Articles | Volume 9, issue 1
https://doi.org/10.5194/jsss-9-15-2020
https://doi.org/10.5194/jsss-9-15-2020
Regular research article
 | 
23 Jan 2020
Regular research article |  | 23 Jan 2020

High-temperature stable piezoelectric transducers using epitaxially grown electrodes

Hendrik Wulfmeier, René Feder, Li Zhao, and Holger Fritze

Related authors

Extraction of nanometer-scale displacements from noisy signals at frequencies down to 1 mHz obtained by differential laser Doppler vibrometry
Dhyan Kohlmann, Marvin Schewe, Hendrik Wulfmeier, Christian Rembe, and Holger Fritze
J. Sens. Sens. Syst., 13, 167–177, https://doi.org/10.5194/jsss-13-167-2024,https://doi.org/10.5194/jsss-13-167-2024, 2024
Short summary
Impact of electrode conductivity on mass sensitivity of piezoelectric resonators at high temperatures
Sebastian Schlack, Hendrik Wulfmeier, and Holger Fritze
J. Sens. Sens. Syst., 11, 299–313, https://doi.org/10.5194/jsss-11-299-2022,https://doi.org/10.5194/jsss-11-299-2022, 2022
Short summary
In situ analysis of hydration and ionic conductivity of sulfonated poly(ether ether ketone) thin films using an interdigitated electrode array and a nanobalance
Hendrik Wulfmeier, Niklas Warnecke, Luca Pasquini, Holger Fritze, and Philippe Knauth
J. Sens. Sens. Syst., 11, 51–59, https://doi.org/10.5194/jsss-11-51-2022,https://doi.org/10.5194/jsss-11-51-2022, 2022
Short summary

Related subject area

Sensor technologies: Sensor materials
Inverse procedure for measuring piezoelectric material parameters using a single multi-electrode sample
Leander Claes, Nadine Feldmann, Veronika Schulze, Lars Meihost, Henrik Kuhlmann, Benjamin Jurgelucks, Andrea Walther, and Bernd Henning
J. Sens. Sens. Syst., 12, 163–173, https://doi.org/10.5194/jsss-12-163-2023,https://doi.org/10.5194/jsss-12-163-2023, 2023
Short summary
Impact of electrode conductivity on mass sensitivity of piezoelectric resonators at high temperatures
Sebastian Schlack, Hendrik Wulfmeier, and Holger Fritze
J. Sens. Sens. Syst., 11, 299–313, https://doi.org/10.5194/jsss-11-299-2022,https://doi.org/10.5194/jsss-11-299-2022, 2022
Short summary
Improving the electrical and structural stability of highly piezoresistive nickel–carbon sensor thin films
Günter Schultes, Mario Cerino, Angela Lellig, and Marcus Koch
J. Sens. Sens. Syst., 11, 137–147, https://doi.org/10.5194/jsss-11-137-2022,https://doi.org/10.5194/jsss-11-137-2022, 2022
Short summary
Impact of particle size and morphology of cobalt oxide on the thermal response to methane examined by thermal analysis
Olena Yurchenko, Hans-Fridtjof Pernau, Laura Engel, Benedikt Bierer, Martin Jägle, and Jürgen Wöllenstein
J. Sens. Sens. Syst., 10, 37–42, https://doi.org/10.5194/jsss-10-37-2021,https://doi.org/10.5194/jsss-10-37-2021, 2021
Short summary
Improvement of the performance of a capacitive relative pressure sensor: case of large deflections
Samia Achouch, Fakhita Regragui, and Mourad Gharbi
J. Sens. Sens. Syst., 9, 401–409, https://doi.org/10.5194/jsss-9-401-2020,https://doi.org/10.5194/jsss-9-401-2020, 2020

Cited articles

Benes, E. Gröschl, M. Burger, W., and Schmid, M.: Sensors based on piezoelectric resonators, Sens. Act. A, 48, 1–21, https://doi.org/10.1016/0924-4247(95)00846-2, 1995. 
Bjørheim, T. S., Haugsrud, R., and Norby, T.: Protons in acceptor doped langasite, La3Ga5SiO14, Solid State Ion., 264, 76–84, https://doi.org/10.1016/j.ssi.2014.05.017, 2014. 
Bohm, J., Heimann, R. B., Hengst, M., Roewer, R., and Schindler, J.: Czochralski growth and characterization of piezoelectric single crystals with langasite structure: La3Ga5SiO14 (LGS), La3Ga5.5Nb0.5O14 (LGN), and La3Ga5.5Ta0.5O14 (LGT): Part I, J. Cryst. Grow., 204, 128–136, https://doi.org/10.1016/S0022-0248(99)00186-4, 1999. 
Brauer, G.: Handbuch der Präparativen Anorganischen Chemie, 3rd Edn., Ferdinand Enke Verlag, Stuttgart, Germany, https://doi.org/10.1002/maco.19620131132, 1975. 
Brown, M. E. and Gallagher, P. K.: Handbook of Thermal Analysis and Calorimetry, 1st Edn., Elsevier Science B.V., Amsterdam, the Netherlands, 1998. 
Download
Short summary
Epitaxially grown electrodes for high-temperature stable piezoelectric transducers are prepared by pulsed laser depostion. To adjust the stoichiometry in the films, oxygen partial pressure, target composition and deposition temperature are varied. Langasite films with enhanced conductivity are deposited, serving as electrodes for nearly monolithic piezoelectric resonators. These resonators show strong admittance maxima for their 1st, 3rd and 5th harmonics and are not affected by spurious modes.