Articles | Volume 9, issue 1
J. Sens. Sens. Syst., 9, 157–165, 2020
https://doi.org/10.5194/jsss-9-157-2020

Special issue: Sensors and Measurement Systems 2019

J. Sens. Sens. Syst., 9, 157–165, 2020
https://doi.org/10.5194/jsss-9-157-2020
Regular research article
15 May 2020
Regular research article | 15 May 2020

Measurement of the Beruforge 152DL thin-film lubricant using a developed thin-film thickness standard

Sebastian Metzner et al.

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Cited articles

Cardin, J. and Leduc, D.: Determination of refractive index, thickness, and the optical losses of thin films from prism-film coupling measurements, Appl. Opt., 47, 894, https://doi.org/10.1364/ao.47.000894, 2008. a
Ghim, Y.-S. and Kim, S.-W.: Thin-film thickness profile and its refractive index measurements by dispersive white-light interferometry, Opt. Express, 14, 11885, https://doi.org/10.1364/oe.14.011885, 2006. a
Ghim, Y.-S. and Kim, S.-W.: Fast, precise, tomographic measurements of thin films, Appl. Phys. Lett., 91, 091903, https://doi.org/10.1063/1.2776015, 2007. a
Gonçalves, D. and Irene, E. A.: Fundamentals and applications of spectroscopic ellipsometry, Química Nova, 25, 794–800, https://doi.org/10.1590/s0100-40422002000500015, 2002. a
Hausotte, T.: Nanopositionier- und Nanomessmaschinen: Geräte für hochpräzise makro- bis nanoskalige Oberflächen- und Koordinatenmessungen, Pro Business, 2010. a
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Short summary
For the determination of the refractive index of the lubricant used in the sheet-bulk metal forming process, a lubricant thin-film thickness standard was developed which represents a continuous measuring range from 6 to 100 μm. To determine the refractive index, the thin-film thickness standard was measured with a coaxial interferometric measurement system in various thickness ranges. The results show changing optical properties with increasing layer thickness.