Articles | Volume 8, issue 1
J. Sens. Sens. Syst., 8, 133–147, 2019
https://doi.org/10.5194/jsss-8-133-2019
J. Sens. Sens. Syst., 8, 133–147, 2019
https://doi.org/10.5194/jsss-8-133-2019

Feature article 03 Apr 2019

Feature article | 03 Apr 2019

Multi-parameter sensing using thickness shear mode (TSM) resonators – a feasibility analysis

Manfred Weihnacht

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Cited articles

Bruenig, R., Guhr, G., Schmidt, H., and Weihnacht, M.: More comprehensive model of quartz crystal microbalance response to viscoelastic loading, Proceedings 2008 IEEE International Ultrasonics Symposium, 280–283, 5C-5, 2008. 
Butterworth, S.: On Electrically-maintained Vibrations, Proc. Phys. Soc. London, 27, 410–424, 1915. 
Eisele, N. B., Andersson, F. I., Frey, S., and Richter, R. P.: Viscoelasticity of thin biomolecular films: A case study on nucleoporin phenylalanine-glycine repeats grafted to a histidine-tag capturing QCM-D sensor, Biomacromolecules, 13, 2322–2332, 2012. 
Johannsmann, D.: Derivation of the shear compliance of thin films on quartz resonators from comparison of the frequency shifts on different harmonics: A perturbation analysis, J. Appl. Phys., 89, 6356, 2001. 
Johannsmann, D.: Viscoelastic, mechanical, and dielectric measurements on complex samples with the quartz crystal microbalance, Phys. Chem. Chem. Phys., 10, 4516–4534, 2008. 
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Short summary
Multi-parameter sensing is examined for thickness shear mode resonators that are in mechanical contact with thin films and half-spaces on both sides. A formula is derived that delivers insight into a set of material and geometry parameters accessible by measurement. Further analysis addresses the problem of accuracy of extracted parameters at a given experimental uncertainty. The demonstrated procedure is suitable for developing experimental strategy for highly efficient multi-parameter sensing.