Journal of Sensors and Sensor Systems
Journal of Sensors and Sensor Systems
JSSS
Articles | Volume 10, issue 2
Articles | Volume 10, issue 2
https://doi.org/10.5194/jsss-10-271-2021
© Author(s) 2021. This work is distributed under
the Creative Commons Attribution 4.0 License.
Special issue:
https://doi.org/10.5194/jsss-10-271-2021
© Author(s) 2021. This work is distributed under
the Creative Commons Attribution 4.0 License.
Articles | Volume 10, issue 2
Regular research article
 | 
19 Nov 2021
Regular research article |  | 19 Nov 2021

High-temperature behavior of housed piezoelectric resonators based on CTGS

Michal Schulz, Rezvan Ghanavati, Fabian Kohler, Jürgen Wilde, and Holger Fritze

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Assembly and interconnection technology for high-temperature bulk acoustic wave resonators
Fabian Kohler, Monika Farina, Michal Schulz, Holger Fritze, and Jürgen Wilde
J. Sens. Sens. Syst., 11, 83–97, https://doi.org/10.5194/jsss-11-83-2022,https://doi.org/10.5194/jsss-11-83-2022, 2022
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Cited articles

Bruckner, G., Hauser, R., Stelzer, A., Maurer, L., Reindl, L., Teichmann, R., and Biniasch, J.: High temperature stable SAW based tagging system for identifying a pressure sensor, IEEE International Frequency COntrol Symposion and PDA Exhibition Jointly with the 17th European Frequency and Time Forum, 4-8 May 2003, Tampa, FL, USA, 942–947, 2003. a
CRYSTRAN: Sapphire IR  Transmission data table, Crystran Ltd. [data set], available at: https://www.crystran.co.uk/optical-materials/sapphire-al2o3 (last access: 2 June 2021), 2019. a
Edler, F.: Precise temperature measurement above 1000 ∘C using thermocouples, Proc. Estonian Acad. Sci. Eng., 13, 310–319, 2007. a
Fachberger, R., Bruckner, G., Knoll, G., Hauser, R., Biniasch J., and Reindl, L.: Applicability of LiNbO3, langasite and GaPO4 in high temperature SAW sensors operating at radio frequencies, in: IEEE T. Ultrason. Ferroelect. Freq. Control, 51, 1427–1431, 2004. a
Fritze, H.: High-temperature bulk acoustic wave sensors, Meas. Sci. Technol., 22, 012002, https://doi.org/10.1088/0957-0233/22/1/012002, 2011. a, b, c, d, e
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Temperature sensors based on piezoelectric devices enable precise measurement of temperature changes in harsh environments such as high temperatures or aggressive atmospheres. In the case of this device, the change in the temperature is detected by means of the changing resonance frequency of the sensor. Here a sensor device based on catangasite (an isomorph of quartz) is presented. We discuss its behavior at elevated temperatures and confirm that it can successfully operate up to 1030 °C.
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Sensors and Measurement Science International SMSI 2021