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Journal of Sensors and Sensor Systems An open-access peer-reviewed journal
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Articles | Volume 6, issue 1
J. Sens. Sens. Syst., 6, 121–133, 2017
https://doi.org/10.5194/jsss-6-121-2017

Special issue: Sensors and Measurement Systems 2016

J. Sens. Sens. Syst., 6, 121–133, 2017
https://doi.org/10.5194/jsss-6-121-2017

Regular research article 02 Mar 2017

Regular research article | 02 Mar 2017

Transferable micromachined piezoresistive force sensor with integrated double-meander-spring system

Gerry Hamdana et al.

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Cited articles

Bonev, I. and Zlatanov, D.: Advantages of the modified Euler angles in the design and control of PKMs, Proceeding Parallel Kinematic Mach. Int. Conf., 171–1880, 2002.
Brand, U., Li, Z., Gao, S., Hahn, S., and Hiller, K.: Silicon double spring for the simultaneous calibration of probing forces and deflections in the micro range, Meas. Sci. Technol., 27, 15601, https://doi.org/10.1088/0957-0233/27/1/015601, 2016.
Choi, W., Lee, J., Yoo, Y. K., Kang, S., Kim, J., and Lee, J. H.: Enhanced sensitivity of piezoelectric pressure sensor with microstructured polydimethylsiloxane layer Enhanced sensitivity of piezoelectric pressure sensor with microstructured polydimethylsiloxane layer, Appl. Phys. Lett., 104, 123701, https://doi.org/10.1063/1.4869816, 2016.
COMSOL Multyphisics: COMSOL Multiphysics Release Notes: Version 4.3b, COMSOL AB, Stockholm, Sweden, available at: https://www.comsol.de/shared/downloads/4.3b/ReleaseNotes.pdf, 2013.
Doering, L., Nesterov, V., and Peiner, E.: Mikrokraftsensor, German Patent No. 10 2010 012 701, 2013.

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