Articles | Volume 10, issue 1
Regular research article
25 Mar 2021
Regular research article |  | 25 Mar 2021

Ceramic multilayer technology as a platform for miniaturized sensor arrays for water analysis

Claudia Feller and Uwe Partsch

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Cited articles

Amor, H. E., Kouki, A. B., Marsh, P., Kim, K. T., and Cao, H.: Development of a novel miniaturized LTCC-based wireless pH sensing system, in: SENSORS, 2016 IEEE, 30 October–2 November, Orlando, USA, 1–3, 2016. 
Baker, C. and Trachtenberg, I.: Ion Selective Electrochemical Sensors – Fe3+, Cu2+, J. Electrochem. Soc., 118, 571–576, 1971. 
Banna, M. H., Najjarana, H., Sadiq, R., Imran, S. A., Rodriguezc, M. J., and Hoorfar, M.: Miniaturized water quality monitoring pH and conductivity sensors, Sensor. Actuat. B-Chem., 193, 434–441,, 2014. 
Enseleit, U., Berthold, M., Feller, C., Partsch, U., Körner, S., and Vonau, W.: Chalcogenide Glass Based Heavy Metal Sensors, Sensors & Transducers, 219, 1–8, 2018. 
Goldberg, H. D., Brown, R. B., Liu, D. P., and Meyerhoff, M. E.: Screen printing: a technology for the batch fabrication of integrated chemical-sensor arrays, Sensor. Actuat. B-Chem., 21, 171–183, 1994. 
Short summary
Ion-selective electrodes have been proven useful in water analysis. They are usually used as single-rod measuring chains in different designs, which are manufactured using precision mechanical manufacturing and assembling technologies. The paper describes a microsystem technology approach for the fabrication of miniaturized electrochemical sensors. Design, manufacture, and performance of the novel ceramic multilayer-based sensor array are presented in the paper using various examples.