Articles | Volume 3, issue 2
https://doi.org/10.5194/jsss-3-187-2014
© Author(s) 2014. This work is distributed under
the Creative Commons Attribution 3.0 License.
the Creative Commons Attribution 3.0 License.
https://doi.org/10.5194/jsss-3-187-2014
© Author(s) 2014. This work is distributed under
the Creative Commons Attribution 3.0 License.
the Creative Commons Attribution 3.0 License.
Equivalent circuit models of two-layer flexure beams with excitation by temperature, humidity, pressure, piezoelectric or piezomagnetic interactions
U. Marschner
Institute of Semiconductors and Microsystems, Technische Universität Dresden, 01062 Dresden, Germany
G. Gerlach
Institute of Solid-State Electronics, Technische Universität Dresden, 01062 Dresden, Germany
E. Starke
Institute of Lightweight Engineering and Polymer Technology, Technische Universität Dresden, 01062 Dresden, Germany
A. Lenk
Institute of Acoustics and Speech Communication, Technische Universität Dresden, 01062 Dresden, Germany
professor emeritus
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Agnes Eydam, Christian Hoyer, Volkmar Norkus, Frank Ellinger, and Gerald Gerlach
J. Sens. Sens. Syst., 13, 227–236, https://doi.org/10.5194/jsss-13-227-2024, https://doi.org/10.5194/jsss-13-227-2024, 2024
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The temperature dependence of the resonance frequency of quartz resonators can be used for thermal infrared sensors. The quartz chips must be very thin to obtain a good sensor signal. This work describes how to manufacture and package sensors with 5 µm thin chips. Different sensor layouts are ion beam etched; they influence the vibration of the resonators, which is shown by impedance measurements. The temperature coefficient of the resonance frequency is determined to be around 90 ppm K-1.
Stefan Schreiber, Nadja Steinke, and Gerald Gerlach
J. Sens. Sens. Syst., 12, 141–146, https://doi.org/10.5194/jsss-12-141-2023, https://doi.org/10.5194/jsss-12-141-2023, 2023
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We have managed to reduce the measuring time of previously common hydrogel-based sensors from a few minutes to a few seconds. For this, the arrangement of the hydrogel in the sensor was changed so that the volume of the hydrogel could be reduced. The biggest challenge, apart from generating a very thin pattern, was to firmly bond the hydrogel to a silicon surface. This was to ensure that the resulting forces of the bimorph effect can be absorbed.
Helmut Budzier and Gerald Gerlach
J. Sens. Sens. Syst., 10, 179–184, https://doi.org/10.5194/jsss-10-179-2021, https://doi.org/10.5194/jsss-10-179-2021, 2021
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In thermometry, the displayed temperature value of an object depends on the size of the object. This behaviour, the size-of-source effect, might be a major cause of measurement uncertainty in a thermoscene. The influence of diffraction and digitization can be described advantageously with the modulation transfer function. Especially with very small objects the displayed temperatures are too low. When imaging large objects, not only the edge areas are affected, but also the entire image.
Daniela Franke and Gerald Gerlach
J. Sens. Sens. Syst., 10, 93–100, https://doi.org/10.5194/jsss-10-93-2021, https://doi.org/10.5194/jsss-10-93-2021, 2021
Markus Stoehr, Gerald Gerlach, Thomas Härtling, and Stephan Schoenfelder
J. Sens. Sens. Syst., 9, 209–217, https://doi.org/10.5194/jsss-9-209-2020, https://doi.org/10.5194/jsss-9-209-2020, 2020
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Photoelasticity is considered a useful measurement tool for non-destructive and contactless determination of mechanical stresses or strains in the production of silicon wafers. In this work, a detailed derivation for the anisotropic stress-optic law is presented, and the corresponding stress-optical parameters are measured.
Tobias Ott and Gerald Gerlach
J. Sens. Sens. Syst., 9, 79–87, https://doi.org/10.5194/jsss-9-79-2020, https://doi.org/10.5194/jsss-9-79-2020, 2020
Nikolai Gulnizkij and Gerald Gerlach
J. Sens. Sens. Syst., 9, 1–6, https://doi.org/10.5194/jsss-9-1-2020, https://doi.org/10.5194/jsss-9-1-2020, 2020
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We describe a mechanical model based on the beam theory for the development of a beam-like sensor switch with switching hysteresis for humidity sensing. The hydrogel swelling provides the mechanical energy to deflect the partly hydrogel-covered bending beam via the bimorph effect. From the model, we calculate the deflection of a beam-like sensor switch with and without a switching hysteresis. A beam-like sensor switch was manufactured, and the switching hysteresis was successfully demonstrated.
Margarita Guenther, Falko Altenkirch, Kai Ostermann, Gerhard Rödel, Ingo Tobehn-Steinhäuser, Steffen Herbst, Stefan Görlandt, and Gerald Gerlach
J. Sens. Sens. Syst., 8, 215–222, https://doi.org/10.5194/jsss-8-215-2019, https://doi.org/10.5194/jsss-8-215-2019, 2019
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In this work, genetically modified cells of the yeast Saccharomyces cerevisiae BY4741 were confined in a four-chamber microfluidic cell, providing an optical monitoring of the cell behaviour and their supply with the nutrients. The measurements of the time-dependent fluorescence intensity were performed with different concentrations of the drug diclofenac, and the sensitivity of yeast cells to diclofenac was demonstrated. Cell viability was monitored by simultaneous impedance recording.
Jan Erfkamp, Margarita Guenther, and Gerald Gerlach
J. Sens. Sens. Syst., 7, 219–226, https://doi.org/10.5194/jsss-7-219-2018, https://doi.org/10.5194/jsss-7-219-2018, 2018
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We describe a low-cost sensor for the detection of ethanol in alcoholic beverages. The reversible swelling of alcohol-sensitive hydrogels depends on the ethanol concentration. The resulting swelling pressure was detected via piezoresistive sensors. We have tested the swelling properties of the hydrogel (e.g. swelling kinetics, selectivity to other alcohols). Furthermore, the first sensor set-ups were tested and the reversibility of the hydrogel-based piezoresistive sensor was demonstrated.
Christoph Kroh, Roland Wuchrer, Margarita Günther, Thomas Härtling, and Gerald Gerlach
J. Sens. Sens. Syst., 7, 51–55, https://doi.org/10.5194/jsss-7-51-2018, https://doi.org/10.5194/jsss-7-51-2018, 2018
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The inline monitoring of parameters in aqueous liquids is facing an increasing demand in many application areas. In this paper we report on an optical monitoring of the pH value in liquids by means of a sensitive hydrogel, which can be applied in the physiological range. Our results indicate a nearly linear dependency between pH value and hydrogel swelling. Furthermore, we show an improvement of the response time by a factor of 2 in comparison to other systems exploiting this kind of hydrogel.
Ulrike Schmidt, Carola Jorsch, Margarita Guenther, and Gerald Gerlach
J. Sens. Sens. Syst., 5, 409–417, https://doi.org/10.5194/jsss-5-409-2016, https://doi.org/10.5194/jsss-5-409-2016, 2016
Julia Körner, Christopher F. Reiche, Bernd Büchner, Thomas Mühl, and Gerald Gerlach
J. Sens. Sens. Syst., 5, 245–259, https://doi.org/10.5194/jsss-5-245-2016, https://doi.org/10.5194/jsss-5-245-2016, 2016
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The presented work gives insight into the behaviour of co-resonantly coupled oscillating cantilever beams by means of electro-mechanical analogies. An electric circuit model is analysed with various stages of complexity, and conclusions are drawn regarding the applicability of the co-resonant concept for sensors. Furthermore, this is validated by a comparison between the theoretical predictions and experimental data.
Marisa Rio, Sharanya Bola, Richard H. W. Funk, and Gerald Gerlach
J. Sens. Sens. Syst., 5, 237–243, https://doi.org/10.5194/jsss-5-237-2016, https://doi.org/10.5194/jsss-5-237-2016, 2016
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Endogeneous electric fields (EFs) affect a wide range of cellular functions such as migration, wound healing and regeneration. Similar results were observed when external EFs are applied. To date, the phenomenon of electrotaxis has been studied only in homogeneous EF environments. Here, we report on the construction and fabrication of a microfluidic biochip as well as first results for stimulation of cells with stationary, non-homogeneous EFs.
Carola Jorsch, Ulrike Schmidt, David Ulkoski, Carmen Scholz, Margarita Guenther, and Gerald Gerlach
J. Sens. Sens. Syst., 5, 229–235, https://doi.org/10.5194/jsss-5-229-2016, https://doi.org/10.5194/jsss-5-229-2016, 2016
Agnes Eydam, Gunnar Suchaneck, and Gerald Gerlach
J. Sens. Sens. Syst., 5, 165–170, https://doi.org/10.5194/jsss-5-165-2016, https://doi.org/10.5194/jsss-5-165-2016, 2016
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Piezoelectric devices are characterized non-destructively to ensure their functionality. The material is heated by laser diodes. The resulting temperature changes lead to a pyroelectric current. Analytical and numerical finite element models describe the temperature distribution and the current in frequency and time domain. Modelling and experimental results are compared for piezoelectric plates and integrated sensors and actuators.
M. Windisch, K.-J. Eichhorn, J. Lienig, G. Gerlach, and L. Schulze
J. Sens. Sens. Syst., 5, 39–53, https://doi.org/10.5194/jsss-5-39-2016, https://doi.org/10.5194/jsss-5-39-2016, 2016
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Hydrogels are swellable polymers, which exhibit superior sensor properties. However, the exploitation of these properties for innovative measurement technology has been prevented by the lack of a manufacturing technique for thin hydogel films that suits industrial needs. We suggest a paradigm change from the current recipe-driven sensor manufacturing to a specification-driven one. Our contributions are optimized processes for a controllable film formation and thermal curing of the hydrogels.
A. Tempelhahn, H. Budzier, V. Krause, and G. Gerlach
J. Sens. Sens. Syst., 5, 9–16, https://doi.org/10.5194/jsss-5-9-2016, https://doi.org/10.5194/jsss-5-9-2016, 2016
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Infrared cameras based on microbolometer focal plane arrays (FPAs) are the most widely used cameras in thermography. For acceptable measurement uncertainty values, the disturbing influences of changing ambient temperature have to be considered. We propose a TEC-less and shutter-less correction approach based on additional temperature measurements inside the IR camera. The effects on the pixel responsivity and offset voltage are considered separately.
T. Ott, M. Schossig, V. Norkus, and G. Gerlach
J. Sens. Sens. Syst., 4, 313–319, https://doi.org/10.5194/jsss-4-313-2015, https://doi.org/10.5194/jsss-4-313-2015, 2015
H. Budzier and G. Gerlach
J. Sens. Sens. Syst., 4, 187–197, https://doi.org/10.5194/jsss-4-187-2015, https://doi.org/10.5194/jsss-4-187-2015, 2015
Related subject area
Sensor technologies: Modeling and simulation
Concept, simulation, and fabrication of inverted grating structures for surface plasmon resonance sensors
Acceptance and reverification testing for industrial computed tomography – a simulative study on geometrical misalignments
Numerical analysis of an infrared gas sensor utilizing an indium-tin-oxide-based plasmonic slot waveguide
Determination of optimal crystallographic orientations for LiNbO3 and LiTaO3 bimorph actuators
Design study for a multicomponent transducer for wind turbine test benches
A two-port electrothermal model for suspended MEMS device structures with multiple inputs
SimOptDevice: a library for virtual optical experiments
Granular metal–carbon nanocomposites as piezoresistive sensor films – Part 2: Modeling longitudinal and transverse strain sensitivity
Accelerated optimizations of an electromagnetic acoustic transducer with artificial neural networks as metamodels
Simulation model for the evaluation and design of miniaturized non-resonant photoacoustic gas sensors
A micro-capacitive pressure sensor design and modelling
Modelling of the response of acoustic piezoelectric resonators in biosensor applications – Part 1: The general theoretical analysis
Characterization and simulation of peristaltic micropumps
Pongsak Sarapukdee, Dirk Schulz, and Stefan Palzer
J. Sens. Sens. Syst., 13, 157–166, https://doi.org/10.5194/jsss-13-157-2024, https://doi.org/10.5194/jsss-13-157-2024, 2024
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The paper presents a concept for fabricating a biosensor with enhanced long-term stability and offers new options for designing photonics-based microsystems aimed at analysing biosamples. In order to couple the light used to probe samples, a grating is illuminated from the back side, thus realizing an inverted grating configuration. This offers the possibility of designing microsystems that can be operated more conveniently and with a much extended lifetime.
Florian Wohlgemuth, Tino Hausotte, Ingomar Schmidt, Wolfgang Kimmig, and Karl Dietrich Imkamp
J. Sens. Sens. Syst., 11, 171–186, https://doi.org/10.5194/jsss-11-171-2022, https://doi.org/10.5194/jsss-11-171-2022, 2022
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Acceptance and reverification testing for industrial CT systems is described in different standards. The characterisation and testing of CT system performance are often achieved with test artefacts containing spheres. This simulative study characterises the influence of different geometrical error sources – or geometrical misalignments – on these sphere measurements.
Parviz Saeidi, Bernhard Jakoby, Gerald Pühringer, Andreas Tortschanoff, Gerald Stocker, Jasmin Spettel, Thomas Grille, and Reyhaneh Jannesari
J. Sens. Sens. Syst., 11, 15–20, https://doi.org/10.5194/jsss-11-15-2022, https://doi.org/10.5194/jsss-11-15-2022, 2022
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We investigated the feasibility of indium tin oxide (ITO) as an alternative plasmonic material to replace noble metals for sensing applications in the mid-infrared region. An ITO-based plasmonic slot waveguide was numerically designed and analysed for a wavelength of 4.26 µm, which is the absorption band of CO2. As the proposed structure shows low propagation lengths, we concluded that ITO appears not to be an appropriate candidate for plasmonic waveguiding systems.
Oleh Buryy, Ihor I. Syvorotka, Yuriy Suhak, Uliana Yakhnevych, Dmytro Sugak, Sergii Ubizskii, and Holger Fritze
J. Sens. Sens. Syst., 10, 121–126, https://doi.org/10.5194/jsss-10-121-2021, https://doi.org/10.5194/jsss-10-121-2021, 2021
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The actuators of precise positioning based on LiNbO3 or LiTaO3 bimorph structures are considered. They consist of two joined plates: one of them lengthens and the other one shortens under the influence of an electric field and, as a result, the actuator bends. Such a device ensures small movements of probes in scanning probe microscopes, micro-electromechanical systems, micro-motors, etc. We determine the optimal orientations of the plates, ensuring the highest possible actuator displacements.
Jonas Gnauert, Georg Jacobs, Stefan Kock, Dennis Bosse, and Benjamin Janik
J. Sens. Sens. Syst., 9, 239–249, https://doi.org/10.5194/jsss-9-239-2020, https://doi.org/10.5194/jsss-9-239-2020, 2020
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This paper covers the design study of a multicomponent transducer (MCT) for wind turbine test benches. The MCT will cover the characteristics of wind turbines in the power range of up to 6 MW. The motivation to develop a MCT such as this is to provide satisfying measurement accuracy of loads and moments for all 6 degrees of freedom in order to reduce the uncertainty in the traceability of the drive train behavior due to the applied loads.
Johan Schoeman and Monuko du Plessis
J. Sens. Sens. Syst., 8, 293–304, https://doi.org/10.5194/jsss-8-293-2019, https://doi.org/10.5194/jsss-8-293-2019, 2019
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The work proposes a novel model that describes the combined electrical and thermal interaction that exists between two elements that share the same suspended thermal reservoir. The model predicts the change in the electrical properties that the target element experiences when the source element heats up due to an applied electric power. The current convention is to assume the interaction as ideal, but we have shown that thermal losses exist that our model accounts for.
Reyko Schachtschneider, Manuel Stavridis, Ines Fortmeier, Michael Schulz, and Clemens Elster
J. Sens. Sens. Syst., 8, 105–110, https://doi.org/10.5194/jsss-8-105-2019, https://doi.org/10.5194/jsss-8-105-2019, 2019
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Virtual experiments have become an indispensable tool for the design and the accuracy assessment of novel measurement procedures and instruments. In this paper, we present SimOptDevice, a library for opto-mechanical virtual experiments. We describe the mathematical tools used for solving the related numerical tasks and give examples of application scenarios.
Silvan Schwebke, Ulf Werner, and Günter Schultes
J. Sens. Sens. Syst., 7, 69–78, https://doi.org/10.5194/jsss-7-69-2018, https://doi.org/10.5194/jsss-7-69-2018, 2018
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Nickel–Carbon thin films are excellent materials for strain and pressure sensors: they have a sensitivity much higher than conventional metal films and have tunable resistance–temperature characteristics. We investigate the electron conduction mechanisms that lead to their large sensitivity through modeling and numerical simulations. Transverse sensitivity is explained. It is shown in agreement with experiments that the largest sensitivity occurs for a specific nickel/carbon concentration.
Shen Wang, Songling Huang, Qing Wang, Lisha Peng, and Wei Zhao
J. Sens. Sens. Syst., 6, 269–284, https://doi.org/10.5194/jsss-6-269-2017, https://doi.org/10.5194/jsss-6-269-2017, 2017
Jochen Huber, Katrin Schmitt, and Jürgen Wöllenstein
J. Sens. Sens. Syst., 5, 293–299, https://doi.org/10.5194/jsss-5-293-2016, https://doi.org/10.5194/jsss-5-293-2016, 2016
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A simulation model to predict system behaviour of photoacoustic CO2 sensors is presented. The sensor output signal that depends on the CO2 concentration can be simulated if the boundary conditions of the system are known. A comparison of simulated values with experimental results is made. There is good accordance between simulation and experiments. Photoacoustic gas sensors offer great potential for miniaturized gas sensors. The simulation model is an effective tool for further developments.
Ali E. Kubba, Ahmed Hasson, Ammar I. Kubba, and Gregory Hall
J. Sens. Sens. Syst., 5, 95–112, https://doi.org/10.5194/jsss-5-95-2016, https://doi.org/10.5194/jsss-5-95-2016, 2016
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This work presents a novel design of a low power high-temperature MEMS elliptical capacitive pressure sensor that can be utilized within wireless sensor systems, e.g. TPMS. Throughout numerical and analytical analysis, it was found that sensor sensitivity and temperature resistance could be increased if the diaphragm area has two symmetrical segments of chords parallel to the major axis removed, and if diaphragm deformation increases the separation distance between the sensing capacitor plates.
M. V. Voinova
J. Sens. Sens. Syst., 4, 137–142, https://doi.org/10.5194/jsss-4-137-2015, https://doi.org/10.5194/jsss-4-137-2015, 2015
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This paper represents a theoretical modelling of the dynamics of surface acoustic waves with horizontal polarization propagating in the layered system of viscoelastic film covered with a bulk liquid. Theoretically predicted "missing mass" effect is important for the correct interpretation of the experimental data. The results of the theory may be used for the quantitative analysis of SAW-based sensors operated in liquid environments and biosensors.
M. Busek, M. Nötzel, C. Polk, and F. Sonntag
J. Sens. Sens. Syst., 2, 165–169, https://doi.org/10.5194/jsss-2-165-2013, https://doi.org/10.5194/jsss-2-165-2013, 2013
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