Joining technologies for a temperature-stable integration of a LTCC-based pressure sensor

Schilm, J.; Goldberg, A.; Partsch, U.; Dürfeld, W.; Arndt, D.; Pönicke, A.; Michaelis, A.

doi:10.5194/jsss-5-73-2016

Articles | Volume 5, issue 1

https://doi.org/10.5194/jsss-5-73-2016

© Author(s) 2016. This work is distributed under
the Creative Commons Attribution 3.0 License.

Special issue:

High-temperature sensors and materials

https://doi.org/10.5194/jsss-5-73-2016

© Author(s) 2016. This work is distributed under
the Creative Commons Attribution 3.0 License.

Articles | Volume 5, issue 1

Regular research article

|

09 Mar 2016

Regular research article |

| 09 Mar 2016

Joining technologies for a temperature-stable integration of a LTCC-based pressure sensor

J. Schilm, A. Goldberg, U. Partsch, W. Dürfeld, D. Arndt, A. Pönicke, and A. Michaelis

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Month	HTML	PDF	XML	Total
Mar 2016	78	24	4	106
Apr 2016	44	11	0	55
May 2016	27	8	5	40
Jun 2016	4	1	3	8
Jul 2016	5	4	1	10
Aug 2016	3	5	3	11
Sep 2016	5	5	0	10
Oct 2016	7	5	2	14
Nov 2016	5	4	1	10
Dec 2016	7	8	6	21
Jan 2017	21	17	3	41
Feb 2017	14	8	3	25
Mar 2017	21	19	9	49
Apr 2017	15	13	5	33
May 2017	29	22	6	57
Jun 2017	13	11	6	30
Jul 2017	18	21	7	46
Aug 2017	6	18	5	29
Sep 2017	10	32	2	44
Oct 2017	12	27	1	40
Nov 2017	14	29	3	46
Dec 2017	18	27	4	49
Jan 2018	10	22	2	34
Feb 2018	18	26	4	48
Mar 2018	14	31	4	49
Apr 2018	15	34	7	56
May 2018	25	34	2	61
Jun 2018	18	34	3	55
Jul 2018	15	36	1	52
Aug 2018	19	61	2	82
Sep 2018	17	44	1	62
Oct 2018	16	57	5	78
Nov 2018	20	68	3	91
Dec 2018	15	51	2	68
Jan 2019	16	39	4	59
Feb 2019	13	45	2	60
Mar 2019	10	35	2	47
Apr 2019	10	31	3	44
May 2019	12	39	9	60
Jun 2019	9	55	10	74
Jul 2019	7	46	1	54
Aug 2019	10	56	2	68
Sep 2019	8	61	2	71
Oct 2019	12	36	1	49
Nov 2019	5	24	0	29
Dec 2019	4	19	2	25
Jan 2020	18	9	0	27
Feb 2020	16	9	0	25
Mar 2020	8	7	2	17
Apr 2020	5	9	0	14
May 2020	10	7	0	17
Jun 2020	38	13	1	52
Jul 2020	21	20	18	59
Aug 2020	7	4	3	14
Sep 2020	9	10	0	19
Oct 2020	11	22	3	36
Nov 2020	8	6	0	14
Dec 2020	12	13	3	28
Jan 2021	17	10	3	30
Feb 2021	10	12	1	23
Mar 2021	11	10	2	23
Apr 2021	9	13	4	26
May 2021	3	6	1	10
Jun 2021	11	9	1	21
Jul 2021	11	10	1	22
Aug 2021	6	9	0	15
Sep 2021	15	9	0	24
Oct 2021	5	30	5	40
Nov 2021	15	10	1	26
Dec 2021	17	11	2	30
Jan 2022	10	12	4	26
Feb 2022	9	5	2	16
Mar 2022	5	8	1	14
Apr 2022	1	4	0	5
May 2022	15	9	4	28
Jun 2022	10	7	3	20
Jul 2022	7	6	5	18
Aug 2022	10	4	1	15
Sep 2022	5	3	1	9
Oct 2022	6	5	3	14
Nov 2022	11	7	2	20
Dec 2022	4	6	0	10
Jan 2023	6	10	0	16
Feb 2023	8	4	0	12
Mar 2023	19	5	0	24
Apr 2023	2	5	0	7
May 2023	11	6	1	18
Jun 2023	7	4	0	11
Jul 2023	4	8	0	12
Aug 2023	5	7	4	16
Sep 2023	4	3	1	8
Oct 2023	3	1	0	4
Nov 2023	3	0	3
Dec 2023	8	4	2	14
Jan 2024	2	9	0	11
Feb 2024	3	5	0	8
Mar 2024	2	10	1	13
Apr 2024	5	9	1	15
May 2024	4	2	0	6
Jun 2024	19	3	3	25
Jul 2024	14	4	3	21
Aug 2024	20	7	2	29
Sep 2024	12	2	1	15
Oct 2024	9	3	0	12
Nov 2024	3	2	1	6
Dec 2024	3	4	2	9
Jan 2025	5	6	1	12
Feb 2025	18	4	2	24
Mar 2025	10	13	0	23
Apr 2025	10	14	0	24
May 2025	19	7	1	27
Jun 2025	34	14	1	49
Jul 2025	21	32	1	54
Aug 2025	18	6	0	24
Sep 2025	22	13	1	36
Oct 2025	23	20	4	47
Nov 2025	28	37	2	67
Dec 2025	22	22	3	47
Jan 2026	15	13	5	33
Feb 2026	19	15	3	37
Mar 2026	22	11	3	36

Cumulative views and downloads (calculated since 09 Mar 2016)

Month	HTML	PDF	XML	Total
Mar 2016	78	24	4	106
Apr 2016	44	11	0	55
May 2016	27	8	5	40
Jun 2016	4	1	3	8
Jul 2016	5	4	1	10
Aug 2016	3	5	3	11
Sep 2016	5	5	0	10
Oct 2016	7	5	2	14
Nov 2016	5	4	1	10
Dec 2016	7	8	6	21
Jan 2017	21	17	3	41
Feb 2017	14	8	3	25
Mar 2017	21	19	9	49
Apr 2017	15	13	5	33
May 2017	29	22	6	57
Jun 2017	13	11	6	30
Jul 2017	18	21	7	46
Aug 2017	6	18	5	29
Sep 2017	10	32	2	44
Oct 2017	12	27	1	40
Nov 2017	14	29	3	46
Dec 2017	18	27	4	49
Jan 2018	10	22	2	34
Feb 2018	18	26	4	48
Mar 2018	14	31	4	49
Apr 2018	15	34	7	56
May 2018	25	34	2	61
Jun 2018	18	34	3	55
Jul 2018	15	36	1	52
Aug 2018	19	61	2	82
Sep 2018	17	44	1	62
Oct 2018	16	57	5	78
Nov 2018	20	68	3	91
Dec 2018	15	51	2	68
Jan 2019	16	39	4	59
Feb 2019	13	45	2	60
Mar 2019	10	35	2	47
Apr 2019	10	31	3	44
May 2019	12	39	9	60
Jun 2019	9	55	10	74
Jul 2019	7	46	1	54
Aug 2019	10	56	2	68
Sep 2019	8	61	2	71
Oct 2019	12	36	1	49
Nov 2019	5	24	0	29
Dec 2019	4	19	2	25
Jan 2020	18	9	0	27
Feb 2020	16	9	0	25
Mar 2020	8	7	2	17
Apr 2020	5	9	0	14
May 2020	10	7	0	17
Jun 2020	38	13	1	52
Jul 2020	21	20	18	59
Aug 2020	7	4	3	14
Sep 2020	9	10	0	19
Oct 2020	11	22	3	36
Nov 2020	8	6	0	14
Dec 2020	12	13	3	28
Jan 2021	17	10	3	30
Feb 2021	10	12	1	23
Mar 2021	11	10	2	23
Apr 2021	9	13	4	26
May 2021	3	6	1	10
Jun 2021	11	9	1	21
Jul 2021	11	10	1	22
Aug 2021	6	9	0	15
Sep 2021	15	9	0	24
Oct 2021	5	30	5	40
Nov 2021	15	10	1	26
Dec 2021	17	11	2	30
Jan 2022	10	12	4	26
Feb 2022	9	5	2	16
Mar 2022	5	8	1	14
Apr 2022	1	4	0	5
May 2022	15	9	4	28
Jun 2022	10	7	3	20
Jul 2022	7	6	5	18
Aug 2022	10	4	1	15
Sep 2022	5	3	1	9
Oct 2022	6	5	3	14
Nov 2022	11	7	2	20
Dec 2022	4	6	0	10
Jan 2023	6	10	0	16
Feb 2023	8	4	0	12
Mar 2023	19	5	0	24
Apr 2023	2	5	0	7
May 2023	11	6	1	18
Jun 2023	7	4	0	11
Jul 2023	4	8	0	12
Aug 2023	5	7	4	16
Sep 2023	4	3	1	8
Oct 2023	3	1	0	4
Nov 2023	3	0	3
Dec 2023	8	4	2	14
Jan 2024	2	9	0	11
Feb 2024	3	5	0	8
Mar 2024	2	10	1	13
Apr 2024	5	9	1	15
May 2024	4	2	0	6
Jun 2024	19	3	3	25
Jul 2024	14	4	3	21
Aug 2024	20	7	2	29
Sep 2024	12	2	1	15
Oct 2024	9	3	0	12
Nov 2024	3	2	1	6
Dec 2024	3	4	2	9
Jan 2025	5	6	1	12
Feb 2025	18	4	2	24
Mar 2025	10	13	0	23
Apr 2025	10	14	0	24
May 2025	19	7	1	27
Jun 2025	34	14	1	49
Jul 2025	21	32	1	54
Aug 2025	18	6	0	24
Sep 2025	22	13	1	36
Oct 2025	23	20	4	47
Nov 2025	28	37	2	67
Dec 2025	22	22	3	47
Jan 2026	15	13	5	33
Feb 2026	19	15	3	37
Mar 2026	22	11	3	36

Latest update: 29 Mar 2026