Articles | Volume 5, issue 1
Review paper
17 Mar 2016
Review paper |  | 17 Mar 2016

Investigation of low-temperature cofired ceramics packages for high-temperature SAW sensors

Jochen Bardong, Alfred Binder, Sasa Toskov, Goran Miskovic, and Goran Radosavljevic

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Cited articles

Bardong, J.: Untersuchungen platinbasierter Metallschichtsysteme auf Langasit und Lithiumniobat, Dissertation, FAM – ALU – Freiburg, IMTEK, Dept. of Electrical Instrumentation, 105–116, ISBN: 978-3-86247-377-9, 2013.
Bardong, J., Bruckner, G., Franz, G., Erlacher, A., and Fachberger, R.: Characterisation setup of SAW Devices at high temperatures and ultra high frequencies, IEEE Frequency Control Symposium, Besancon, France, 20–24 April 2009, 28–32, 2009.
Bardong, J., Bruckner, G., and Fachberger, R.: Platinum based metal layer systems for high temperature SAW sensor devices on langasite, Sensoren und Messsysteme 2010 – 15. ITG/GMA Fachtagung, Nürnberg, Germany, 18–19 May, 2010.
Boashash, B.: Time-Frequency Signal Analysis and Processing, Academic Press, Elsevier, London, UK, 2nd Edn., 1056 pp., ISBN 978-0-12-398499-9, 2015.
Butz, T.: Fouriertransformation für Fußgänger, 3rd Edn., Teubner, Stuttgart, Germany, 180 pp., ISBN 3-519-20202-6, 2003.
Short summary
In this work, a ceramic housing was designed using the versatile low-temperature cofired ceramics (LTCC) to test this technology at temperatures above 400°C. Inside the housing, a prototype sensor chip was mounted to monitor the signal quality during an applied heat treatment up to 600 °C. All devices failed at around 450–500 °C due to material migration from the glass seal of the housing to the sensing structures of the mounted chip. Elemental analysis identified bismuth as a contaminant.