Articles | Volume 9, issue 2
https://doi.org/10.5194/jsss-9-401-2020
https://doi.org/10.5194/jsss-9-401-2020
Regular research article
 | 
27 Nov 2020
Regular research article |  | 27 Nov 2020

Improvement of the performance of a capacitive relative pressure sensor: case of large deflections

Samia Achouch, Fakhita Regragui, and Mourad Gharbi

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Cited articles

Bae, B., Flachsbart, B. R., Park, K., and Shannon, M. A.: Design optimization of a piezoresistive pressure sensor considering the output signal-to-noise ratio, J. Micromech. Microeng, 14, 1597–1607, https://doi.org/10.1088/0960-1317/14/12/001, 2004. 
Chitra, L. and Ramakrishnan, V.: A novel design of capacitive MEMS pressure sensor for lubricating system, Proceedings – NCET NRES EM 2014: 2nd IEEE National Conference on Emerging Trends in New and Renewable Energy Sources and Energy Management, Chennai, India, 16–17 December 2014, 204–208, 2014. 
Dizon, J. R. C., Espera, A. H., Chen, Q., and Advincula, R. C.: Mechanical characterization of 3D-printed polymers, Additive Manufacturing, 20, 44–67, https://doi.org/10.1016/j.addma.2017.12.002, 2018. 
Eaton, W. P., Bitsie, F., Smith, J. H., and Plummer, D. W.: A New Analytical Solution for Diaphragm Deflection and its Application to a Surface-Micromachined Pressure Sensor, Technical Proceedings of the 1999 International Conference on Modelling and Simulations of Microsystems, MSM 99, San Juan, Puerto Rico, USA, 19–21 April 1999, 640–643, 1999.