Articles | Volume 9, issue 1
J. Sens. Sens. Syst., 9, 15–26, 2020
J. Sens. Sens. Syst., 9, 15–26, 2020
Regular research article
23 Jan 2020
Regular research article | 23 Jan 2020

High-temperature stable piezoelectric transducers using epitaxially grown electrodes

Hendrik Wulfmeier et al.

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Cited articles

Benes, E. Gröschl, M. Burger, W., and Schmid, M.: Sensors based on piezoelectric resonators, Sens. Act. A, 48, 1–21,, 1995. 
Bjørheim, T. S., Haugsrud, R., and Norby, T.: Protons in acceptor doped langasite, La3Ga5SiO14, Solid State Ion., 264, 76–84,, 2014. 
Bohm, J., Heimann, R. B., Hengst, M., Roewer, R., and Schindler, J.: Czochralski growth and characterization of piezoelectric single crystals with langasite structure: La3Ga5SiO14 (LGS), La3Ga5.5Nb0.5O14 (LGN), and La3Ga5.5Ta0.5O14 (LGT): Part I, J. Cryst. Grow., 204, 128–136,, 1999. 
Brauer, G.: Handbuch der Präparativen Anorganischen Chemie, 3rd Edn., Ferdinand Enke Verlag, Stuttgart, Germany,, 1975. 
Brown, M. E. and Gallagher, P. K.: Handbook of Thermal Analysis and Calorimetry, 1st Edn., Elsevier Science B.V., Amsterdam, the Netherlands, 1998. 
Short summary
Epitaxially grown electrodes for high-temperature stable piezoelectric transducers are prepared by pulsed laser depostion. To adjust the stoichiometry in the films, oxygen partial pressure, target composition and deposition temperature are varied. Langasite films with enhanced conductivity are deposited, serving as electrodes for nearly monolithic piezoelectric resonators. These resonators show strong admittance maxima for their 1st, 3rd and 5th harmonics and are not affected by spurious modes.