Articles | Volume 4, issue 1
https://doi.org/10.5194/jsss-4-133-2015
https://doi.org/10.5194/jsss-4-133-2015
Regular research article
 | 
31 Mar 2015
Regular research article |  | 31 Mar 2015

High-temperature piezoresistive C / SiOC sensors

F. Roth, C. Schmerbauch, E. Ionescu, N. Nicoloso, O. Guillon, and R. Riedel

Related subject area

Sensor technologies: Sensor materials
Inverse procedure for measuring piezoelectric material parameters using a single multi-electrode sample
Leander Claes, Nadine Feldmann, Veronika Schulze, Lars Meihost, Henrik Kuhlmann, Benjamin Jurgelucks, Andrea Walther, and Bernd Henning
J. Sens. Sens. Syst., 12, 163–173, https://doi.org/10.5194/jsss-12-163-2023,https://doi.org/10.5194/jsss-12-163-2023, 2023
Short summary
Impact of electrode conductivity on mass sensitivity of piezoelectric resonators at high temperatures
Sebastian Schlack, Hendrik Wulfmeier, and Holger Fritze
J. Sens. Sens. Syst., 11, 299–313, https://doi.org/10.5194/jsss-11-299-2022,https://doi.org/10.5194/jsss-11-299-2022, 2022
Short summary
Improving the electrical and structural stability of highly piezoresistive nickel–carbon sensor thin films
Günter Schultes, Mario Cerino, Angela Lellig, and Marcus Koch
J. Sens. Sens. Syst., 11, 137–147, https://doi.org/10.5194/jsss-11-137-2022,https://doi.org/10.5194/jsss-11-137-2022, 2022
Short summary
Impact of particle size and morphology of cobalt oxide on the thermal response to methane examined by thermal analysis
Olena Yurchenko, Hans-Fridtjof Pernau, Laura Engel, Benedikt Bierer, Martin Jägle, and Jürgen Wöllenstein
J. Sens. Sens. Syst., 10, 37–42, https://doi.org/10.5194/jsss-10-37-2021,https://doi.org/10.5194/jsss-10-37-2021, 2021
Short summary
Improvement of the performance of a capacitive relative pressure sensor: case of large deflections
Samia Achouch, Fakhita Regragui, and Mourad Gharbi
J. Sens. Sens. Syst., 9, 401–409, https://doi.org/10.5194/jsss-9-401-2020,https://doi.org/10.5194/jsss-9-401-2020, 2020

Cited articles

Dresselhaus, M. S., Dresselhaus, G., and Hofmann, H.: Raman spectroscopy as a probe of graphene and carbon nanotubes, Phil. Trans. R. Soc. A, 366, 231–236, 2008.
Ferrari, A. C. and Robertson J.: Interpretation of Raman Spectra of disordered and amorphous carbon, Phys. Rev. B, 61, 14095–14107, 2000.
Ferrari, A. C. and Robertson, J.: Raman spectroscopy of amorphous, nanostructured, diamond-like carbon, and nanodiamond, Phil. Trans. R. Soc. Lond. A, 362, 2477–2512, 2004.
Fraga, M. A., Furlan, H., Pessoa, R. S., Rasia, L. A., and Mateus, C. F. R.: Studies on SiC, DLC and TiO2 thin films as piezoresistive sensor materials for high temperature application, Microsyst. Technol., 18, 1027–1033, 2012.
Gregory, O. J., Luo, Q., Bienkiewicz, J. M., Erwin, B. M., and Crisman, E. E.: An apparent n to p transition in reactively sputtered indium-tin-oxide high temperature strain gages, Thin Solid Films, 405, 263–269, 2002.
Download
Short summary
We report on the high-temperature piezoresistivity of carbon-containing silicon oxycarbide nanocomposites (C/SiOC). The piezoresistive behavior of the C/SiOC nanocomposites relies on the presence of dispersed nanocrystalline graphite and non-crystalline carbon domains. In comparison to highly ordered carbon, C/SiOC exhibits strongly enhanced sensitivities, even at high temperatures. Thus, k values of ca. 80 at the highest temperature reading, 1200°C, reveal that C/SiOC is a primary candidate.