Articles | Volume 14, issue 2
https://doi.org/10.5194/jsss-14-139-2025
© Author(s) 2025. This work is distributed under
the Creative Commons Attribution 4.0 License.Special issue:
Silicon-based thermal conductivity detector for gas sensing and gas chromatography
Related subject area
Sensor technologies: MEMS technology
Effects of potassium sodium niobate (KNN) thickness on biaxial non-resonant microelectromechanical systems (MEMS) mirror performance
Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors
Calibration of tri-axial MEMS accelerometers in the low-frequency range – Part 2: Uncertainty assessment
Calibration of tri-axial MEMS accelerometers in the low-frequency range – Part 1: comparison among methods
J. Sens. Sens. Syst., 14, 27–35,
2025J. Sens. Sens. Syst., 8, 37–48,
2019J. Sens. Sens. Syst., 7, 403–410,
2018J. Sens. Sens. Syst., 7, 245–257,
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