Articles | Volume 11, issue 2
J. Sens. Sens. Syst., 11, 225–231, 2022

Special issue: MikroSystemTechnik Kongress 2021

J. Sens. Sens. Syst., 11, 225–231, 2022
Regular research article
09 Aug 2022
Regular research article | 09 Aug 2022

Fabrication of integrated polysilicon waveguides for mid-infrared absorption sensing

Gerald Stocker et al.

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Cited articles

Consani, C., Ranacher, C., Tortschanoff, A., Grille, T., Irsigler, P., and Jakoby, B.: Mid-infrared photonic gas sensing using a silicon waveguide and an integrated emitter, Sensor. Actuat. B, 274, 60–65,, 2018. a, b
Cordes, K.-H., Waag, A., and Heuck, N.: Integrierte Schaltungen Grundlagen – Prozesse – Design, Pearson Deutschland, (last access: 10 June 2022), 2010. a
Costa, R., Melloni, A., and Martinelli, M.: Bandpass resonant filters in photonic-crystal waveguides, IEEE Photon. Technol. Lett., 15, 401–403,, 2003. a
Eberl, M., Jost, F., Kolb, S., Schaller, R., Dettmann, W., Gassner, S., and Skorupa, F.: Miniaturized photoacoustic CO2 gas sensors – A new approach for the automotive sector, in: AmE 2019 – Automotive meets Electronics, 10th GMM-Symposium, 12–13 March 2019, Dortmund, Germany, 1–5, ISBN 978-3-8007-4877-8, (last access: 8 August 2022), 2019. a
Jannesari, R., Ranacher, C., Consani, C., Grille, T., and Jakoby, B.: Sensitivity Optimization of a Photonic Crystal Ring Resonator for Gas Sensing Applications, Sensor. Actuat. A, 264, 347–351,, 2017. a
Short summary
We motivate how integrated waveguides (WGs) can be part of an on-chip non-dispersive infrared sensor system for environmental sensing. We report the hurdles in maintaining WG quality when integrating emitter and detector structures on the same chip. Thus, we introduce the concept of how to determine the intrinsic loss and a process scheme to protect WG structures from damage caused during fabrication. This could pave the way to systems for environmental sensing with a minimal footprint.