Articles | Volume 8, issue 1
J. Sens. Sens. Syst., 8, 133–147, 2019
https://doi.org/10.5194/jsss-8-133-2019
J. Sens. Sens. Syst., 8, 133–147, 2019
https://doi.org/10.5194/jsss-8-133-2019
Feature article
03 Apr 2019
Feature article | 03 Apr 2019

Multi-parameter sensing using thickness shear mode (TSM) resonators – a feasibility analysis

Manfred Weihnacht

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Latest update: 08 Aug 2022
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Short summary
Multi-parameter sensing is examined for thickness shear mode resonators that are in mechanical contact with thin films and half-spaces on both sides. A formula is derived that delivers insight into a set of material and geometry parameters accessible by measurement. Further analysis addresses the problem of accuracy of extracted parameters at a given experimental uncertainty. The demonstrated procedure is suitable for developing experimental strategy for highly efficient multi-parameter sensing.