Articles | Volume 9, issue 1
https://doi.org/10.5194/jsss-9-15-2020
© Author(s) 2020. This work is distributed under
the Creative Commons Attribution 4.0 License.
the Creative Commons Attribution 4.0 License.
https://doi.org/10.5194/jsss-9-15-2020
© Author(s) 2020. This work is distributed under
the Creative Commons Attribution 4.0 License.
the Creative Commons Attribution 4.0 License.
High-temperature stable piezoelectric transducers using epitaxially grown electrodes
Hendrik Wulfmeier
CORRESPONDING AUTHOR
Institute of Energy Research and Physical Technologies, Clausthal
University of Technology, 38640 Goslar, Germany
René Feder
Institute of Energy Research and Physical Technologies, Clausthal
University of Technology, 38640 Goslar, Germany
Li Zhao
Institute of Energy Research and Physical Technologies, Clausthal
University of Technology, 38640 Goslar, Germany
Holger Fritze
Institute of Energy Research and Physical Technologies, Clausthal
University of Technology, 38640 Goslar, Germany
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Temperature sensors based on piezoelectric devices enable precise measurement of temperature changes in harsh environments such as high temperatures or aggressive atmospheres. In the case of this device, the change in the temperature is detected by means of the changing resonance frequency of the sensor. Here a sensor device based on catangasite (an isomorph of quartz) is presented. We discuss its behavior at elevated temperatures and confirm that it can successfully operate up to 1030 °C.
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Short summary
Epitaxially grown electrodes for high-temperature stable piezoelectric transducers are prepared by pulsed laser depostion. To adjust the stoichiometry in the films, oxygen partial pressure, target composition and deposition temperature are varied. Langasite films with enhanced conductivity are deposited, serving as electrodes for nearly monolithic piezoelectric resonators. These resonators show strong admittance maxima for their 1st, 3rd and 5th harmonics and are not affected by spurious modes.
Epitaxially grown electrodes for high-temperature stable piezoelectric transducers are prepared...