Articles | Volume 5, issue 1
https://doi.org/10.5194/jsss-5-85-2016
https://doi.org/10.5194/jsss-5-85-2016
Review paper
 | 
17 Mar 2016
Review paper |  | 17 Mar 2016

Investigation of low-temperature cofired ceramics packages for high-temperature SAW sensors

Jochen Bardong, Alfred Binder, Sasa Toskov, Goran Miskovic, and Goran Radosavljevic

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Short summary
In this work, a ceramic housing was designed using the versatile low-temperature cofired ceramics (LTCC) to test this technology at temperatures above 400°C. Inside the housing, a prototype sensor chip was mounted to monitor the signal quality during an applied heat treatment up to 600 °C. All devices failed at around 450–500 °C due to material migration from the glass seal of the housing to the sensing structures of the mounted chip. Elemental analysis identified bismuth as a contaminant.