Articles | Volume 11, issue 1
https://doi.org/10.5194/jsss-11-137-2022
© Author(s) 2022. This work is distributed under the Creative Commons Attribution 4.0 License.
Improving the electrical and structural stability of highly piezoresistive nickel–carbon sensor thin films
Related authors
Cited articles
Abrasonis, G., Kovacs, G. J., Ryves, L., Krause, M., Mücklich, A., Munnik, F., Oates, T. W. H., Bilek, M. M., and Möller, W.: blackboxPlease provide all authors abbreviated to last name comma initial(s).: Phase separation in carbon-nickel films during hyperthermal ion deposition, J. Appl. Phys., 105, 083518, https://doi.org/10.1063/1.3110187, 2009.
Bayer, B. C., Bosworth, D. A., Michaelis, F. B., Blume, R., Habler, G., Abart, R., Weatherup, R. S, Kidambi P. R., Baumberg, J. J., Knop-Gericke, A., Schloegl, R., Baehtz, C., Barber, Z., Meyer, J., and Hofmann, S.: In situ observations of phase transitions in metastable nickel (carbide)/carbon nanocomposites, J. Phys. Chem. C, 120, 22571–22584, 2016.
Cerino, M., Göttel, D., Probst, A. C., and Schultes, G.: Schichtwiderstand mit einem kohlenstoffhaltigen Widerstandsmaterial und Verfahren zu dessen Herstellung, Patent DE102015006057A1, 2015.
Dovydaitis, V., Marcinauskas, L., Ayala, P., Gnecco, E., Chimborazo, J., Zhairabany, H., and Zabels, R.: The influence of Cr and Ni doping on the microstructure of oxygen containing diamond-like carbon films, Vacuum, 191, 110351, https://doi.org/10.1016/j.vacuum.2021.110351, 2021.
Dyer, S. E., Gregory, O. J., and Cooke, J. D.: Improved passivating Cr2O3 scales for thin film high temperature PdCr strain gages, Thin Solid Films, 312, 331–340, 1998.