Articles | Volume 11, issue 1
J. Sens. Sens. Syst., 11, 137–147, 2022
J. Sens. Sens. Syst., 11, 137–147, 2022
Regular research article
06 May 2022
Regular research article | 06 May 2022

Improving the electrical and structural stability of highly piezoresistive nickel–carbon sensor thin films

Günter Schultes et al.

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Cited articles

Abrasonis, G., Kovacs, G. J., Ryves, L., Krause, M., Mücklich, A., Munnik, F., Oates, T. W. H., Bilek, M. M., and Möller, W.: blackboxPlease provide all authors abbreviated to last name comma initial(s).: Phase separation in carbon-nickel films during hyperthermal ion deposition, J. Appl. Phys., 105, 083518,, 2009. 
Bayer, B. C., Bosworth, D. A., Michaelis, F. B., Blume, R., Habler, G., Abart, R., Weatherup, R. S, Kidambi P. R., Baumberg, J. J., Knop-Gericke, A., Schloegl, R., Baehtz, C., Barber, Z., Meyer, J., and Hofmann, S.: In situ observations of phase transitions in metastable nickel (carbide)/carbon nanocomposites, J. Phys. Chem. C, 120, 22571–22584, 2016. 
Cerino, M., Göttel, D., Probst, A. C., and Schultes, G.: Schichtwiderstand mit einem kohlenstoffhaltigen Widerstandsmaterial und Verfahren zu dessen Herstellung, Patent DE102015006057A1, 2015. 
Dovydaitis, V., Marcinauskas, L., Ayala, P., Gnecco, E., Chimborazo, J., Zhairabany, H., and Zabels, R.: The influence of Cr and Ni doping on the microstructure of oxygen containing diamond-like carbon films, Vacuum, 191, 110351,, 2021. 
Dyer, S. E., Gregory, O. J., and Cooke, J. D.: Improved passivating Cr2O3 scales for thin film high temperature PdCr strain gages, Thin Solid Films, 312, 331–340, 1998. 
Short summary
We develop sensor material to effectively transform mechanical force or torque into an electrical resistance. A new type of thin films containing nickel and carbon has a significantly higher output and is thus very advantageous. But so far, the electrical resistance lacks stability. We therefore investigate how to stabilize the material and show that the partial replacement of nickel by the element chromium solves the problem. The optimized sensor films are now suitable for widespread use.