Articles | Volume 5, issue 1
https://doi.org/10.5194/jsss-5-73-2016
https://doi.org/10.5194/jsss-5-73-2016
Regular research article
 | 
09 Mar 2016
Regular research article |  | 09 Mar 2016

Joining technologies for a temperature-stable integration of a LTCC-based pressure sensor

J. Schilm, A. Goldberg, U. Partsch, W. Dürfeld, D. Arndt, A. Pönicke, and A. Michaelis

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