A non-contact, optical methodology suitable for high temperatures based on laser-Doppler vibrometry is presented to directly determine piezoelectric constants. LiTaO₃ is chosen as a model material as it is a representative piezoelectric material with applications in sensors and surface acoustic wave devices. The values determined range from 12 pm V^-1 at 21 °C to about 15 pm V^-1 at 400 °C, being in good agreement with the literature. Thus, the proof of concept for this approach has been obtained.

A very small, anharmonic but periodic signal is separated from a noise background that is orders of magnitude larger than the pure signal. The approach consists of a sequence of filters and transformations and is demonstrated on an interferometric measurement of the high-temperature chemical expansion of a thin film, containing heat haze, thermal length drift, and parasitic vibrations. The displacement is 38 % larger and the uncertainty 35 % lower than when evaluated with previous approaches.

High-temperature stable piezoelectric resonators are coated with oxide electrodes. The impact of the oxide electrode conductivity on the mass sensitivity and on the resonance frequency of the device is described by electrical and mechanical models, which are used to analyse the experimental data. Furthermore, the impact of an increasing oxide electrode conductivity is discussed with respect to the application of oxide electrodes and for gas sensing.

Temperature sensors based on piezoelectric devices enable precise measurement of temperature changes in harsh environments such as high temperatures or aggressive atmospheres. In the case of this device, the change in the temperature is detected by means of the changing resonance frequency of the sensor. Here a sensor device based on catangasite (an isomorph of quartz) is presented. We discuss its behavior at elevated temperatures and confirm that it can successfully operate up to 1030 °C.