Journal of Sensors and Sensor Systems
Journal of Sensors and Sensor Systems
JSSS
Articles | Volume 9, issue 2
Articles | Volume 9, issue 2
https://doi.org/10.5194/jsss-9-283-2020
© Author(s) 2020. This work is distributed under
the Creative Commons Attribution 4.0 License.
Special issue:
https://doi.org/10.5194/jsss-9-283-2020
© Author(s) 2020. This work is distributed under
the Creative Commons Attribution 4.0 License.
Articles | Volume 9, issue 2
Regular research article
 | 
28 Aug 2020
Regular research article |  | 28 Aug 2020

Siloxane treatment of metal oxide semiconductor gas sensors in temperature-cycled operation – sensitivity and selectivity

Caroline Schultealbert, Iklim Uzun, Tobias Baur, Tilman Sauerwald, and Andreas Schütze

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Short summary
We present a work on gas sensors that can for example be used for the assessment of indoor air quality. These sensors suffer from deterioration by siloxanes, so we investigated these effects by a distinct operation mode and exposition to this gas that allows us to interpret different reactions on the sensor surface. We found that all processes on the sensor surface are slowed down by this treatment and a self-compensation by the evaluation of oxygen adsorption processes is likely to be found.
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Dresden Sensor Symposium DSS 2019