This article describes a small prototype sensor designed to sense carbon dioxide (CO₂) levels for indoor air quality monitoring. The device uses a photoacoustic detector fabricated using a wafer-bonding process. This allows for high-volume production of the sensors. The prototype presented is small in size and can detect CO₂ levels as low as 81 ppm with a response time of 53 s. Our results show suitability for application in indoor air quality control systems.

Infrared spectroscopy is great for determining the composition of liquids. Combined with attenuated total reflection (ATR), one can just put the sample on the sensitive surface. We made a compact device with a diamond-coated silicon ATR crystal to protect the surface against aggressive fluids. Silicon crystal, light source and detector are hermetically sealed in a housing. Our tests show that the diamond coating enhanced the sensitivity compared to uncoated ATR elements as predicted by theory.

We present a photoacoustic sensor enabling fast, inexpensive, and highly sensitive methane detection in environmental monitoring applications. Six different T-cell designs were both theoretically and experimentally investigated. The aim was to understand the photoacoustic signal generation and resonances in relation to the different cell geometries, and determine the long-term stability and the detection limits for methane. These were below the methane background concentration in air of 1.8 ppm.

Detection of flammable gases is necessary to avoid explosive atmospheres. Commercial pellistors require an operation temperature above 450 °C for the detection of methane. We present a novel wireless low-power catalytic gas sensor system based on non-precious metal catalyst for the detection of methane and propane operated at 350 °C. The combination of a MEMS-based sensor with a low-power radio system provides the opportunity to monitor complex infrastructures without using a power grid.