Articles | Volume 9, issue 2
J. Sens. Sens. Syst., 9, 219–226, 2020
https://doi.org/10.5194/jsss-9-219-2020
J. Sens. Sens. Syst., 9, 219–226, 2020
https://doi.org/10.5194/jsss-9-219-2020
Regular research article
17 Jul 2020
Regular research article | 17 Jul 2020

Novel method to reduce the transverse sensitivity of granular thin film strain gauges by modification of strain transfer

Maximilian Mathis et al.

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Cited articles

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Jiang, C.-W., Ni, I.-C., Tzeng, S.-D., and Kuo, W.: Nearly isotropic piezoresistive response due to charge detour conduction in nanoparticle thin films, Sci. Rep.-UK, 5, 1–9, 2015. a
Keil, S.: Technology and practical use of strain gages: with particular consideration of stress analysis using strain gages, John Wiley and Sons, Berlin, Germany, 2017. a, b, c
Koppert, R., Uhlig, S., Schmid-Engel, H., Göttel, D., Probst, A.-C., Schultes, G., and Werner, U.: Structural and physical properties of highly piezoresistive nickel containing hydrogenated carbon thin films, Diam. Relat. Mater., 25, 50–58, 2012. a
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This paper introduces a new method to drastically reduce the anisotropic strain sensitivity of granular thin film strain gauges. As a result, these improved strain gauges produce a much higher sensor signal when used for force transducers with biaxial strain fields. This gauge type is also more advantageous for uniaxial stress measurements. The method is based on the creation of a certain topographic structure of the strain gauges; in our case, this was realized by a picosecond laser system.