter Gibson, Günter Schultes, Hans-Werner Groh, and Thomas Heinze
J. Sens. Sens. Syst., 11, 1–13, https://doi.org/10.5194/jsss-11-1-2022, https://doi.org/10.5194/jsss-11-1-2022, 2022
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We developed a smart in-cylinder pressure sensor for closed-loop combustion control. The sensor concept is based on a robust and reliable steel membrane equipped with highly strain-sensitive and temperature-stable thin films. The sensor system is complemented by a smart electronics allowing real-time data processing for calculation of different combustion parameters. The data are utilized to control the igniting timing of a spark plug for efficient operation of a combustion engine.
Qummar Zaman, Senan Alraho, and Andreas König
J. Sens. Sens. Syst., 10, 193–206, https://doi.org/10.5194/jsss-10-193-2021, https://doi.org/10.5194/jsss-10-193-2021, 2021
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A novel experience replay particle swarm optimization algorithm is presented and successfully deployed to improve the optimization performance for reconfigurable analog integrated circuits of industry 4.0. An optimization approach is introduced that relied on THD-based indirect measurement method that varies from the traditional calibration approach. Instead, the proposed calibration methodology optimizes all characteristics of the reconfigurable amplifier at once.
Alida Ilse Maria Schwebig and Rainer Tutsch
J. Sens. Sens. Syst., 9, 363–374, https://doi.org/10.5194/jsss-9-363-2020, https://doi.org/10.5194/jsss-9-363-2020, 2020
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In order to further increase the performance of neural networks in the field of optical quality assurance of soldered joints, a hierarchical classifier can be used instead of a single network. The global expansion of the classifier enables the inspection task to be distributed over several subnetworks, which results in higher accuracy. Since the individual sub-models only concentrate on the identification of certain characteristics, categorical problems can be solved more effectively.
Richard Nauber, Lars Büttner, and Jürgen Czarske
J. Sens. Sens. Syst., 9, 227–238, https://doi.org/10.5194/jsss-9-227-2020, https://doi.org/10.5194/jsss-9-227-2020, 2020
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To improve the energy efficiency of industrial processes, such as continuous steel casting, lab-scale experiments with liquid metals are performed. We present an ultrasound Doppler signal process for multiplane, high-frame-rate flow imaging. We achieve real-time operations with an efficient implementation in a field-programmable gate array (FPGA). We analyze the contributions to the uncertainty of the velocity measurement and relate it to its fundamental limit.
Alida Ilse Maria Schwebig and Rainer Tutsch
J. Sens. Sens. Syst., 9, 167–178, https://doi.org/10.5194/jsss-9-167-2020, https://doi.org/10.5194/jsss-9-167-2020, 2020
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This article presents a classification concept based on deep learning as an additional optical test method for real-time visualization and analysis of electrical assemblies in the production environment. For this purpose, a neural convolutional network is used to identify the quality of the solder joint of surface-mounted chip components in the inspection images. The concept can be used to increase the detection performance of the solder joint inspection systems.
Christoph Cammin, Dmytro Krush, Ralf Heynicke, and Gerd Scholl
J. Sens. Sens. Syst., 8, 185–194, https://doi.org/10.5194/jsss-8-185-2019, https://doi.org/10.5194/jsss-8-185-2019, 2019
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Reverberation chambers are well-proven test environments for RF measurements. Typically, mean values are taken from the measurements to characterize the equipment under test. In the novel approach presented in this paper, the correlation of measured sample sequences is utilized to detect deviations, in particular of the radiation characteristics, from reference equipment.
Henrik Lensch, Manuel Bastuck, Tobias Baur, Andreas Schütze, and Tilman Sauerwald
J. Sens. Sens. Syst., 8, 161–169, https://doi.org/10.5194/jsss-8-161-2019, https://doi.org/10.5194/jsss-8-161-2019, 2019
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The measurement of humidity in industrial applications is still an important research issue. Especially under rough operation conditions the current humidity sensor comes to its limitations. To this end, we are developing an integrated sensor system using a metal oxide sensor with impedance spectroscopy as multi-signal generation allowing the discrimination of humidity and reducing gases. The submitted paper focuses on the modeling of the humidity-dependent aspects of impedance.
Ingrid Ullmann, Julian Adametz, Daniel Oppelt, Andreas Benedikter, and Martin Vossiek
J. Sens. Sens. Syst., 7, 309–317, https://doi.org/10.5194/jsss-7-309-2018, https://doi.org/10.5194/jsss-7-309-2018, 2018
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Millimetre-wave radar is an emerging technique for non-destructive testing: it is less costly than X-rays and has no ionizing radiation. Compared to ultrasound it does not require the device under test to be immersed in water. This article presents methods for high-resolution millimetre-wave radar imaging without a priori knowledge of the object's shape. A polymer device with simulated material defects is examined, which could be depicted precisely.
Slawomir Grys
J. Sens. Sens. Syst., 7, 153–160, https://doi.org/10.5194/jsss-7-153-2018, https://doi.org/10.5194/jsss-7-153-2018, 2018
Robin Höhne, Pawel Kostka, and Niels Modler
J. Sens. Sens. Syst., 6, 389–394, https://doi.org/10.5194/jsss-6-389-2017, https://doi.org/10.5194/jsss-6-389-2017, 2017
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This paper focuses on a novel carbon fibre sensor technology that exploits the low-cost and low-energy electrical reflectometry method for a spatially resolved strain measurement. The application of artificial neural networks for mapping the measured electrical signal to the existing strain profile is demonstrated. The potential and current limits are highlighted. The sensor is a promising part for the next generation of light-weight structures with operando health monitoring systems.
Alberto Garinei and Roberto Marsili
J. Sens. Sens. Syst., 6, 253–258, https://doi.org/10.5194/jsss-6-253-2017, https://doi.org/10.5194/jsss-6-253-2017, 2017
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When a torque measurement is required, torque transducers show many drawbacks during their use: the usual limits are the need for contact and the effects on shaft line parameters. A new approach is proposed in this work: a non-contact torque meter for a machine shaft has been developed, based on a laser speckle contrast method. It carries out torque measurements evaluating the torsional displacement between two distinct sections of the shaft, through the monitoring of their roughness.
Manuel Schneider, Alexander Jahn, Norbert Greifzu, and Norbert Fränzel
J. Sens. Sens. Syst., 6, 199–210, https://doi.org/10.5194/jsss-6-199-2017, https://doi.org/10.5194/jsss-6-199-2017, 2017
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This article describes a chopper amplifier which has been specially developed for piezoelectric pressure sensors. It is shown that the amplifier provides good results for pressure measurement in injection moulds. A special feature of this work is the signal optimisation through the use of a Kalman filter.
Peter Haußmann and Joachim Melbert
J. Sens. Sens. Syst., 6, 65–76, https://doi.org/10.5194/jsss-6-65-2017, https://doi.org/10.5194/jsss-6-65-2017, 2017
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A method to generate broadband waveforms with low peak-to-peak amplitude based on distinct frequency domain profiles is presented, which includes random phase variation and numerical optimization. The peak-to-peak amplitude can be reduced by 71 % compared to zero-phase pulses with equal frequency domain characteristics. Used as excitation signals for impedance spectroscopy, the waveforms yield good results at significantly reduced measurement duration compared to established measurement methods.
Patrick Weßkamp and Joachim Melbert
J. Sens. Sens. Syst., 5, 389–400, https://doi.org/10.5194/jsss-5-389-2016, https://doi.org/10.5194/jsss-5-389-2016, 2016
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Measurement of electrical current is important for many scientific and industrial applications. Often shunt resistors are used. However, thermal effects due to self-heating and ambient temperature variation limit the achievable accuracy.
In this work, a dynamic compensation method is presented which takes static and dynamic temperature drift effects into account. It significantly reduces the remaining measurement errors. The approach can also be used to improve existing measurement systems.
Roland Wuchrer, Sabrina Amrehn, Luhao Liu, Thorsten Wagner, and Thomas Härtling
J. Sens. Sens. Syst., 5, 157–163, https://doi.org/10.5194/jsss-5-157-2016, https://doi.org/10.5194/jsss-5-157-2016, 2016
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The continuous monitoring of industrial and environmental processes is becoming an increasingly important aspect with both economic and societal impact. To realize this task, spectral-optical sensors with their outstanding properties in terms of sensitivity and reliability are a potential solution. However, for exploiting these sensors in a cost- and energy-efficient sensing system, a miniaturized readout unit is needed. Here we present a card-size, inexpensive, and robust readout electronics.
Johannes Gürtler, Daniel Haufe, Anita Schulz, Friedrich Bake, Lars Enghardt, Jürgen Czarske, and Andreas Fischer
J. Sens. Sens. Syst., 5, 125–136, https://doi.org/10.5194/jsss-5-125-2016, https://doi.org/10.5194/jsss-5-125-2016, 2016
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The interaction of sound and flow enables an efficient noise damping. Understanding this aeroacoustic damping phenomenon requires simultaneous measurement of flow and sound fields. Using a high-speed CMOS camera, two-component flow velocity measurements are performed in a three-dimensional region of interest. The sensor system can simultaneously capture sound and turbulent flow velocity oscillations. The presented measurements reveal that the sound energy is transferred into flow energy.
A. Tempelhahn, H. Budzier, V. Krause, and G. Gerlach
J. Sens. Sens. Syst., 5, 9–16, https://doi.org/10.5194/jsss-5-9-2016, https://doi.org/10.5194/jsss-5-9-2016, 2016
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Infrared cameras based on microbolometer focal plane arrays (FPAs) are the most widely used cameras in thermography. For acceptable measurement uncertainty values, the disturbing influences of changing ambient temperature have to be considered. We propose a TEC-less and shutter-less correction approach based on additional temperature measurements inside the IR camera. The effects on the pixel responsivity and offset voltage are considered separately.
M. Schüler, T. Sauerwald, and A. Schütze
J. Sens. Sens. Syst., 4, 305–311, https://doi.org/10.5194/jsss-4-305-2015, https://doi.org/10.5194/jsss-4-305-2015, 2015
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We study the effect of HMDSO vapor on an SnO2-based gas sensor in temperature cycled operation (TCO). The poisoning can be quantified at early stages with a resolution of ±85 ppm*min using TCO. This approach provides a simple method for early detection of HMDSO poisoning.
The stability of gas discrimination by linear discriminant analysis (LDA) can be improved using normalization, which in turn facilitates a more accurate determination of the poisoning state by hierarchical LDA discrimination.
A. Schuler, T. Hausotte, and Z. Sun
J. Sens. Sens. Syst., 4, 199–208, https://doi.org/10.5194/jsss-4-199-2015, https://doi.org/10.5194/jsss-4-199-2015, 2015
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Measurement tasks of modern micro- and nanometrology with decreasing structure sizes and rising aspect ratios require nanometre-resolving 3-D capable sensors. A 3-D probing system based on electrical interaction is presented which is operated on a nanopositioning system NMM-1. New 3-D measurement procedures for the probing system as well as for micrometrology measurement tasks in general are shown.
A. Dragoneas, L. Hague, and M. Grell
J. Sens. Sens. Syst., 4, 169–177, https://doi.org/10.5194/jsss-4-169-2015, https://doi.org/10.5194/jsss-4-169-2015, 2015
A. Ens and L. M. Reindl
J. Sens. Sens. Syst., 4, 9–16, https://doi.org/10.5194/jsss-4-9-2015, https://doi.org/10.5194/jsss-4-9-2015, 2015
M. Schüler, T. Sauerwald, and A. Schütze
J. Sens. Sens. Syst., 3, 213–221, https://doi.org/10.5194/jsss-3-213-2014, https://doi.org/10.5194/jsss-3-213-2014, 2014
Y. Wang, D. Ewert, T. Meisen, D. Schilberg, and S. Jeschke
J. Sens. Sens. Syst., 3, 113–120, https://doi.org/10.5194/jsss-3-113-2014, https://doi.org/10.5194/jsss-3-113-2014, 2014
D. Griefahn, J. Wollnack, and W. Hintze
J. Sens. Sens. Syst., 3, 105–111, https://doi.org/10.5194/jsss-3-105-2014, https://doi.org/10.5194/jsss-3-105-2014, 2014
J.-M. Boccard, P. Katus, R. Renevier, L. M. Reindl, and J.-M. Friedt
J. Sens. Sens. Syst., 2, 147–156, https://doi.org/10.5194/jsss-2-147-2013, https://doi.org/10.5194/jsss-2-147-2013, 2013
H. Lühr, F. Yin, and R. Bock
J. Sens. Sens. Syst., 2, 9–17, https://doi.org/10.5194/jsss-2-9-2013, https://doi.org/10.5194/jsss-2-9-2013, 2013
Cited articles
Aaltonen, L. and Halonen, K.: Continuous-time interface for a micromachined capacitive accelerometer with {NEA} of 4 g and bandwidth of 300 hz, Sensors Actuat. A, 154, 46–56, 2009.
Amini, B. V. and Ayazi, F.: A 2.5-v 14-bit sigma; delta; cmos soi capacitive accelerometer, IEEE J. Solid-State Circ., 39, 2467–2476, 2004.
Ana: Noise and Operational Amplifier Circuits, appl. note an-358 Edn., n.d.
Bernstein, J., Miller, R., Kelley, W., and Ward, P.: Low-noise mems vibration sensor for geophysical applications, J. Microelectromech. Syst., 8, 433–438, 1999.
Chau, H.-L. and Wise, K. D.: Noise due to brownian motion in ultrasensitive solid-state pressure sensors, IEEE T. Elect. Devic., 34, 859–865, 1987.
Chen, F., Yuan, W., Chang, H., Zeimpekis, I., and Kraft, M.: Low noise vacuum mems closed-loop accelerometer using sixth-order multi-feedback loops and local resonator sigma delta modulator, in: 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS), 26–30 January 2014, San Francisco, CA, USA, 761–764, 2014.
Dudaicevs, H., Kandler, M., Manoli, Y., Mokwa, W., and Spiegel, E.: Surface micromachined pressure sensors with integrated cmos read-out electronics, Sensors Actuat A, 43, 157–163, 1994.
Enz, C. C. and Temes, G. C.: Circuit techniques for reducing the effects of op-amp imperfections: autozeroing, correlated double sampling, and chopper stabilization, Proc. IEEE, 84, 1584–1614, 1996.
Enz, C. C., Vittoz, E. A. and Krummenacher, F.: A cmos chopper amplifier, IEEE J. Solid-State Circ., 22, 335–342, 1987.
Gembaczka, P., Görtz, M., Celik, Y., Jupe, A., Stühlmeyer, M., Goehlich, A., Vogt, H., Mokwa, W., and Kraft, M.: Encapsulation of implantable integrated mems pressure sensors using polyimide epoxy composite and atomic layer deposition, J. Sensors Sensor Syst., 3, 335–347, 2014.
Georgakopoulou, K., Spathis, C., Petrellis, N., and Birbas, A.: A capacitive-to-digital converter with automatic range adaptation for readout instrumentation, IEEE T. Instrum. Meas., 65, 336–345, 2016.
Goo, J.-S., Choi, C.-H., Abramo, A., Ahn, J.-G., Yu, Z., Lee, T. H., and Dutton, R. W.: Physical origin of the excess thermal noise in short channel mosfets, IEEE Elect. Device Lett., 22, 101–103, 2001.
Hogervorst, R., Tero, J. P., Eschauzier, R. G. H. and Huijsing, J. H.: A compact power-efficient 3 v cmos rail-to-rail input/output operational amplifier for vlsi cell libraries, IEEE J. Solid-State Circ., 29, 1505–1513, 1994.
Jiang, H., Wang, Z., Liu, L., Zhang, C., and Wang, Z.: A combined low power sar capacitance-to-digital/analog-to-digital converter for multisensory system, in: 2012 IEEE 55th International Midwest Symposium on Circuits and Systems (MWSCAS), 5–8 August 2012, Boise, ID, USA, 1000–1003, 2012.
Kajita, T., Moon, U.-K. and Temes, G. C.: A noise-shaping accelerometer interface circuit for two-chip implementation, in: IMTC 2001, Proceedings of the 18th IEEE Instrumentation and Measurement Technology Conference, Rediscovering Measurement in the Age of Informatics (Cat. No. 01CH 37188), Vol. 3, 21–23 May 2001, Budapest, Hungary, 1581–1586, 2001.
Kevin, T. C. C., Han, D., Ravinder, P. S., Duy, D. P., Chin, Y. P., Jian, W. L., Nuttman, D., and Je, M.: 118-db dynamic range, continuous-time, opened-loop capactance to voltage converter readout for capacitive mems accelerometer, in: 2010 IEEE Asian Solid-State Circuits Conference, 8–10 November 2010, Beijing, China, 1–4, 2010.
Leach, W. M.: On the calculation of noise in multistage amplifiers, IEEE T. Circ. Syst. I, 42, 176–178, 1995.
Pedersen, T., Fragiacomo, G., Hansen, O., and Thomsen, E.: Highly sensitive micromachined capacitive pressure sensor with reduced hysteresis and low parasitic capacitance, Sensors Actuat. A, 154, 35–41, 2009.
Ruan, Y., Ji, L., Tang, Y., Yao, W., Wang, Z., and Xu, S.: Design of a 5 mw capacitive accelerometer based on mems and cmos technology, in: Proceedings of the 10th World Congress on Intelligent Control and Automation, 5–8 May 2014, Monterey, CA, USA, 5102–5107, 2012.
Rudolf, F., Gonseth, S., Brisson, R., and Krebs, P.: New generation of high performance/high reliability mems accelerometers for harsh environment, in: 2014 IEEE/ION Position, Location and Navigation Symposium – PLANS 2014, 28–28 April 2006, London, UK, 7–11, 2014.
Sari, I., Zeimpekis, I., and Kraft, M.: A dicing free {SOI} process for {MEMS} devices, Microelect. Eng., 95, 121–129, 2012.
Stauffer, J. M.: Standard mems sensor technologies for harsh environment, in: The Institution of Engineering and Technology Seminar on MEMS Sensors and Actuators 2006, 4–6 May 2010, Indian Wells, CA, USA, 91–96, 2006.
Stauffer, J. M., Dietrich, O., and Dutoit, B.: Rs9000, a novel mems accelerometer family for mil/aerospace and safety critical applications, in: IEEE/ION Position, Location and Navigation Symposium, 12–14 June 2002, Orlando, FL, USA, 1–5, 2010.
Tavakoli, M. and Sarpeshkar, R.: An offset-canceling low-noise lock-in architecture for capacitive sensing, IEEE J. Solid-State Circ., 38, 244–253, 2003.
Trieu, H. K., Kordas, N., and Mokwa, W.: Fully cmos compatible capacitive differential pressure sensors with on-chip programmabilities and temperature compensation, in: Vol. 2, Proceedings of IEEE Sensors, 15–18 May 2011, Rio de Janeiro, Brazil, 1451–1455, 2002.
Walk, C., Goehlich, A., Giese, A., Görtz, M., Vogt, H., and Kraft, M.: Investigation of diaphragm deflection of an absolute mems capacitive polysilicon pressure sensor, in: Vol. 9517 of Proceedings of SPIE Smart Sensors, Actuators, and MEMS VII; and Cyber Physical Systems, 4 May 2015, Barcelona, Spain, edited by: Sánchez-Rojas, R. and Luisand Brama, J., SPIE, Bellingham, Wash., 95170T-1–95170T-9, 2015.
Wang, C. K., Chen, C. S., and Wen, K. A.: A monolithic cmos mems accelerometer with chopper correlated double sampling readout circuit, in: 2011 IEEE International Symposium of Circuits and Systems (ISCAS), 19–19 June 1997, 2023–2026, 2011.
Wu, J., Fedder, G. K. and Carley, L. R.: A low-noise low-offset capacitive sensing amplifier for a 50-mu;g/radic;hz monolithic cmos mems accelerometer, IEEE J. Solid-State Circ., 39, 722–730, 2004.
Xu, H., Liu, X., and Yin, L.: A closed-loop σδ interface for a high-q micromechanical capacitive accelerometer with 200 ng/hz input noise density, IEEE J. Solid-State Circ., 50, 2101–2112, 2015a.
Xu, H., Liu, X., Yin, L., Fu, Q., Gao, Z., and Jiang, W.: Harmonic distortion analysis for switched-capacitor electromechanical sigma-delta modulators, IEEE Sensors J., 15, 4826–4835, 2015b.
Yazdi, N. and Najafi, K.: An all-silicon single-wafer fabrication technology for precision microaccelerometers, in: Vol. 2, International Conference on Solid State Sensors and Actuators, TRANSDUCERS '97, 24–27 October 2004, Vienna, Austria, Chicago, 1181–1184, 1997.
Yazdi, N., Kulah, H., and Najafi, K.: Precision readout circuits for capacitive microaccelerometers, in: Vol. 1, Proceedings of IEEE Sensors, 24–27 October 2004, Vienna, Austria, 28–31, 2004.
Yin, T., Yang, H., Yuan, Q., and Cui, G.: Noise analysis and simulation of chopper amplifier, in: APCCAS 2006 – 2006 IEEE Asia Pacific Conference on Circuits and Systems, 4–7 December 2006, Singapore, Singapore, 167–170, 2006.
Zhang, G., Xie, H., de Rosset, L. E., and Fedder, G. K.: A lateral capacitive cmos accelerometer with structural curl compensation, in: Technical Digest, IEEE International MEMS 99 Conference, Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No. 99CH36291), 21–21 January 1999, Orlando, FL, USA, 606–611, 1999.