Articles | Volume 9, issue 2
https://doi.org/10.5194/jsss-9-391-2020
https://doi.org/10.5194/jsss-9-391-2020
Regular research article
 | 
13 Nov 2020
Regular research article |  | 13 Nov 2020

Traceably calibrated scanning Hall probe microscopy at room temperature

Manuela Gerken, Aurélie Solignac, Davood Momeni Pakdehi, Alessandra Manzin, Thomas Weimann, Klaus Pierz, Sibylle Sievers, and Hans Werner Schumacher

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Cited articles

Chenaud, B., Segovia-Mera, A., Delgard, A., Feltin, N., Hoffmann, A., Pascal, F., Zawadzki, W., Mailly, D., and Chaubet, C.: Sensitivity and noise of micro-Hall magnetic sensors based on InGaAs quantum wells, J. Appl. Phys., 119, 024501, https://doi.org/10.1063/1.4939288, 2016. 
Ciuk, T., Stanczyk, B., Przyborowska, K., Czolak, D., Dobrowolski, A., Jagiello, J., Kaszub, W., Kozubal, M., Kozlowski, R., and Kaminski, P.: High-Temperature Hall Effect Sensor Based on Epitaxial Graphene on High-Purity Semiinsulating 4H-SiC, IEEE Trans. Electron. Devices, 66, 3134–3138, https://doi.org/10.1109/TED.2019.2915632, 2019. 
Corte-León, H., Neu, V., Manzin, A., Barton, C., Tang, Y., Gerken, M., Klapetek, P., Schumacher, H. W., and Kazakova, O.: Comparison and Validation of Different Magnetic Force Microscopy Calibration Schemes, Small, 1906144, https://doi.org/10.1002/smll.201906144, 2020. 
Costa, M., Gaspar, J., Ferreira, R., Paz, E., Fonseca, H., Martins, M., Cardoso, S., and Freitas, P. P.: Integration of Magnetoresistive Sensors With Atomic Force Microscopy Cantilevers for Scanning Magnetoresistance Microscopy Applications, IEEE Trans. Magn., 51, 1–4, https://doi.org/10.1109/TMAG.2015.2448612, 2015. 
Dauber, J., Sagade, A. A., Oellers, M., Watanabe, K., Taniguchi, T., Neumaier, D., and Stampfer, C.: Ultra-sensitive Hall sensors based on graphene encapsulated in hexagonal boron nitride, Appl. Phys. Lett., 106, 193501, https://doi.org/10.1063/1.4919897, 2015. 
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Short summary
Traceably calibrated scanning Hall microscopy (SHM) is a versatile tool for the quantitative characterization of magnetic microstructures. To enable SHM with a resolution in the micrometer range under ambient conditions, two Hall sensor materials, gold and graphene, were investigated. A SHM setup utilizing a 5 μm gold Hall sensor was calibrated. The field sensitivity and the detailed uncertainty budget are discussed. The presented traceable calibration is validated by comparison to simulations.