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JSSS | Articles | Volume 9, issue 2
J. Sens. Sens. Syst., 9, 391–399, 2020
https://doi.org/10.5194/jsss-9-391-2020
© Author(s) 2020. This work is distributed under
the Creative Commons Attribution 4.0 License.
J. Sens. Sens. Syst., 9, 391–399, 2020
https://doi.org/10.5194/jsss-9-391-2020
© Author(s) 2020. This work is distributed under
the Creative Commons Attribution 4.0 License.

Regular research article 13 Nov 2020

Regular research article | 13 Nov 2020

Traceably calibrated scanning Hall probe microscopy at room temperature

Manuela Gerken et al.

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Cited articles

Chenaud, B., Segovia-Mera, A., Delgard, A., Feltin, N., Hoffmann, A., Pascal, F., Zawadzki, W., Mailly, D., and Chaubet, C.: Sensitivity and noise of micro-Hall magnetic sensors based on InGaAs quantum wells, J. Appl. Phys., 119, 024501, https://doi.org/10.1063/1.4939288, 2016. 
Ciuk, T., Stanczyk, B., Przyborowska, K., Czolak, D., Dobrowolski, A., Jagiello, J., Kaszub, W., Kozubal, M., Kozlowski, R., and Kaminski, P.: High-Temperature Hall Effect Sensor Based on Epitaxial Graphene on High-Purity Semiinsulating 4H-SiC, IEEE Trans. Electron. Devices, 66, 3134–3138, https://doi.org/10.1109/TED.2019.2915632, 2019. 
Corte-León, H., Neu, V., Manzin, A., Barton, C., Tang, Y., Gerken, M., Klapetek, P., Schumacher, H. W., and Kazakova, O.: Comparison and Validation of Different Magnetic Force Microscopy Calibration Schemes, Small, 1906144, https://doi.org/10.1002/smll.201906144, 2020. 
Costa, M., Gaspar, J., Ferreira, R., Paz, E., Fonseca, H., Martins, M., Cardoso, S., and Freitas, P. P.: Integration of Magnetoresistive Sensors With Atomic Force Microscopy Cantilevers for Scanning Magnetoresistance Microscopy Applications, IEEE Trans. Magn., 51, 1–4, https://doi.org/10.1109/TMAG.2015.2448612, 2015. 
Dauber, J., Sagade, A. A., Oellers, M., Watanabe, K., Taniguchi, T., Neumaier, D., and Stampfer, C.: Ultra-sensitive Hall sensors based on graphene encapsulated in hexagonal boron nitride, Appl. Phys. Lett., 106, 193501, https://doi.org/10.1063/1.4919897, 2015. 

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Short summary
Traceably calibrated scanning Hall microscopy (SHM) is a versatile tool for the quantitative characterization of magnetic microstructures. To enable SHM with a resolution in the micrometer range under ambient conditions, two Hall sensor materials, gold and graphene, were investigated. A SHM setup utilizing a 5 μm gold Hall sensor was calibrated. The field sensitivity and the detailed uncertainty budget are discussed. The presented traceable calibration is validated by comparison to simulations.
Traceably calibrated scanning Hall microscopy (SHM) is a versatile tool for the quantitative...
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