Multi-parameter sensing is examined for thickness shear mode resonators that are in mechanical contact with thin films and half-spaces on both sides. A formula is derived that delivers insight into a set of material and geometry parameters accessible by measurement. Further analysis addresses the problem of accuracy of extracted parameters at a given experimental uncertainty. The demonstrated procedure is suitable for developing experimental strategy for highly efficient multi-parameter sensing.

The basis of our work presented in this paper stems from the research on new materials, especially temperature-stable thin films that transform strain into a resistance change very effectively, allowing higher sensitivity and higher operating temperatures. Different sensor concepts for time-resolved cylinder pressure monitoring of combustion engines are realized and evaluated. Reliable sensors with a minimum of internal components are provided.

An advanced-material-based thin, flexible sensor mat has been synthesized to record and visualize both the position and pressure of applied load. Such a pressure measurement system bears great potential in human health monitoring applications like long-term patient monitoring mattresses or insoles for gait monitoring.

An electrochemical hydrophone based on the principles of molecular electronic transfer (MET) is described. The paper presents theoretical and experimental results for the sensitivity and the level of self-noise determination for METH in the frequency range of 0.02–200 Hz, which determines the fields of acceptance of the devices being developed. An experimental model has been developed by using a force-balancing feedback. Different methods and techniques for its calibration have been developed.

The presented work gives insight into the behaviour of co-resonantly coupled oscillating cantilever beams by means of electro-mechanical analogies. An electric circuit model is analysed with various stages of complexity, and conclusions are drawn regarding the applicability of the co-resonant concept for sensors. Furthermore, this is validated by a comparison between the theoretical predictions and experimental data.

The exploitation of new application fields and the drive to size reduction even in highly stable pressure sensing systems makes the extension of the operating temperature range of the microelectromechanical sensors (MEMS) essential. For this reason, a silicon-based pressure sensor with an application temperature ranging up to 300 °C and the associated manufacturing technology was developed. The evolved sensor has an excellent stability and is uncomplicated to mount due to its stress insensitivity.

We tested two types of home-made sensing elements – four coupled silicon micro-levers and a multilayer graphene membrane – which have the potential to further enhance the sensitivity of laser photoacoustic spectroscopy. Graphene sheets possess outstanding electromechanical properties and demonstrate impressive sensitivity as mass detectors. Their mechanical properties make them suitable for use as micro-/nano-levers or membranes, which could function as extremely sensitive pressure sensors.