Articles | Volume 12, issue 1
https://doi.org/10.5194/jsss-12-9-2023
© Author(s) 2023. This work is distributed under
the Creative Commons Attribution 4.0 License.
the Creative Commons Attribution 4.0 License.
Special issue:
https://doi.org/10.5194/jsss-12-9-2023
© Author(s) 2023. This work is distributed under
the Creative Commons Attribution 4.0 License.
the Creative Commons Attribution 4.0 License.
Miniaturized differential scanning calorimeter with an integrated mass sensing system: first steps
Johanna Distler
Department of Functional Materials, University of Bayreuth,
95440 Bayreuth, Germany
Thomas Wöhrl
Department of Functional Materials, University of Bayreuth,
95440 Bayreuth, Germany
Robin Werner
Department of Functional Materials, University of Bayreuth,
95440 Bayreuth, Germany
Michael Gerlach
Linseis Thermal Analysis, 95100 Selb, Germany
Michael Gollner
Linseis Thermal Analysis, 95100 Selb, Germany
Florian Linseis
Linseis Thermal Analysis, 95100 Selb, Germany
Jaroslaw Kita
Department of Functional Materials, University of Bayreuth,
95440 Bayreuth, Germany
Ralf Moos
CORRESPONDING AUTHOR
Department of Functional Materials, University of Bayreuth,
95440 Bayreuth, Germany
Related authors
No articles found.
Thomas Wöhrl, Julia Herrmann, Jaroslaw Kita, Ralf Moos, and Gunter Hagen
J. Sens. Sens. Syst., 12, 205–214, https://doi.org/10.5194/jsss-12-205-2023, https://doi.org/10.5194/jsss-12-205-2023, 2023
Short summary
Short summary
Sensors for detecting various gases, such as nitrogen oxides, play a major role in times of climate change in protecting the environment from the possible toxic influences of such gases. Due to their usually complex design, gas sensors may react to changes in the operating temperature, which can occur due to different ambient influences. This article shows two methods for accurately measuring the temperature on the surface of a sensor under realistic conditions.
Robin Werner, Jaroslaw Kita, Michael Gollner, Florian Linseis, and Ralf Moos
J. Sens. Sens. Syst., 12, 69–84, https://doi.org/10.5194/jsss-12-69-2023, https://doi.org/10.5194/jsss-12-69-2023, 2023
Short summary
Short summary
A high-temperature gauge to simultaneously determine electrical conductivity, the Hall constant, and the Seebeck coefficient was developed. Screen-printed heating structures on a ceramic sample holder generate temperatures up to 800 °C. Heating structures were designed using FEM simulations. The temperature distribution was validated by thermal imaging. Measurements on constantan (reference material) and boron-doped silicon wafer confirm the functionality of the gauge up to 800 °C.
Robin Werner, Jaroslaw Kita, Michael Gollner, Florian Linseis, and Ralf Moos
J. Sens. Sens. Syst., 10, 71–81, https://doi.org/10.5194/jsss-10-71-2021, https://doi.org/10.5194/jsss-10-71-2021, 2021
Short summary
Short summary
A novel, low-cost measurement device for simultaneous high temperature measurements of the electrical conductivity and Hall coefficient has been developed. Simulations were used to design a suitable screen-printed planar platinum heating structure that generates temperatures of up to 600 °C. Simulations of the temperature distribution have been validated using thermal imaging. Measurements were compared with data from the literature to validate the functionality of the novel device.
Anastasiya Ruchets, Nils Donker, Jens Zosel, Daniela Schönauer-Kamin, Ralf Moos, Ulrich Guth, and Michael Mertig
J. Sens. Sens. Syst., 9, 355–362, https://doi.org/10.5194/jsss-9-355-2020, https://doi.org/10.5194/jsss-9-355-2020, 2020
Short summary
Short summary
A commercial solid electrolyte gas sensor of the type "Pt|YSZ|Pt, air" based on yttria-stabilized zirconia for colorimetric oxygen detection was operated in optimized dynamic electrochemical modes. Cyclic voltammetry and square-wave voltammetry were used for the detection of NO and O2 in N2 in the temperature range between 550 and 750 °C. Due to the differences of electrode kinetics of the single components it is possible to detect these redox active gases selectively and quasi-simultaneously.
Julia Herrmann, Gunter Hagen, Jaroslaw Kita, Frank Noack, Dirk Bleicker, and Ralf Moos
J. Sens. Sens. Syst., 9, 327–335, https://doi.org/10.5194/jsss-9-327-2020, https://doi.org/10.5194/jsss-9-327-2020, 2020
Short summary
Short summary
In this contribution, an inexpensive and robust impedimetric NOx sensor is presented. The impedance of a functional thick film depends selectively on the NOx concentration in the exhaust but shows a dependency on the oxygen concentration. Therefore, an additional temperature-independent resistive oxygen sensor structure was integrated on the same sensor platform. It serves not only to determine the oxygen concentration in the exhaust, but also to correct the oxygen dependency of the NOx sensor.
Nils Donker, Anastasiya Ruchets, Daniela Schönauer-Kamin, Jens Zosel, Ulrich Guth, and Ralf Moos
J. Sens. Sens. Syst., 9, 293–300, https://doi.org/10.5194/jsss-9-293-2020, https://doi.org/10.5194/jsss-9-293-2020, 2020
Short summary
Short summary
Symmetrical Pt | YSZ | Pt–NO gas sensors were produced with frit-containing and fritless Pt electrodes and fired between 950 and 1300 °C. The sensors were operated by pulsed polarization. With fritless pastes, the sensors responded significantly higher. The firing temperature affects the sensitivity only slightly. The low NO sensitivity of the frit-containing electrodes was attributed to a blocking effect at the triple-phase boundaries that inhibits the oxygen transport through the sensor.
Stefanie Walter, Andreas Bogner, Gunter Hagen, and Ralf Moos
J. Sens. Sens. Syst., 8, 49–56, https://doi.org/10.5194/jsss-8-49-2019, https://doi.org/10.5194/jsss-8-49-2019, 2019
Short summary
Short summary
A planar resonant radio-frequency gas sensor was equipped with an integrated heater. By simulative geometry optimization it now can be operated up to 700 °C. Sensitive materials with gas-dependent dielectric properties at higher temperatures can now be used. By coating the sensor with zeolite, ammonia could be detected. Depending on the working temperature, the sensor returns either a dosimeter signal (low temperatures) or a gas-concentration-dependent radio-frequency signal (high temperatures).
Murat Bektas, Thomas Stöcker, Angelika Mergner, Gunter Hagen, and Ralf Moos
J. Sens. Sens. Syst., 7, 289–297, https://doi.org/10.5194/jsss-7-289-2018, https://doi.org/10.5194/jsss-7-289-2018, 2018
Short summary
Short summary
We prepared BaFe(1-x)-0.01Al0.01TaxO3-δ (BFATx) thick films with x between 0.1 and 0.4 at room temperature using the aerosol deposition method and we measured Seebeck coefficients and conductivities between 600 and 800 °C at different oxygen concentrations. Deposited on a transducer that includes a heater, equipotential layers, and electrode structures, a dual thermoelectric–resistive oxygen sensor with almost temperature-independent characteristics of both measurands was realized using BFAT30.
Gunter Hagen, Antonia Harsch, and Ralf Moos
J. Sens. Sens. Syst., 7, 79–84, https://doi.org/10.5194/jsss-7-79-2018, https://doi.org/10.5194/jsss-7-79-2018, 2018
Short summary
Short summary
Monitoring hydrocarbon concentrations in automotive exhausts is affected by flow rate changes. The signal of thermoelectric gas sensors is a thermovoltage. Its origin is a temperature difference that depends on the flow rate. To avoid this noise effect, the sensor can be installed in a defined bypass position. As shown by simulation and experiments, the gas flow around the sensor is almost turbulence-free and the signal only depends on the hydrocarbon concentration and not on the flow rate.
Thomas Ritter, Sven Wiegärtner, Gunter Hagen, and Ralf Moos
J. Sens. Sens. Syst., 6, 395–405, https://doi.org/10.5194/jsss-6-395-2017, https://doi.org/10.5194/jsss-6-395-2017, 2017
Short summary
Short summary
A planar thermoelectric gas sensor is modeled. By coupling all influences (fluid flow, gas diffusion, heat transfer, chemical reactions, and electrical properties) a model was set up that mirrors the sensor behavior precisely, as the comparison with experimental data shows. The coupling of 3-D and 1-D geometry enables to calculate the temperature distribution, fluid flow, and the gas concentration distribution in the 3-D model, while the chemical reactions are very accurately calculated in 1-D.
Franz Schubert, Michael Gollner, Jaroslaw Kita, Florian Linseis, and Ralf Moos
J. Sens. Sens. Syst., 5, 381–388, https://doi.org/10.5194/jsss-5-381-2016, https://doi.org/10.5194/jsss-5-381-2016, 2016
Short summary
Short summary
An FEM model is used to improve the sensor design of a Tian–Calvet calorimeter. By modifying the basic part of the sensor (a sensor disc based on low temperature co-fired ceramics), the sensitivity was increased by a factor of 3. The model was validated and the sensors were calibrated. Indium and tin samples were measured. The melting temperatures show a deviation of 0.2 K while the enthalpy was measured with a precision better than 1 %. The values for tin deviate by less than 2 % from literature.
Franz Schubert, Michael Gollner, Jaroslaw Kita, Florian Linseis, and Ralf Moos
J. Sens. Sens. Syst., 5, 205–212, https://doi.org/10.5194/jsss-5-205-2016, https://doi.org/10.5194/jsss-5-205-2016, 2016
Short summary
Short summary
Initial steps to apply a new ceramic multi-layer sensor for a Tian–Calvet calorimeter are shown. The FEM-developed sensor consists of stacked ceramic discs and insulation rings. The functionality of the sensor disc was proven up to 600 °C and the entire stack was tested at room temperature. The resolution was 5 µW and the sensitivity was 8.5 µV mW−1. The new sensor shows similar specifications as commercial devices and presents a good starting point for future high temperature applications.
F. Schubert, S. Wollenhaupt, J. Kita, G. Hagen, and R. Moos
J. Sens. Sens. Syst., 5, 25–32, https://doi.org/10.5194/jsss-5-25-2016, https://doi.org/10.5194/jsss-5-25-2016, 2016
Short summary
Short summary
A manufacturing process for a planar binary lambda sensor is shown. By joining the heating and the sensing components via glass soldering with a joining temperature of 850 °C, a laboratory platform has been established that allows the manufacturing of two independent parts in HTCC technology with electrodes that are post-processed at lower temperatures, as is required for mixed-potential sensors. The concept has been proved by comparing the device with a commercial sensor.
S. Fischer, D. Schönauer-Kamin, R. Pohle, M. Fleischer, and R. Moos
J. Sens. Sens. Syst., 4, 321–329, https://doi.org/10.5194/jsss-4-321-2015, https://doi.org/10.5194/jsss-4-321-2015, 2015
Short summary
Short summary
Thimble-type lambda probes that are known for their robustness in harsh exhausts can also be used as an NOx sensor by applying the pulsed polarization technique. This study evaluates in detail the influence of temperature on the NO sensitivity, so that an optimum operating point can be derived. Stepwise NO concentration changes between 0 and 12.5 ppm in synthetic exhausts demonstrate the high potential of this concept.
M. Dietrich, D. Rauch, U. Simon, A. Porch, and R. Moos
J. Sens. Sens. Syst., 4, 263–269, https://doi.org/10.5194/jsss-4-263-2015, https://doi.org/10.5194/jsss-4-263-2015, 2015
Short summary
Short summary
The effect of stored ammonia on the complex dielectric permittivity of H-ZSM-5 zeolites with varying storage site density was observed between 200 and 300 °C under reaction conditions by microwave cavity perturbation. Polarization and dielectric losses were differently affected. The sensitivity of the polarization to stored ammonia is almost independent, the sensitivity of the dielectric losses strongly dependent on the storage site density. The results can be explained by proton hopping.
P. Fremerey, A. Jess, and R. Moos
J. Sens. Sens. Syst., 4, 143–149, https://doi.org/10.5194/jsss-4-143-2015, https://doi.org/10.5194/jsss-4-143-2015, 2015
Short summary
Short summary
A concept to measure in situ sulfidation of silica pellet catalysts loaded with nickel is evaluated. During sulfidation between 100 and 400°C nickel sulfides form. The electrical impedance of the pellets was recorded in situ. At first, the particles are highly insulating but during sulfidation their conductivity increases by decades. Since nickel sulfides are less conductive than nickel, the strong conductivity increase may be due to conducting percolation paths that form during sulfidation.
M. Bektas, D. Hanft, D. Schönauer-Kamin, T. Stöcker, G. Hagen, and R. Moos
J. Sens. Sens. Syst., 3, 223–229, https://doi.org/10.5194/jsss-3-223-2014, https://doi.org/10.5194/jsss-3-223-2014, 2014
I. Marr, A. Groß, and R. Moos
J. Sens. Sens. Syst., 3, 29–46, https://doi.org/10.5194/jsss-3-29-2014, https://doi.org/10.5194/jsss-3-29-2014, 2014
P. Bartscherer and R. Moos
J. Sens. Sens. Syst., 2, 95–102, https://doi.org/10.5194/jsss-2-95-2013, https://doi.org/10.5194/jsss-2-95-2013, 2013
Related subject area
Sensor principles and phenomena: Thermal sensors
Thin quartz resonators as a detector element for thermal infrared sensors
New publication of the VDI/VDE guideline 3520 “Surface temperature measurement with contact thermometers” – contents and background of the development
Particularities of pyroelectric detectors in absolute measurements of chopped radiation shown for the example of a spectral responsivity calibration in the near- and mid-infrared spectral range at two primary radiometric standards
Monitor and control test room for investigating thermal performance of panels incorporating phase-change material
Novel thermocouples for automotive applications
Enhanced wavelength-selective absorber for thermal detectors based on metamaterials
A new low-cost hydrogen sensor build with a thermopile IR detector adapted to measure thermal conductivity
Novel microthermal sensor principle for determining the mixture ratio of binary fluid mixtures using Föppl vortices
Calibration of uncooled thermal infrared cameras
Effect of thermocouple time constant on sensing of temperature fluctuations in a fast reactor subassembly
Precise temperature calibration for laser heat treatment
Figures of merit of thermoelectric and bolometric thermal radiation sensors
Agnes Eydam, Christian Hoyer, Volkmar Norkus, Frank Ellinger, and Gerald Gerlach
J. Sens. Sens. Syst., 13, 227–236, https://doi.org/10.5194/jsss-13-227-2024, https://doi.org/10.5194/jsss-13-227-2024, 2024
Short summary
Short summary
The temperature dependence of the resonance frequency of quartz resonators can be used for thermal infrared sensors. The quartz chips must be very thin to obtain a good sensor signal. This work describes how to manufacture and package sensors with 5 µm thin chips. Different sensor layouts are ion beam etched; they influence the vibration of the resonators, which is shown by impedance measurements. The temperature coefficient of the resonance frequency is determined to be around 90 ppm K-1.
Silke Augustin and Marc Schalles
J. Sens. Sens. Syst., 12, 197–204, https://doi.org/10.5194/jsss-12-197-2023, https://doi.org/10.5194/jsss-12-197-2023, 2023
Short summary
Short summary
Temperature measurements are of great importance for the control of processes, for quality assurance, and for plant safety. It is not always possible to measure temperatures directly in the medium but on the surface of vessels and pipelines, etc. However, when determining the surface temperature with contact thermometers, a number of influencing variables, some of which are difficult to determine, affect accurate and reproducible temperature measurement. These are presented in the article.
Tobias Pohl, Peter Meindl, Jörg Hollandt, Uwe Johannsen, and Lutz Werner
J. Sens. Sens. Syst., 11, 61–73, https://doi.org/10.5194/jsss-11-61-2022, https://doi.org/10.5194/jsss-11-61-2022, 2022
Short summary
Short summary
The Physikalisch-Technische Bundesanstalt calibrated pyroelectric detectors at two independent primary radiometric standards regarding their spectral responsivity. The SI traceable measurements in the spectral range between 1.5 and 14 µm are consistent within the measurement uncertainty in the range of 1 % and 14 %. The importance of the correct read-out of lock-in amplifiers and the accurate consideration of the temporal shape of the chopped radiant flux behind the chopper wheel are shown.
Marwa Othmen, Radwen Bahri, Slaheddine Najar, and Ahmed Hannachi
J. Sens. Sens. Syst., 10, 281–288, https://doi.org/10.5194/jsss-10-281-2021, https://doi.org/10.5194/jsss-10-281-2021, 2021
Short summary
Short summary
A homemade experimental setup was developed using actuators and temperature sensors monitored by Arduino platforms to characterize thermal behaviors of composite panels containing phase-change materials (PCMs). The characterization is based on modeling steady-state thermal conduction and natural convection heat transfer. Temperature measurements allow for obtaining effective thermal conductivity, phase shift time, and energy storage capacity of composite panels incorporating PCMs.
Paul Gierth, Lars Rebenklau, Klaus Augsburg, Eric Bachmann, and Lars Niedermeyer
J. Sens. Sens. Syst., 7, 43–49, https://doi.org/10.5194/jsss-7-43-2018, https://doi.org/10.5194/jsss-7-43-2018, 2018
Short summary
Short summary
Temperature measurement in engine and exhaust systems is necessary for thermal protection of parts and optimizing the combustion process. The basic idea of this novel sensor concept is to use thick-film technology on component surfaces. Different standardized and especially nonstandard material combinations have been produced for validation of this concept. Application-oriented measurements took place in the exhaust system of a test vehicle and were compared to standard laboratory conditions.
Astrit Shoshi, Thomas Maier, and Hubert Brueckl
J. Sens. Sens. Syst., 5, 171–178, https://doi.org/10.5194/jsss-5-171-2016, https://doi.org/10.5194/jsss-5-171-2016, 2016
Short summary
Short summary
Metamaterials are artificial composite structures with unusual physical properties such as the perfect absorption of light, which can be exploited to improve the spectral sensitivity and selectivity of thermal detectors. The desired detector characteristics are engineered by tuning the absorption properties of metamaterials. The numerical simulations demonstrate polarization-independent absorption of disc-shaped dielectric/metallic absorbers and their integration capability in thermal detectors.
M. Liess
J. Sens. Sens. Syst., 4, 281–288, https://doi.org/10.5194/jsss-4-281-2015, https://doi.org/10.5194/jsss-4-281-2015, 2015
Short summary
Short summary
Hydrogen detection for purposes such as smart gas metering or fuel cell safety can be done by using a low-cost off-the-shelf thermopile IR radiation sensor and by driving it as a TCD (thermal conductivity detector). The MEMS thermopile sensor element is exposed to the measured gas environment. By applying an AC heating voltage to the thermopile structure and by measuring its DC output voltage, the hydrogen concentration of its gas environment can be measured with a resolution of up to 3.7ppm.
B. Schmitt, C. Kiefer, and A. Schütze
J. Sens. Sens. Syst., 4, 239–247, https://doi.org/10.5194/jsss-4-239-2015, https://doi.org/10.5194/jsss-4-239-2015, 2015
Short summary
Short summary
A novel sensor principle for determining binary fluid mixtures of known components is presented. A bluff body is placed in the fluid channel, causing the formation of a stationary pair of vortices behind the body. The length of the vortex pair depends on the mixture’s viscosity and thus its composition. It is measured by placing a microheater in the vortex area and making use of forced convection which changes with the size of the vortices.
H. Budzier and G. Gerlach
J. Sens. Sens. Syst., 4, 187–197, https://doi.org/10.5194/jsss-4-187-2015, https://doi.org/10.5194/jsss-4-187-2015, 2015
P. Sharma, N. Murali, and T. Jayakumar
J. Sens. Sens. Syst., 3, 55–60, https://doi.org/10.5194/jsss-3-55-2014, https://doi.org/10.5194/jsss-3-55-2014, 2014
M. Seifert, K. Anhalt, C. Baltruschat, S. Bonss, and B. Brenner
J. Sens. Sens. Syst., 3, 47–54, https://doi.org/10.5194/jsss-3-47-2014, https://doi.org/10.5194/jsss-3-47-2014, 2014
U. Dillner, E. Kessler, and H.-G. Meyer
J. Sens. Sens. Syst., 2, 85–94, https://doi.org/10.5194/jsss-2-85-2013, https://doi.org/10.5194/jsss-2-85-2013, 2013
Cited articles
Alvarez, M. and Lechuga, L. M.: Microcantilever-based platforms as biosensing
tools, Analyst, 135, 827–836, https://doi.org/10.1039/b908503n, 2010.
Arntz, Y., Seelig, J. D., Lang, H. P., Zhang, J., Hunziker, P., Ramseyer,
J. P., Meyer, E., Hegner, M., and Gerber, C.: Label-free protein assay based
on a nanomechanical cantilever array, Nanotechnology, 14, 86–90,
https://doi.org/10.1088/0957-4484/14/1/319, 2003.
Basu, A. K., Basu, A., and Bhattacharya, S.: Micro/Nano fabricated cantilever
based biosensor platform: A review and recent progress, Enzyme Microb.
Tech., 139, 109558, https://doi.org/10.1016/j.enzmictec.2020.109558, 2020.
Beaulieu, L. Y., Godin, M., Laroche, O., Tabard-Cossa, V., and Grutter, P.: A
complete analysis of the laser beam deflection system used in
cantilever-based systems, Ultramicroscopy, 107, 422–430, https://doi.org/10.1016/j.ultramic.2006.11.001, 2007.
Bernstein, H.: Elektroakustik – Mikrofone, Klangstufen, Verstärker,
Filterschaltungen und Lautsprecher, 2nd ed., Springer, Wiesbaden, Germany,
33 pp., 197, https://doi.org/10.1007/978-3-658-25174-1, 2019.
Brandenburg, A., Wappler, E., Kita, J., and Moos R.: Miniaturized ceramic DSC
device with strain gauge-based mass detection – First steps to realize a
fully integrated DSC/TGA device, Sensor. Actuat. A-Phys., 241, 145–151,
https://doi.org/10.1016/j.sna.2016.02.011, 2016.
DuPont: DuPont™ Green Tape™ – Design and Layout Guidelines, https://studylib.net/doc/18479645/dupontTM-greentapeTM-design-and-layout-guidelines (last access: 11 January 2023),
2009.
Fernando, S. and Austin, M. W.: Extending the deflection measurement range of
interferometric microcantilever arrays, J. Microelectromech. S., 18,
480–487, https://doi.org/10.1109/JMEMS.2009.2013399, 2009.
Gross, D., Hauger, W., Schröder, J., and Wall, W. A.: Technische Mechanik
2 – Elektrostatik, 12th ed., Springer, Berlin, Heidelberg, Germany, 93 pp.,
https://doi.org/10.1007/978-3-642-40966-0, 2014.
Höhne, G. W. H., Hemminger, W. F., and Flammersheim, H.-J.: Differential
Scanning Calorimetry, 2nd ed., 5 pp., Springer, Berlin, Heidelberg, Germany, https://doi.org/10.1007/978-3-662-06710-9, 2003.
Jäger, H., Mastel, R., and Knaebel, M.: Technische Schwingungslehre, 8th
ed., Springer, Wiesbaden, Germany, pp. 45–47, 88–89, 144, 231–232, https://doi.org/10.1007/978-3-8348-2099-0, 2013.
Jia, H., Xu, P., and Li, X.: Integrated resonant micro/nano gravimetric
sensor for bio/chemical detection in air and liquid, Micromachines-Basel,
12, 645, https://doi.org/10.3390/mi12060645, 2021.
Johnson, B. N. and Mutharasan, R.: Biosensing using dynamic-mode cantilever
sensors: A review, Biosensors and Bioelectronics, 32, 1–18, https://doi.org/10.1016/j.bios.2011.10.054, 2012.
Jurków, D., Maeder, T., Dąbrowski, A., Zarnik, M. S., Belavič,
D., Bartsch, H., and Müller, J.: Overview on low temperature co-fired
ceramic sensors, Sensor. Actuat. A-Phys., 233, 125–146, https://doi.org/10.1016/j.sna.2015.05.023, 2015.
Kadirsoy, S., Atar, N., and Yola, M. L.: Molecularly imprinted QCM sensor
based on delaminated MXene for chlorpyrifos detection and QCM sensor
validation, New J. Chem., 44, 6524–6532, https://doi.org/10.1039/d0nj00951b, 2020.
Keil, S.: Dehnungsmessstreifen, 2nd ed., Springer, Wiesbaden, Germany,
13–150 pp., https://doi.org/10.1007/978-3-658-13612-3, 2017.
Kita, J. and Moos, R.: Development of LTCC-Materials and their Applications
– an Overview, Inform MIDEM, 38, 219–224, 2008.
Kita, J., Missal, W., Wappler, E., Bechtold, F., and Moos, R.: Development of
a Miniaturized Ceramic Differential Calorimeter Device in LTCC Technology,
J. Ceram. Sci. Technol., 4, 137–144, https://doi.org/10.4416/JCST2013-00008, 2013.
Lavrik, N. V., Sepaniak, M. J., and Datskos, P. G.: Cantilever transducers as a
platform for chemical and biological sensors, Rev. Sci. Instrum., 75,
2229–2253, https://doi.org/10.1063/1.1763252, 2004.
Li, X. and Lee, D.-W.: Integrated microcantilevers for high-resolution
sensing and probing, Meas. Sci. Technol., 23, 022001, https://doi.org/10.1088/0957-0233/23/2/022001, 2012.
Li, X., Ma, D., Zheng, S.-R., Fan, J., Wang, T., Dai, Z., Zou, X.-Y., Teng,
S.-H., and Zhang, W.-G.: Assembly of a miRNA-modified QCM sensor for miRNA
recognition through response patterns, J. Mol. Recognit., 32, e2772, https://doi.org/10.1002/jmr.2772, 2019.
Lindholm, L. E. and Petersson, G.: Position sensitive photodetectors with
high linearity, 1976 International Electron Devices Meeting, Washington, DC, USA, 6–8 December
1976, 408–411, https://doi.org/10.1109/IEDM.1976.189069, 1976.
Liu, X., Zhang, D., Wang, D., Li, T., Song, X., and Kang, Z.: A humidity
sensing and respiratory monitoring system constructed from quartz crystal
microbalance sensors based on a chitosan/polypyrrole composite film, J.
Mater. Chem. A, 9, 14524–14533, https://doi.org/10.1039/d1ta02828f, 2021.
Makarovič, K., Meden, A., Hrovat, M., Holc, J., Benčan, A.,
Dakskobler, A., and Kosec, M.: The Effect of Processing Conditions on the
Properties of LTCC Material, J. Am. Ceram. Soc., 95, 760–767, https://doi.org/10.1111/j.1551-2916.2011.05027.x, 2012.
Missal, W., Kita, J., Wappler, E., Gora, F., Kipka, A., Bartnitzek, T.,
Bechtold, F., Schabbel, D., Pawlowski, B., and Moos, R.: Miniaturized Ceramic
Differential Scanning Calorimeter with Integrated Oven and Crucible in LTCC
Technology, Sensor. Actuat. A-Phys., 172, 21–26, https://doi.org/10.1016/j.sna.2011.01.025, 2011.
Missal, W., Kita, J., Wappler, E., Bechtold, F., and Moos R.: Calorimetric
Sensitivity and Thermal Resolution of a Novel Miniaturized Ceramic DSC Chip
in LTCC Technology, Thermochim. Acta, 543, 142–149, https://doi.org/10.1016/j.tca.2012.05.019, 2012.
Möser, M.: Technische Akustik, 10th ed., Springer, Berlin, Heidelberg,
Germany, 129 pp., https://doi.org/10.1007/978-3-662-47704-5, 2015.
Papula, L.: Mathematik für Ingenieure und Naturwissenschaftler – Band 2,
13th ed., Vieweg+Teubner, Wiesbaden, Germany, 443 pp., https://doi.org/10.1007/978-3-8348-8643-9_1, 2012.
Pei, J., Tian, F., and Thundat, T.: Glucose biosensor based on the
microcantilever, Anal. Chem., 76, 292–297, https://doi.org/10.1021/ac035048k, 2004.
Sauerbrey, G.: Verwendung von Schwingquarzen zur Wägung dünner
Schichten und zur Mikrowägung, Z. Phys., 155, 206–222, https://doi.org/10.1007/BF01337937, 1959.
Setiono, A., Nyang'au, W. O., Fahrbach, M., Xu, J., Bertke, M., Wasisto, H. S.,
and Peiner, E.: Improvement of frequency responses of an in-plane
electro-thermal cantilever sensor for real-time measurement, J. Micromech.
Microeng., 29, 124006, https://doi.org/10.1088/1361-6439/ab4e29, 2019.
Xu, F., Wei, Y., Bian, S., Wang, H., Chen, D., and Kong, D.: Simulation-based
design and optimization of rectangular micro-cantilever-based aerosols mass
sensor, Sensors-Basel, 20, 626, https://doi.org/10.3390/s20030626, 2020.
Ziegler, C.: Cantilever-based biosensors, Anal. Bioanal. Chem., 379,
946–959, https://doi.org/10.1007/s00216-004-2694-y, 2004.
Short summary
Differential scanning calorimetry (DSC) is a widely used tool to analyze thermal material properties. This study focuses on the advancement of a miniaturized DSC chip as an alternative to conventional devices. The first development steps for the integration of a weighing system are shown, starting with model considerations and simulation-based optimization to initial measurements. Three different measurement methods are investigated and show promising results.
Differential scanning calorimetry (DSC) is a widely used tool to analyze thermal material...
Special issue