Articles | Volume 9, issue 1
Regular research article
15 May 2020
Regular research article |  | 15 May 2020

Measurement of the Beruforge 152DL thin-film lubricant using a developed thin-film thickness standard

Sebastian Metzner, Tamara Reuter, and Tino Hausotte

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Cited articles

Cardin, J. and Leduc, D.: Determination of refractive index, thickness, and the optical losses of thin films from prism-film coupling measurements, Appl. Opt., 47, 894,, 2008. a
Ghim, Y.-S. and Kim, S.-W.: Thin-film thickness profile and its refractive index measurements by dispersive white-light interferometry, Opt. Express, 14, 11885,, 2006. a
Ghim, Y.-S. and Kim, S.-W.: Fast, precise, tomographic measurements of thin films, Appl. Phys. Lett., 91, 091903,, 2007. a
Gonçalves, D. and Irene, E. A.: Fundamentals and applications of spectroscopic ellipsometry, Química Nova, 25, 794–800,, 2002. a
Hausotte, T.: Nanopositionier- und Nanomessmaschinen: Geräte für hochpräzise makro- bis nanoskalige Oberflächen- und Koordinatenmessungen, Pro Business, 2010. a
Short summary
For the determination of the refractive index of the lubricant used in the sheet-bulk metal forming process, a lubricant thin-film thickness standard was developed which represents a continuous measuring range from 6 to 100 μm. To determine the refractive index, the thin-film thickness standard was measured with a coaxial interferometric measurement system in various thickness ranges. The results show changing optical properties with increasing layer thickness.