Articles | Volume 8, issue 2
J. Sens. Sens. Syst., 8, 305–315, 2019
https://doi.org/10.5194/jsss-8-305-2019
J. Sens. Sens. Syst., 8, 305–315, 2019
https://doi.org/10.5194/jsss-8-305-2019
Regular research article
30 Oct 2019
Regular research article | 30 Oct 2019

Three-dimensional structural comparison of tantalum glancing angle deposition thin films by FIB-SEM

Tobias Ott et al.

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Short summary
Thin tantalum films generated by glancing angle deposition serve as functional optical layers. Serial sectioning by a focused ion beam combined with scanning electron microscopy of the slices generates stacks of highly resolved images of this film. Dedicated image processing reconstructs the spatial structure such that 3-D image analysis yields geometric information that can be related to the optical performance.