Articles | Volume 7, issue 1
https://doi.org/10.5194/jsss-7-1-2018
© Author(s) 2018. This work is distributed under
the Creative Commons Attribution 4.0 License.
the Creative Commons Attribution 4.0 License.
https://doi.org/10.5194/jsss-7-1-2018
© Author(s) 2018. This work is distributed under
the Creative Commons Attribution 4.0 License.
the Creative Commons Attribution 4.0 License.
Granular metal–carbon nanocomposites as piezoresistive sensor films – Part 1: Experimental results and morphology
Günter Schultes
CORRESPONDING AUTHOR
Sensors and Thin Film Group, University of Applied Sciences, 66117 Saarbrücken, Germany
Hanna Schmid-Engel
Sensors and Thin Film Group, University of Applied Sciences, 66117 Saarbrücken, Germany
Silvan Schwebke
Sensors and Thin Film Group, University of Applied Sciences, 66117 Saarbrücken, Germany
Ulf Werner
Leibniz Institute for New Materials, 66123 Saarbrücken, Germany
Related authors
Günter Schultes, Mario Cerino, Angela Lellig, and Marcus Koch
J. Sens. Sens. Syst., 11, 137–147, https://doi.org/10.5194/jsss-11-137-2022, https://doi.org/10.5194/jsss-11-137-2022, 2022
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We develop sensor material to effectively transform mechanical force or torque into an electrical resistance. A new type of thin films containing nickel and carbon has a significantly higher output and is thus very advantageous. But so far, the electrical resistance lacks stability. We therefore investigate how to stabilize the material and show that the partial replacement of nickel by the element chromium solves the problem. The optimized sensor films are now suitable for widespread use.
Dennis Vollberg, Peter Gibson, Günter Schultes, Hans-Werner Groh, and Thomas Heinze
J. Sens. Sens. Syst., 11, 1–13, https://doi.org/10.5194/jsss-11-1-2022, https://doi.org/10.5194/jsss-11-1-2022, 2022
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We developed a smart in-cylinder pressure sensor for closed-loop combustion control. The sensor concept is based on a robust and reliable steel membrane equipped with highly strain-sensitive and temperature-stable thin films. The sensor system is complemented by a smart electronics allowing real-time data processing for calculation of different combustion parameters. The data are utilized to control the igniting timing of a spark plug for efficient operation of a combustion engine.
Maximilian Mathis, Dennis Vollberg, Matthäus Langosch, Dirk Göttel, Angela Lellig, and Günter Schultes
J. Sens. Sens. Syst., 10, 53–61, https://doi.org/10.5194/jsss-10-53-2021, https://doi.org/10.5194/jsss-10-53-2021, 2021
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NiCr-carbon thin-film strain gauges offer the outstanding characteristic of a very high strain sensitivity. This can be very advantageous for many high-precision mechanical sensors like load cells. A downside of sensors based on these NiCr-carbon strain gauges is a rather large creep error, meaning reversible signal deviations at a constant load. We present two applicable methods for adjustment of the creep error: a modification of the film composition and a modification of the strain transfer.
Maximilian Mathis, Dennis Vollberg, Matthäus Langosch, Dirk Göttel, Angela Lellig, and Günter Schultes
J. Sens. Sens. Syst., 9, 219–226, https://doi.org/10.5194/jsss-9-219-2020, https://doi.org/10.5194/jsss-9-219-2020, 2020
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This paper introduces a new method to drastically reduce the anisotropic strain sensitivity of granular thin film strain gauges. As a result, these improved strain gauges produce a much higher sensor signal when used for force transducers with biaxial strain fields. This gauge type is also more advantageous for uniaxial stress measurements. The method is based on the creation of a certain topographic structure of the strain gauges; in our case, this was realized by a picosecond laser system.
Dennis Vollberg, Dennis Wachter, Thomas Kuberczyk, and Günter Schultes
J. Sens. Sens. Syst., 8, 75–85, https://doi.org/10.5194/jsss-8-75-2019, https://doi.org/10.5194/jsss-8-75-2019, 2019
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The basis of our work presented in this paper stems from the research on new materials, especially temperature-stable thin films that transform strain into a resistance change very effectively, allowing higher sensitivity and higher operating temperatures. Different sensor concepts for time-resolved cylinder pressure monitoring of combustion engines are realized and evaluated. Reliable sensors with a minimum of internal components are provided.
Silvan Schwebke, Ulf Werner, and Günter Schultes
J. Sens. Sens. Syst., 7, 69–78, https://doi.org/10.5194/jsss-7-69-2018, https://doi.org/10.5194/jsss-7-69-2018, 2018
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Nickel–Carbon thin films are excellent materials for strain and pressure sensors: they have a sensitivity much higher than conventional metal films and have tunable resistance–temperature characteristics. We investigate the electron conduction mechanisms that lead to their large sensitivity through modeling and numerical simulations. Transverse sensitivity is explained. It is shown in agreement with experiments that the largest sensitivity occurs for a specific nickel/carbon concentration.
Günter Schultes, Mario Cerino, Angela Lellig, and Marcus Koch
J. Sens. Sens. Syst., 11, 137–147, https://doi.org/10.5194/jsss-11-137-2022, https://doi.org/10.5194/jsss-11-137-2022, 2022
Short summary
Short summary
We develop sensor material to effectively transform mechanical force or torque into an electrical resistance. A new type of thin films containing nickel and carbon has a significantly higher output and is thus very advantageous. But so far, the electrical resistance lacks stability. We therefore investigate how to stabilize the material and show that the partial replacement of nickel by the element chromium solves the problem. The optimized sensor films are now suitable for widespread use.
Dennis Vollberg, Peter Gibson, Günter Schultes, Hans-Werner Groh, and Thomas Heinze
J. Sens. Sens. Syst., 11, 1–13, https://doi.org/10.5194/jsss-11-1-2022, https://doi.org/10.5194/jsss-11-1-2022, 2022
Short summary
Short summary
We developed a smart in-cylinder pressure sensor for closed-loop combustion control. The sensor concept is based on a robust and reliable steel membrane equipped with highly strain-sensitive and temperature-stable thin films. The sensor system is complemented by a smart electronics allowing real-time data processing for calculation of different combustion parameters. The data are utilized to control the igniting timing of a spark plug for efficient operation of a combustion engine.
Maximilian Mathis, Dennis Vollberg, Matthäus Langosch, Dirk Göttel, Angela Lellig, and Günter Schultes
J. Sens. Sens. Syst., 10, 53–61, https://doi.org/10.5194/jsss-10-53-2021, https://doi.org/10.5194/jsss-10-53-2021, 2021
Short summary
Short summary
NiCr-carbon thin-film strain gauges offer the outstanding characteristic of a very high strain sensitivity. This can be very advantageous for many high-precision mechanical sensors like load cells. A downside of sensors based on these NiCr-carbon strain gauges is a rather large creep error, meaning reversible signal deviations at a constant load. We present two applicable methods for adjustment of the creep error: a modification of the film composition and a modification of the strain transfer.
Maximilian Mathis, Dennis Vollberg, Matthäus Langosch, Dirk Göttel, Angela Lellig, and Günter Schultes
J. Sens. Sens. Syst., 9, 219–226, https://doi.org/10.5194/jsss-9-219-2020, https://doi.org/10.5194/jsss-9-219-2020, 2020
Short summary
Short summary
This paper introduces a new method to drastically reduce the anisotropic strain sensitivity of granular thin film strain gauges. As a result, these improved strain gauges produce a much higher sensor signal when used for force transducers with biaxial strain fields. This gauge type is also more advantageous for uniaxial stress measurements. The method is based on the creation of a certain topographic structure of the strain gauges; in our case, this was realized by a picosecond laser system.
Dennis Vollberg, Dennis Wachter, Thomas Kuberczyk, and Günter Schultes
J. Sens. Sens. Syst., 8, 75–85, https://doi.org/10.5194/jsss-8-75-2019, https://doi.org/10.5194/jsss-8-75-2019, 2019
Short summary
Short summary
The basis of our work presented in this paper stems from the research on new materials, especially temperature-stable thin films that transform strain into a resistance change very effectively, allowing higher sensitivity and higher operating temperatures. Different sensor concepts for time-resolved cylinder pressure monitoring of combustion engines are realized and evaluated. Reliable sensors with a minimum of internal components are provided.
Silvan Schwebke, Ulf Werner, and Günter Schultes
J. Sens. Sens. Syst., 7, 69–78, https://doi.org/10.5194/jsss-7-69-2018, https://doi.org/10.5194/jsss-7-69-2018, 2018
Short summary
Short summary
Nickel–Carbon thin films are excellent materials for strain and pressure sensors: they have a sensitivity much higher than conventional metal films and have tunable resistance–temperature characteristics. We investigate the electron conduction mechanisms that lead to their large sensitivity through modeling and numerical simulations. Transverse sensitivity is explained. It is shown in agreement with experiments that the largest sensitivity occurs for a specific nickel/carbon concentration.
Related subject area
Sensor technologies: Sensor materials
Inverse procedure for measuring piezoelectric material parameters using a single multi-electrode sample
Impact of electrode conductivity on mass sensitivity of piezoelectric resonators at high temperatures
Improving the electrical and structural stability of highly piezoresistive nickel–carbon sensor thin films
Impact of particle size and morphology of cobalt oxide on the thermal response to methane examined by thermal analysis
Improvement of the performance of a capacitive relative pressure sensor: case of large deflections
Morphological characterization and porosity profiles of tantalum glancing-angle-deposited thin films
High-temperature stable piezoelectric transducers using epitaxially grown electrodes
AC characteristics of low-ohmic foil shunts influenced by eddy currents in the mounting body
Three-dimensional structural comparison of tantalum glancing angle deposition thin films by FIB-SEM
Quartz crystal microbalance coated with PEDOT–PSS/PVA nanofiber for a high-performance humidity sensor
Study of different magneto-optic materials for current sensing applications
Voltammetric sensor for electrochemical determination of the floral origin of honey based on a zinc oxide nanoparticle modified carbon paste electrode
Embedded sensing: integrating sensors in 3-D printed structures
High-temperature stable indium oxide photonic crystals: transducer material for optical and resistive gas sensing
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Investigation of InAsSbP quantum dot mid-infrared sensors
Increasing the sensitivity of electrical impedance to piezoelectric material parameters with non-uniform electrical excitation
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Polymer composite based microbolometers
Leander Claes, Nadine Feldmann, Veronika Schulze, Lars Meihost, Henrik Kuhlmann, Benjamin Jurgelucks, Andrea Walther, and Bernd Henning
J. Sens. Sens. Syst., 12, 163–173, https://doi.org/10.5194/jsss-12-163-2023, https://doi.org/10.5194/jsss-12-163-2023, 2023
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This article describes a method to measure the parameters of piezoelectric materials. This is done by evaluating the complex electrical resistance of a sample. However, the properties of the material can not be calculated directly from the electrical resistance. Instead, a simulation model of the sample is created, and the parameters of the simulation model are adapted using an optimisation algorithm until the model's resistance and the resistance of the physical sample match.
Sebastian Schlack, Hendrik Wulfmeier, and Holger Fritze
J. Sens. Sens. Syst., 11, 299–313, https://doi.org/10.5194/jsss-11-299-2022, https://doi.org/10.5194/jsss-11-299-2022, 2022
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High-temperature stable piezoelectric resonators are coated with oxide electrodes. The impact of the oxide electrode conductivity on the mass sensitivity and on the resonance frequency of the device is described by electrical and mechanical models, which are used to analyse the experimental data. Furthermore, the impact of an increasing oxide electrode conductivity is discussed with respect to the application of oxide electrodes and for gas sensing.
Günter Schultes, Mario Cerino, Angela Lellig, and Marcus Koch
J. Sens. Sens. Syst., 11, 137–147, https://doi.org/10.5194/jsss-11-137-2022, https://doi.org/10.5194/jsss-11-137-2022, 2022
Short summary
Short summary
We develop sensor material to effectively transform mechanical force or torque into an electrical resistance. A new type of thin films containing nickel and carbon has a significantly higher output and is thus very advantageous. But so far, the electrical resistance lacks stability. We therefore investigate how to stabilize the material and show that the partial replacement of nickel by the element chromium solves the problem. The optimized sensor films are now suitable for widespread use.
Olena Yurchenko, Hans-Fridtjof Pernau, Laura Engel, Benedikt Bierer, Martin Jägle, and Jürgen Wöllenstein
J. Sens. Sens. Syst., 10, 37–42, https://doi.org/10.5194/jsss-10-37-2021, https://doi.org/10.5194/jsss-10-37-2021, 2021
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Differential thermal analysis (DTA) was used to examine the effect of the particle size and morphology of Co3O4 on its thermal response under exposure to 1 % CH4. The DTA response results from the catalytic oxidation of methane. Co3O4 samples differing in particle size and morphology were produced by ball milling or were synthesized. The investigations performed with temperatures between 250 and 450 °C reveal that both particle size and shape have a considerable effect on thermal response.
Samia Achouch, Fakhita Regragui, and Mourad Gharbi
J. Sens. Sens. Syst., 9, 401–409, https://doi.org/10.5194/jsss-9-401-2020, https://doi.org/10.5194/jsss-9-401-2020, 2020
Tobias Ott and Gerald Gerlach
J. Sens. Sens. Syst., 9, 79–87, https://doi.org/10.5194/jsss-9-79-2020, https://doi.org/10.5194/jsss-9-79-2020, 2020
Hendrik Wulfmeier, René Feder, Li Zhao, and Holger Fritze
J. Sens. Sens. Syst., 9, 15–26, https://doi.org/10.5194/jsss-9-15-2020, https://doi.org/10.5194/jsss-9-15-2020, 2020
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Epitaxially grown electrodes for high-temperature stable piezoelectric transducers are prepared by pulsed laser depostion. To adjust the stoichiometry in the films, oxygen partial pressure, target composition and deposition temperature are varied. Langasite films with enhanced conductivity are deposited, serving as electrodes for nearly monolithic piezoelectric resonators. These resonators show strong admittance maxima for their 1st, 3rd and 5th harmonics and are not affected by spurious modes.
Mario Schönecker-Baußmann
J. Sens. Sens. Syst., 8, 329–333, https://doi.org/10.5194/jsss-8-329-2019, https://doi.org/10.5194/jsss-8-329-2019, 2019
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We came across some problems with the current measurement shunts while building a transfer normal power analyzer for 150 kHz within a cooperation project of the manufacturer ZES ZIMMER along with PTB, the National Metrology Institute of Germany and Bundesnetzagentur Berlin. We decided to utilize simulations with the numerical field simulation program Fast Henry to determine the cause of this frequency behavior. We found adequate justification and give recommendations for the shunt manufacturing.
Tobias Ott, Diego Roldán, Claudia Redenbach, Katja Schladitz, Michael Godehardt, and Sören Höhn
J. Sens. Sens. Syst., 8, 305–315, https://doi.org/10.5194/jsss-8-305-2019, https://doi.org/10.5194/jsss-8-305-2019, 2019
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Thin tantalum films generated by glancing angle deposition serve as functional optical layers. Serial sectioning by a focused ion beam combined with scanning electron microscopy of the slices generates stacks of highly resolved images of this film. Dedicated image processing reconstructs the spatial structure such that 3-D image analysis yields geometric information that can be related to the optical performance.
Trisna Julian, Aditya Rianjanu, Shidiq Nur Hidayat, Ahmad Kusumaatmaja, Roto Roto, and Kuwat Triyana
J. Sens. Sens. Syst., 8, 243–250, https://doi.org/10.5194/jsss-8-243-2019, https://doi.org/10.5194/jsss-8-243-2019, 2019
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High-performance relative humidity (RH) sensing system using poly(3,4-ethylenedioxythiophene) and polystyrene sulfonate mixed with polyvinyl alcohol (PEDOT–PSS/PVA) nanofiber coated on top of a quartz crystal microbalance (QCM) chip is developed. Results show that the sensor offers easy fabrication processes and provides excellent sensor characteristics to relative humidity sensing. It offers a very promising alternative method to fabricate high-performance relative humidity sensors.
Sarita Kumari and Sarbani Chakraborty
J. Sens. Sens. Syst., 7, 421–431, https://doi.org/10.5194/jsss-7-421-2018, https://doi.org/10.5194/jsss-7-421-2018, 2018
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This article discusses the properties of different diamagnetic and paramagnetic materials for a basic current/magnetic field sensor system set up with different relative orientations of analyzers and polarizers. The paper analyzes a linearity range of different materials and their sensitivity for different wavelengths. Terbium doped glass, terbium gallium garnet, doped TGG and dense flint glass materials are used for analysis based on the Faraday rotation principle.
Kamalika Tiwari, Bipan Tudu, Rajib Bandyopadhyay, Anutosh Chatterjee, and Panchanan Pramanik
J. Sens. Sens. Syst., 7, 319–329, https://doi.org/10.5194/jsss-7-319-2018, https://doi.org/10.5194/jsss-7-319-2018, 2018
Alexander Dijkshoorn, Patrick Werkman, Marcel Welleweerd, Gerjan Wolterink, Bram Eijking, John Delamare, Remco Sanders, and Gijs J. M. Krijnen
J. Sens. Sens. Syst., 7, 169–181, https://doi.org/10.5194/jsss-7-169-2018, https://doi.org/10.5194/jsss-7-169-2018, 2018
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Current additive manufacturing allows for the implementation of electrically integrated 3-D printed sensors. In this contribution various technologies, sensing principles and applications are discussed. We will give both an overview of some of the sensors presented in literature as well as some of our own work on recent 3-D printed sensors.
Sabrina Amrehn, Xia Wu, and Thorsten Wagner
J. Sens. Sens. Syst., 5, 179–185, https://doi.org/10.5194/jsss-5-179-2016, https://doi.org/10.5194/jsss-5-179-2016, 2016
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Indium oxide inverse opal is a promising new material for optical gas sensors. The photonic properties caused by the inverse opal structure can be utilized to read out the sensors’ electronical state by optical methods. The maintenance of good thermal stability of transducer material during operation is a minimum requirement. We present results on the synthesis and investigation of the structural stability of the In2O3 inverse opal structure up to a temperature of 550 °C (limit of substrate).
Kyle M. Sinding, Alison Orr, Luke Breon, and Bernhard R. Tittmann
J. Sens. Sens. Syst., 5, 113–123, https://doi.org/10.5194/jsss-5-113-2016, https://doi.org/10.5194/jsss-5-113-2016, 2016
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This paper investigates the effect of high-temperature and low-temperature (< 150 °C) processing conditions on the surface composition of the substrate. Furthermore, the resultant transducers from high- and low-temperature fabrication processes are compared to determine if a low-temperature processing method is feasible. For these studies a sol-gel spray-on process is employed to deposit piezoelectric ceramics onto a stainless-steel 316L substrate.
M. Schulz, E. Mayer, I. Shrena, D. Eisele, M. Schmitt, L. M. Reindl, and H. Fritze
J. Sens. Sens. Syst., 4, 331–340, https://doi.org/10.5194/jsss-4-331-2015, https://doi.org/10.5194/jsss-4-331-2015, 2015
A. A. Haidry, N. Kind, and B. Saruhan
J. Sens. Sens. Syst., 4, 271–280, https://doi.org/10.5194/jsss-4-271-2015, https://doi.org/10.5194/jsss-4-271-2015, 2015
M. Dietrich, D. Rauch, U. Simon, A. Porch, and R. Moos
J. Sens. Sens. Syst., 4, 263–269, https://doi.org/10.5194/jsss-4-263-2015, https://doi.org/10.5194/jsss-4-263-2015, 2015
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The effect of stored ammonia on the complex dielectric permittivity of H-ZSM-5 zeolites with varying storage site density was observed between 200 and 300 °C under reaction conditions by microwave cavity perturbation. Polarization and dielectric losses were differently affected. The sensitivity of the polarization to stored ammonia is almost independent, the sensitivity of the dielectric losses strongly dependent on the storage site density. The results can be explained by proton hopping.
V. G. Harutyunyan, K. M. Gambaryan, V. M. Aroutiounian, and I. G. Harutyunyan
J. Sens. Sens. Syst., 4, 249–253, https://doi.org/10.5194/jsss-4-249-2015, https://doi.org/10.5194/jsss-4-249-2015, 2015
K. Kulshreshtha, B. Jurgelucks, F. Bause, J. Rautenberg, and C. Unverzagt
J. Sens. Sens. Syst., 4, 217–227, https://doi.org/10.5194/jsss-4-217-2015, https://doi.org/10.5194/jsss-4-217-2015, 2015
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In this paper we show that for radially symmetric piezoceramic disks non-zero sensitivity of the electrical impedance to the whole material parameter set can be computed using a system of 3-ring electrodes and non-uniform electrical excitation. We formulate an optimisation problem for increasing this sensitivity. However, the system displays multiple optimal configurations for the radii of said ring electrodes and we have shown some results from optimising such configurations using simulations.
F. Roth, C. Schmerbauch, E. Ionescu, N. Nicoloso, O. Guillon, and R. Riedel
J. Sens. Sens. Syst., 4, 133–136, https://doi.org/10.5194/jsss-4-133-2015, https://doi.org/10.5194/jsss-4-133-2015, 2015
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We report on the high-temperature piezoresistivity of carbon-containing silicon oxycarbide nanocomposites (C/SiOC). The piezoresistive behavior of the C/SiOC nanocomposites relies on the presence of dispersed nanocrystalline graphite and non-crystalline carbon domains. In comparison to highly ordered carbon, C/SiOC exhibits strongly enhanced sensitivities, even at high temperatures. Thus, k values of ca. 80 at the highest temperature reading, 1200°C, reveal that C/SiOC is a primary candidate.
P. Gembaczka, M. Görtz, Y. Celik, A. Jupe, M. Stühlmeyer, A. Goehlich, H. Vogt, W. Mokwa, and M. Kraft
J. Sens. Sens. Syst., 3, 335–347, https://doi.org/10.5194/jsss-3-335-2014, https://doi.org/10.5194/jsss-3-335-2014, 2014
F. Di Maggio, M. Ling, A. Tsang, J. Covington, J. Saffell, and C. Blackman
J. Sens. Sens. Syst., 3, 325–330, https://doi.org/10.5194/jsss-3-325-2014, https://doi.org/10.5194/jsss-3-325-2014, 2014
E. Dilonardo, M. Penza, M. Alvisi, C. Di Franco, D. Suriano, R. Rossi, F. Palmisano, L. Torsi, and N. Cioffi
J. Sens. Sens. Syst., 3, 245–252, https://doi.org/10.5194/jsss-3-245-2014, https://doi.org/10.5194/jsss-3-245-2014, 2014
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Electrochemically synthesized colloidal Au NPs with controlled dimension and composition were successfully deposited electrophoretically on CNT networked films. Au NP/CNT films were tested as active layers in resistive NO2 sensors, exhibiting a p-type response and a sensitivity depending on Au loading. The impact of the Au loading on gas sensing performance was investigated as a function of the working temperature, gas concentration and interfering gases.
A. Hosoya, S. Tamura, and N. Imanaka
J. Sens. Sens. Syst., 3, 141–144, https://doi.org/10.5194/jsss-3-141-2014, https://doi.org/10.5194/jsss-3-141-2014, 2014
A. Nocke
J. Sens. Sens. Syst., 2, 127–135, https://doi.org/10.5194/jsss-2-127-2013, https://doi.org/10.5194/jsss-2-127-2013, 2013
Cited articles
Abrasonis, G., Kovács, G. J., Ryves, L., Krause, M., Mücklich, A.,
Munnik, F., Oates, T. W. H., Bilek, M. M. M., and Möller, W.: Phase
separation in carbon-nickel films during hyperthermal ion deposition,
J. Appl. Phys., 105, 083518, https://doi.org/10.1063/1.3110187, 2009.
Aga, R. S., Fu, C. L., Krcmar, M., and Morris, J. R.: Theoretical investigation
of the effect of graphite interlayerspacing on hydrogen absorption, Phys. Rev. B,
76, 165404, https://doi.org/10.1103/PhysRevB.76.165404, 2007.
Andersson, M., Högström, J., Urbonaite, S., Furlan, A., Nyholm, L.,
and Jansson, U.: Deposition and characterization of magnetron sputtered
amorphous Cr–C films, Vacuum, 86, 1408–1416, https://doi.org/10.1016/j.vacuum.2012.01.021, 2012.
Bayer, B., Bosworth, D., Michaelis, F., Blume, R., Habler, G., Abart, R.,
Weatherup, R., Kidambi, P., Baumberg, J., Knop-Gericke, A., Schloegl, R.,
Baehtz, C., Barber, Z., Meyer, J., and Hofmann, S.: In Situ Observations of
Phase Transitions in Metastable Nickel (Carbide)/Carbon Nanocomposites, J. Phys.
Chem. C, 120, 22571–22584, https://doi.org/10.1021/acs.jpcc.6b01555, 2016.
Delhaes, P.: Graphite and Precursors, CRC Press, Amsterdam, the Netherlands, 2000.
Dimigen, H., Hübsch, H., and Memming, R.: Tribological and electrical
properties of metal-containing hydrogenated carbon films, Appl. Phys. Lett.,
50, 1056, https://doi.org/10.1063/1.97968, 1987.
El Mel, A. A., Bouts, N., Grigore, E., Gautron, E., Granier, A., Angleraud, B.,
and Tessier, P. Y.: Shape control of nickel nanostructures incorporated in
amorphous carbon films: From globular nanoparticles toward aligned nanowires,
J. Appl. Phys., 111, 114309, https://doi.org/10.1063/1.4728164, 2012.
Garlow, J. A., Barrett, L. K., Wu, L., Kisslinger, K., Zhu, Y., and Pulecio, J.
F.: Large-Area Growth of Turbostratic Graphene on Ni(111) via Physical Vapor
Deposition, Sci. Rep., 6, 19804, https://doi.org/10.1038/srep19804, 2016.
Grimaldi, C.: Theory of percolation and tunneling regimes in nanogranular metal
films, Phys. Rev. B, 89, 214201, https://doi.org/10.1103/PhysRevB.89.214201, 2014.
Grimaldi, C., Ryser, P., and Strässler, S.: Gauge factor enhancement driven
by heterogeneity in thick-film resistors, J. Appl. Phys., 90, 322–327,
https://doi.org/10.1063/1.1376672, 2001.
Gudaitis, R., Meskinis, S., Slapikas, K., Andrulevicius, M., Niaura, G., and
Tamulevicius, S.: Piezoresistive and electrical properties of Cr containing
diamond-like carbon films, Surf Coat. Technol., 211, 80–83, https://doi.org/10.1016/j.surfcoat.2011.08.040, 2012.
HBM GmbH: Katalog für Dehnungsmessstreifen und Zubehör,
http://www.hbm.com/fileadmin/mediapool/hbmdoc/technical/s1264.pdf (last
access: 1 October 2017), 2016.
Heckmann, U., Bandorf, R., Petersen, M., Gwozdz, V., and Brauer, G.: Matching
of maximum gauge factor and TCR zero crossing of Me–DLC, in: 2011 IEEE Sensors,
Limerick, Ireland, 472–475, https://doi.org/10.1109/ICSENS.2011.6126973, 2011.
Herrmann, J., Müller, K.-H., Reda, T., Baxter, G. R., Raguse, B., d. Groot,
G. J. J. B., Chai, R., Roberts, M., and Wieczorek, L.: Nanoparticle films as
sensitive strain gauges, Appl. Phys. Lett., 91, 183105, https://doi.org/10.1063/1.2805026, 2007.
Jansson, U. and Lewin, E.: Sputter deposition of transition-metal carbide
films – A critical review from a chemical perspective, Thin Solid Films, 536,
1–24, https://doi.org/10.1016/j.tsf.2013.02.019, 2013.
Jiang, C.-W., Ni, I.-C., Tzeng, S.-D., and Kuo, W.: Nearly isotropic
piezoresistive response due to charge detour conduction in nanoparticle thin
films, Scient. Rep., 5, 11939, https://doi.org/10.1038/srep11939, 2015.
Koppert, R., Goettel, D., Freitag-Weber, O., and Schultes, G.: Nickel containing
diamond like carbon thin films, Solid State Sci., 11, 1797–1800,
https://doi.org/10.1016/j.solidstatesciences.2009.04.022, 2009.
Koppert, R., Uhlig, S., Schmid-Engel, H., Göttel, D., Probst, A.-C., Schultes,
G., and Werner, U.: Structural and physical properties of highly piezoresistive
nickel containing hydrogenated carbon thin films, Diamond Relat. Mater., 25,
50–58, https://doi.org/10.1016/j.diamond.2012.01.031, 2012.
Magnuson, M., Andersson, M., Lu, L., Hultman, L., and Jansson, U.: Electronic
structure and chemical bonding of amorphous chromium carbide thin films, J.
Phys., 24, 225004, https://doi.org/10.1088/0953-8984/24/22/225004, 2012.
Mattevi, C., Kim, H., and Chhowalla, M.: A review of chemical vapour deposition
of graphene on copper, J. Mater. Chem., 21, 3324–3334, https://doi.org/10.1039/C0JM02126A, 2011.
Petersen, M., Heckmann, U., Bandorf, R., Gwozdz, V.,Schnabel, S., Bräuer,
G., and Klages, C.-P.: Me-DLC films as material for highly sensitive temperature
compensated strain gauges, Diamond Relat. Mater., 20, 814–818, https://doi.org/10.1016/j.diamond.2011.03.036, 2011.
Petersen, M., Bandorf, R., Bräuer, G., and Klages, C.-P.: Diamond-like
carbon films as piezoresistors in highly sensitive force sensors, Diamond
Relat. Mater., 26, 50–54, https://doi.org/10.1016/j.diamond.2012.04.004, 2012.
Pierson, H. O.: Handbook of carbon, graphite, diamond, and fullerenes: properties,
processing, and applications, edited by: William, A., Noyes Publications,
Albuquerque, New Mexico, p. 61, 1993.
Puyoo, E., Malhaire, C., Thomas, D., Rafaël, R., R'Mili, M., Malchère,
A., Roiban, L., Koneti S., Bugnet, M., Sabac, A., and Le Berre, M.: Metallic
nanoparticle-based strain sensors elaborated by atomic layer deposition, Appl.
Phys. Lett., 110, 123103, https://doi.org/10.1063/1.4978778, 2017.
Schultes, G., Frey, P., Goettel, D., and Freitag-Weber, O.: Strain sensitivity
of nickel containing amorphous hydrogenated carbon (Ni:a–C:H) thin films
prepared by r.f. sputtering using substrate bias conditions, Diamond Relat.
Mater., 15, 80–89, https://doi.org/10.1016/j.diamond.2005.07.005, 2006.
Schwalb, C. H., Grimm, C., Baranowski, M., Sachser, R., Porrati, F., Reith, H.,
Das, P., Müller, J., Völklein, F., Kaya, A., and Huth, M.: A Tunable
Strain Sensor Using Nanogranular Metals, Sensors, 10, 9847–9856, https://doi.org/10.3390/s101109847, 2010.
Schwebke, S., Werner, U., and Schultes, G.: Granular metal–carbon nanocomposites
as piezoresistive sensor films – Part 2: Modeling longitudinal and transversal
strain sensitivity, J. Sens. Sens. Syst., accepted, 2018.
Witt, G. R.: The electromechanical properties of thin films and the thin film
strain gauge, Thin Solid Films, 22, 133–156, https://doi.org/10.1016/0040-6090(74)90001-7, 1974.
Short summary
This research is about future sensor devices for force, pressure, and weight. The core of such sensors for mechanical quantities is a thin film that reacts to deformation. We are developing new sensor films with higher output. Different compositions of metal containing carbon films are examined. Most preferable and stable films contain nickel and carbon. The microscopic film morphology is uncovered. Electron tunneling between nanoparticles is responsible for the very sensitive reaction.
This research is about future sensor devices for force, pressure, and weight. The core of such...