Articles | Volume 11, issue 2
https://doi.org/10.5194/jsss-11-225-2022
© Author(s) 2022. This work is distributed under
the Creative Commons Attribution 4.0 License.Special issue:
Fabrication of integrated polysilicon waveguides for mid-infrared absorption sensing
Related authors
Cited articles
Consani, C., Ranacher, C., Tortschanoff, A., Grille, T., Irsigler, P., and
Jakoby, B.: Mid-infrared photonic gas sensing using a silicon waveguide and
an integrated emitter, Sensor. Actuat. B, 274, 60–65,
https://doi.org/10.1016/j.snb.2018.07.096, 2018. a, b
Cordes, K.-H., Waag, A., and Heuck, N.: Integrierte Schaltungen Grundlagen –
Prozesse – Design, Pearson Deutschland,
https://elibrary.pearson.de/book/99.150005/9783863266769 (last access: 10 June 2022), 2010. a
Costa, R., Melloni, A., and Martinelli, M.: Bandpass resonant filters in
photonic-crystal waveguides, IEEE Photon. Technol. Lett., 15, 401–403,
https://doi.org/10.1109/LPT.2002.807953, 2003. a
Eberl, M., Jost, F., Kolb, S., Schaller, R., Dettmann, W., Gassner, S., and
Skorupa, F.: Miniaturized photoacoustic CO2 gas sensors – A new approach for the automotive sector, in: AmE 2019 – Automotive meets Electronics, 10th GMM-Symposium, 12–13 March 2019, Dortmund, Germany,
1–5, ISBN 978-3-8007-4877-8, https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=8727851&isnumber=8727837 (last access: 8 August 2022), 2019. a
Jannesari, R., Ranacher, C., Consani, C., Grille, T., and Jakoby, B.:
Sensitivity Optimization of a Photonic Crystal Ring Resonator for Gas Sensing
Applications, Sensor. Actuat. A, 264, 347–351, https://doi.org/10.1016/j.sna.2017.08.017, 2017. a