Articles | Volume 8, issue 2
https://doi.org/10.5194/jsss-8-305-2019
https://doi.org/10.5194/jsss-8-305-2019
Regular research article
 | 
30 Oct 2019
Regular research article |  | 30 Oct 2019

Three-dimensional structural comparison of tantalum glancing angle deposition thin films by FIB-SEM

Tobias Ott, Diego Roldán, Claudia Redenbach, Katja Schladitz, Michael Godehardt, and Sören Höhn

Viewed

Total article views: 2,054 (including HTML, PDF, and XML)
HTML PDF XML Total BibTeX EndNote
1,574 405 75 2,054 83 71
  • HTML: 1,574
  • PDF: 405
  • XML: 75
  • Total: 2,054
  • BibTeX: 83
  • EndNote: 71
Views and downloads (calculated since 30 Oct 2019)
Cumulative views and downloads (calculated since 30 Oct 2019)

Viewed (geographical distribution)

Total article views: 1,794 (including HTML, PDF, and XML) Thereof 1,697 with geography defined and 97 with unknown origin.
Country # Views %
  • 1
1
 
 
 
 

Cited

Latest update: 23 Nov 2024
Download
Short summary
Thin tantalum films generated by glancing angle deposition serve as functional optical layers. Serial sectioning by a focused ion beam combined with scanning electron microscopy of the slices generates stacks of highly resolved images of this film. Dedicated image processing reconstructs the spatial structure such that 3-D image analysis yields geometric information that can be related to the optical performance.