Articles | Volume 9, issue 2
https://doi.org/10.5194/jsss-9-283-2020
https://doi.org/10.5194/jsss-9-283-2020
Regular research article
 | 
28 Aug 2020
Regular research article |  | 28 Aug 2020

Siloxane treatment of metal oxide semiconductor gas sensors in temperature-cycled operation – sensitivity and selectivity

Caroline Schultealbert, Iklim Uzun, Tobias Baur, Tilman Sauerwald, and Andreas Schütze

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Cited articles

Barsan, N. and Weimar, U.: Conduction model of metal oxide gas sensors, J. Electroceram., 7, 143–167, https://doi.org/10.1023/A:1014405811371, 2001. 
Bastuck, M., Baur, T., and Schütze, A.: DAV3E – a MATLAB toolbox for multivariate sensor data evaluation, J. Sensors Sens. Syst., 7, 489–506, https://doi.org/10.5194/jsss-7-489-2018, 2018. 
Baur, T., Schütze, A., and Sauerwald, T.: Optimierung des temperaturzyklischen Betriebs von Halbleitergassensoren, tm – Tech. Mess., 82, 187–195, https://doi.org/10.1515/teme-2014-0007, 2015. 
Baur, T., Schultealbert, C., Schütze, A., and Sauerwald, T.: Novel method for the detection of short trace gas pulses with metal oxide semiconductor gas sensors, J. Sensors Sens. Syst., 7, 411–419, https://doi.org/10.5194/jsss-7-411-2018, 2018. 
Dudzina, T., von Goetz, N., Bogdal, C., Biesterbos, J. W. H., and Hungerbühler, K.: Concentrations of cyclic volatile methylsiloxanes in European cosmetics and personal care products: Prerequisite for human and environmental exposure assessment, Environ. Int., 62, 86–94, https://doi.org/10.1016/j.envint.2013.10.002, 2014. 
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Short summary
We present a work on gas sensors that can for example be used for the assessment of indoor air quality. These sensors suffer from deterioration by siloxanes, so we investigated these effects by a distinct operation mode and exposition to this gas that allows us to interpret different reactions on the sensor surface. We found that all processes on the sensor surface are slowed down by this treatment and a self-compensation by the evaluation of oxygen adsorption processes is likely to be found.