Journal of Sensors and Sensor Systems
Journal of Sensors and Sensor Systems
JSSS
Articles | Volume 8, issue 2
Articles | Volume 8, issue 2
https://doi.org/10.5194/jsss-8-305-2019
© Author(s) 2019. This work is distributed under
the Creative Commons Attribution 4.0 License.
https://doi.org/10.5194/jsss-8-305-2019
© Author(s) 2019. This work is distributed under
the Creative Commons Attribution 4.0 License.
Articles | Volume 8, issue 2
Regular research article
 | 
30 Oct 2019
Regular research article |  | 30 Oct 2019

Three-dimensional structural comparison of tantalum glancing angle deposition thin films by FIB-SEM

Tobias Ott, Diego Roldán, Claudia Redenbach, Katja Schladitz, Michael Godehardt, and Sören Höhn

Viewed

Total article views: 2,568 (including HTML, PDF, and XML)
HTML PDF XML Total BibTeX EndNote
1,959 522 87 2,568 117 161
  • HTML: 1,959
  • PDF: 522
  • XML: 87
  • Total: 2,568
  • BibTeX: 117
  • EndNote: 161
Views and downloads (calculated since 30 Oct 2019)
Cumulative views and downloads (calculated since 30 Oct 2019)

Viewed (geographical distribution)

Total article views: 2,302 (including HTML, PDF, and XML) Thereof 2,205 with geography defined and 97 with unknown origin.
Country # Views %
  • 1
1
 
 
 
 
Latest update: 17 Nov 2025
Download
Short summary
Thin tantalum films generated by glancing angle deposition serve as functional optical layers. Serial sectioning by a focused ion beam combined with scanning electron microscopy of the slices generates stacks of highly resolved images of this film. Dedicated image processing reconstructs the spatial structure such that 3-D image analysis yields geometric information that can be related to the optical performance.
Read more
Share