Articles | Volume 8, issue 2
J. Sens. Sens. Syst., 8, 305–315, 2019
https://doi.org/10.5194/jsss-8-305-2019
J. Sens. Sens. Syst., 8, 305–315, 2019
https://doi.org/10.5194/jsss-8-305-2019

Regular research article 30 Oct 2019

Regular research article | 30 Oct 2019

Three-dimensional structural comparison of tantalum glancing angle deposition thin films by FIB-SEM

Tobias Ott et al.

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Cited articles

Albrecht, O., Zierold, R., Patzig, C., Bachmann, J., Sturm, C., Rheinländer, B., Grundmann, M., Görlitz, D., Rauschenbach, B., and Nielsch, K.: Tubular magnetic nanostructures based on glancing angle deposited templates and atomic layer deposition, Phys. Status Solidi, 247, 1365–1371, https://doi.org/10.1002/pssb.200945560, 2010. a
Alouach, H. and Fujiwara, H. M. G. J.: Magnetocrystalline anisotropy in glancing angle deposited Permalloy nanowire arrays, J. Vac. Sci. Technol. A, 23, 1046, https://doi.org/10.1116/1.1938978, 2005. a
Bassim, N., de Gregorio, B., Kilcoyne, A., Scott, K., Chou, T., Wirick, S., Cody, G., and Stroud, R.: Minimizing damage during FIB sample preparation of soft materials, J. Microsc., 245, 288–301, https://doi.org/10.1111/j.1365-2818.2011.03570.x, 2012. a
Beckers, N., Taschuk, M., and Brett, M.: Selective room temperature nanostructured thin film alcohol sensor as a virtual sensor array, Sensor. Actuat. B-Chem., 176, 1096–1102, https://doi.org/10.1016/j.snb.2012.09.041, 2013. a
Blevin, W. R. and Geist, J.: Influence of Black Coatings on Pyroelectric Detectors, Appl. Optics, 13, 1171, https://doi.org/10.1364/ao.13.001171, 1974. a
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Short summary
Thin tantalum films generated by glancing angle deposition serve as functional optical layers. Serial sectioning by a focused ion beam combined with scanning electron microscopy of the slices generates stacks of highly resolved images of this film. Dedicated image processing reconstructs the spatial structure such that 3-D image analysis yields geometric information that can be related to the optical performance.