Articles | Volume 6, issue 2
https://doi.org/10.5194/jsss-6-367-2017
© Author(s) 2017. This work is distributed under the Creative Commons Attribution 3.0 License.
Special issue:
Regular research article
| 
16 Nov 2017
Regular research article |
| 16 Nov 2017
Concept for a MEMS-type vacuum sensor based on electrical conductivity measurements
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