High-temperature piezoresistive C / SiOC sensors
F. Roth et al.
Related subject area
Sensor technologies: Sensor materialsImpact of particle size and morphology of cobalt oxide on the thermal response to methane examined by thermal analysisImprovement of the performance of a capacitive relative pressure sensor: case of large deflectionsMorphological characterization and porosity profiles of tantalum glancing-angle-deposited thin filmsHigh-temperature stable piezoelectric transducers using epitaxially grown electrodesAC characteristics of low-ohmic foil shunts influenced by eddy currents in the mounting body
J. Sens. Sens. Syst., 10, 37–42,2021
J. Sens. Sens. Syst., 9, 401–409,2020
J. Sens. Sens. Syst., 9, 79–87,2020
J. Sens. Sens. Syst., 9, 15–26,2020
J. Sens. Sens. Syst., 8, 329–333,2019
Dresselhaus, M. S., Dresselhaus, G., and Hofmann, H.: Raman spectroscopy as a probe of graphene and carbon nanotubes, Phil. Trans. R. Soc. A, 366, 231–236, 2008.
Ferrari, A. C. and Robertson J.: Interpretation of Raman Spectra of disordered and amorphous carbon, Phys. Rev. B, 61, 14095–14107, 2000.
Ferrari, A. C. and Robertson, J.: Raman spectroscopy of amorphous, nanostructured, diamond-like carbon, and nanodiamond, Phil. Trans. R. Soc. Lond. A, 362, 2477–2512, 2004.
Fraga, M. A., Furlan, H., Pessoa, R. S., Rasia, L. A., and Mateus, C. F. R.: Studies on SiC, DLC and TiO2 thin films as piezoresistive sensor materials for high temperature application, Microsyst. Technol., 18, 1027–1033, 2012.
Gregory, O. J., Luo, Q., Bienkiewicz, J. M., Erwin, B. M., and Crisman, E. E.: An apparent n to p transition in reactively sputtered indium-tin-oxide high temperature strain gages, Thin Solid Films, 405, 263–269, 2002.