Investigation of low-temperature cofired ceramics packages for high-temperature SAW sensors

Abstract. Surface acoustic wave (SAW) temperature sensor devices have been developed for operating temperatures up to and above 1000 °C. A challenging task to make these devices available on the market is to develop an appropriate housing concept. A concept based on low-temperature cofired ceramics (LTCC) has been investigated and tested under elevated temperatures up to 600 °C. The devices showed promising results up to 450 °C. Thorough analysis of the possible failure mechanisms was done to increase the maximum temperature above this limit in further production cycles.