Articles | Volume 12, issue 1
https://doi.org/10.5194/jsss-12-123-2023
© Author(s) 2023. This work is distributed under
the Creative Commons Attribution 4.0 License.
the Creative Commons Attribution 4.0 License.
Special issue:
https://doi.org/10.5194/jsss-12-123-2023
© Author(s) 2023. This work is distributed under
the Creative Commons Attribution 4.0 License.
the Creative Commons Attribution 4.0 License.
Compact silicon-based attenuated total reflection (ATR) sensor module for liquid analysis
Armin Lambrecht
CORRESPONDING AUTHOR
Department Gas and Process Technology, Fraunhofer IPM, Freiburg
79110, Germany
Carsten Bolwien
Department Gas and Process Technology, Fraunhofer IPM, Freiburg
79110, Germany
Hendrik Fuhr
Department Gas and Process Technology, Fraunhofer IPM, Freiburg
79110, Germany
Gerd Sulz
Department Gas and Process Technology, Fraunhofer IPM, Freiburg
79110, Germany
Annett Isserstedt-Trinke
Micro-Hybrid Electronic GmbH, Hermsdorf 07629, Germany
André Magi
Micro-Hybrid Electronic GmbH, Hermsdorf 07629, Germany
Steffen Biermann
Micro-Hybrid Electronic GmbH, Hermsdorf 07629, Germany
Jürgen Wöllenstein
Department Gas and Process Technology, Fraunhofer IPM, Freiburg
79110, Germany
Department of Microsystems Engineering – IMTEK, University of Freiburg, Freiburg 79110, Germany
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Short summary
Infrared spectroscopy is great for determining the composition of liquids. Combined with attenuated total reflection (ATR), one can just put the sample on the sensitive surface. We made a compact device with a diamond-coated silicon ATR crystal to protect the surface against aggressive fluids. Silicon crystal, light source and detector are hermetically sealed in a housing. Our tests show that the diamond coating enhanced the sensitivity compared to uncoated ATR elements as predicted by theory.
Infrared spectroscopy is great for determining the composition of liquids. Combined with...
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