Siloxane treatment of metal oxide semiconductor  gas sensors in temperature-cycled  operation – sensitivity and selectivity

Schultealbert, Caroline; Uzun, Iklim; Baur, Tobias; Sauerwald, Tilman; Schütze, Andreas

doi:https://doi.org/10.5194/jsss-9-283-2020

Articles | Volume 9, issue 2

https://doi.org/10.5194/jsss-9-283-2020

© Author(s) 2020. This work is distributed under
the Creative Commons Attribution 4.0 License.

Special issue:

Dresden Sensor Symposium DSS 2019

https://doi.org/10.5194/jsss-9-283-2020

© Author(s) 2020. This work is distributed under
the Creative Commons Attribution 4.0 License.

Articles | Volume 9, issue 2

Regular research article

|

28 Aug 2020

Regular research article |

| 28 Aug 2020

Siloxane treatment of metal oxide semiconductor gas sensors in temperature-cycled operation – sensitivity and selectivity

Caroline Schultealbert, Iklim Uzun, Tobias Baur, Tilman Sauerwald, and Andreas Schütze

Supplement

https://doi.org/10.5194/jsss-9-283-2020-supplement

Data sets

HMDSO Poisoning of UST1530 MOS Sensor C. Schultealbert, I. Uzun, and T. Baur https://doi.org/10.5281/zenodo.3999438

Short summary

We present a work on gas sensors that can for example be used for the assessment of indoor air quality. These sensors suffer from deterioration by siloxanes, so we investigated these effects by a distinct operation mode and exposition to this gas that allows us to interpret different reactions on the sensor surface. We found that all processes on the sensor surface are slowed down by this treatment and a self-compensation by the evaluation of oxygen adsorption processes is likely to be found.