Articles | Volume 12, issue 1
Regular research article
12 Apr 2023
Regular research article |  | 12 Apr 2023

Compact silicon-based attenuated total reflection (ATR) sensor module for liquid analysis

Armin Lambrecht, Carsten Bolwien, Hendrik Fuhr, Gerd Sulz, Annett Isserstedt-Trinke, André Magi, Steffen Biermann, and Jürgen Wöllenstein

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Cited articles

Anton Paar: Carbo 520 Optical,, last access: 26 July 2022. 
Arndt, N., Bolwien, C., Sulz, G., Kühnemann, F., and Lambrecht, A.: Diamond-Coated Silicon ATR Elements for Process Analytics, Sensors, 21, 6442,, 2021. 
art photonics GmbH: Fiber Optic ATR-Probes,, last access: 26 July 2022. 
Centec: CARBOTEC NIR,, last access: 26 July 2022. 
de Graaf, G., der Vlist, W., and Wolffenbuttel, R. F.: Design and fabrication steps for a MEMS-based infrared spectrometer using evanescent wave sensing, Sensor. Actuat. A-Phys., 142, 211–216,, 2008. 
Short summary
Infrared spectroscopy is great for determining the composition of liquids. Combined with attenuated total reflection (ATR), one can just put the sample on the sensitive surface. We made a compact device with a diamond-coated silicon ATR crystal to protect the surface against aggressive fluids. Silicon crystal, light source and detector are hermetically sealed in a housing. Our tests show that the diamond coating enhanced the sensitivity compared to uncoated ATR elements as predicted by theory.